[Scan]
initial_time=2016-01-27T21:00:53
final_time=2016-01-27T21:01:12
ip_count=19
run=1025
dataset=3
scan=176
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.79465E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-6.45745E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=4.1784E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.80674E-9
ql4_vset=
ql4_vmon=7.39098E-4
ql4_imon=8.43632E-10
mult1=-1.6146E-8
mult2=-2.78448E-9
rf_tmon=-4.17596E-3
rf_agc=3.34357E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=4.06373E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66739E0
bslens_imon=2.5114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1983E1
lens5a_imon=1.97448E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.05181E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53615E1
cs_ef1b_imon=2.78895E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04558E2
lens23_imon=1.02008E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0464E1
cs_ea1_imon=2.58998E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98641E0
lens1_imon=1.58054E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65356E1
os_ef1alow_imon=2.99086E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03732E1
cs_ea2_imon=1.53949E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.90989E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=4.03666E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=2.8654E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15188E1
os_ea1_imon=1.88741E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.09164E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27569E0
cs_ionrep_imon=1.19262E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0178E1
cs_anode1_imon=2.9217E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=8.6478E-10
tplens_vset=1.4E-1
tplens_vmon=1.63789E0
tplens_imon=-2.70572E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26428E1
iondef3_imon=1.49312E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26681E1
iondef2_imon=1.57382E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02917E2
lens6_imon=2.98395E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=4.27401E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30932E0
ionrepsh_imon=1.73982E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33569E1
lens5b_imon=2.20242E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74582E1
cs_ef2b_imon=3.12535E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.32158E-1
os_ea2_imon=-4.29845E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.00747E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7135E1
cs_ef2a_imon=3.18756E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62566E0
os_ef2alow_imon=-2.48423E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.37572E-1
os_ef2bup_imon=-5.32698E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10816E1
os_restr2_imon=2.87166E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.3145E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01919E1
cs_anode2_imon=2.23638E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74547E1
iondef1_imon=1.09812E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.07704E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.03394E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=3.37064E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10871E0
cs_ionaccel_imon=-1.72315E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47195E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56289E1
einzel_imon=7.80947E-6
window_vset=0.0E0
window_vmon=1.77141E-1
window_imon=-9.89867E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39168E-4
mask2_vset=0.0E0
mask2_vmon=-1.86912E1
mask2_imon=-6.73619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.58692E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.77639E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=6.98522E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.39821E0
defgridb_imon=5.94463E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33941E1
os_fil1_imon=4.90107E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.40326E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62596E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30762E1
cs_fil1_imon=9.97265E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63658E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62773E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07901E-2
os_fil2_imon=-2.4375E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.10325E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.28573E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32773E-1
cs_fil2_imon=-2.55334E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01458E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21589E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.99E-1
chamber_ion_pmon=1.19757E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.93959E-1
res40_imon=-2.40777E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.379E3	2.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80016E1	-4.76837E-4	-8.8E1	1.43051E-4	4.33922E-3	9.38892E-2	2.71496E1	-3.26664E1	-3.26236E1	2.68112E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9978E-1
2.0E0	9.6581E4	1.02E2	3.16E2	1.6E2	-7.21643E-2	-8.80021E1	-5.48363E-4	-8.8E1	1.19209E-4	4.57764E-3	9.39846E-2	2.71909E1	-3.265E1	-3.26338E1	2.68045E1	1.20017E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.00302E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80015E1	-7.15256E-4	-8.80002E1	4.05312E-4	4.79221E-3	9.38892E-2	2.72455E1	-3.26496E1	-3.26077E1	2.68192E1	1.19913E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.9978E-1
4.0E0	2.0891E4	5.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80016E1	-4.76837E-4	-8.80001E1	1.19209E-4	4.86374E-3	9.38416E-2	2.71008E1	-3.26398E1	-3.2617E1	2.68058E1	1.20209E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80015E1	-5.24521E-4	-8.80002E1	-2.14577E-4	4.74453E-3	9.38177E-2	2.71645E1	-3.2644E1	-3.26524E1	2.67908E1	1.19861E-7	2.52538E-3	2.52538E-3	6.33486E-3	2.9926E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80016E1	-6.19888E-4	-8.80001E1	1.19209E-4	4.52995E-3	9.39131E-2	2.71619E1	-3.26501E1	-3.26159E1	2.68194E1	1.20383E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80017E1	-4.76837E-4	-8.80002E1	0.0E0	4.93526E-3	9.38416E-2	2.73038E1	-3.26655E1	-3.26177E1	2.68043E1	1.1987E-7	2.51447E-3	2.51447E-3	6.3023E-3	3.00878E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80018E1	-5.96046E-4	-8.80002E1	4.05312E-4	5.126E-3	9.37223E-2	2.73009E1	-3.26524E1	-3.26416E1	2.68215E1	1.20116E-7	2.52338E-3	2.52338E-3	6.33065E-3	3.03139E-1
1.2E1	5.5E1	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80017E1	-5.48363E-4	-8.80002E1	4.29153E-4	5.10216E-3	9.38177E-2	2.73169E1	-3.2675E1	-3.26213E1	2.67914E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.04505E-1
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80019E1	-5.96046E-4	-8.79999E1	5.00679E-4	4.76837E-3	9.35078E-2	2.72282E1	-3.26645E1	-3.26098E1	2.6813E1	1.19809E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02133E-1
1.4E1	3.149E3	1.0E0	5.66E2	3.82E2	-7.38649E-2	-8.80016E1	-4.29153E-4	-8.80003E1	4.29153E-4	4.81606E-3	9.38654E-2	2.71505E1	-3.26762E1	-3.2662E1	2.68064E1	1.20311E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.00197E-1
1.5E1	4.3E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80019E1	-2.86102E-4	-8.80001E1	3.33786E-4	4.91142E-3	9.37223E-2	2.71591E1	-3.26356E1	-3.2638E1	2.68202E1	1.20106E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.01738E-1
1.6E1	2.44E2	1.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80018E1	-5.72205E-4	-8.80003E1	3.09944E-4	5.24521E-3	9.40323E-2	2.71291E1	-3.2647E1	-3.26392E1	2.67908E1	1.19965E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9874E-1
1.7E1	2.7E2	0.0E0	6.87E2	4.7E2	-7.37874E-2	-8.80016E1	-8.10623E-4	-8.80002E1	3.8147E-4	5.10216E-3	9.39608E-2	2.71901E1	-3.26644E1	-3.25865E1	2.68302E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9952E-1
1.8E1	1.177E3	0.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80017E1	-3.33786E-4	-8.8E1	4.05312E-4	4.8399E-3	9.40561E-2	2.71158E1	-3.26849E1	-3.26639E1	2.68016E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9978E-1
1.9E1	1.024E3	0.0E0	7.68E2	5.29E2	-7.30146E-2	-8.8002E1	-6.19888E-4	-8.79998E1	5.24521E-4	5.126E-3	9.377E-2	2.72642E1	-3.26627E1	-3.26404E1	2.68064E1	1.20106E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.9892E-1
2.0E1	2.2725E4	6.0E0	8.08E2	5.58E2	-7.30146E-2	-8.80018E1	-6.67572E-4	-8.8E1	5.96046E-4	4.79221E-3	9.37223E-2	2.74001E1	-3.27281E1	-3.26242E1	2.68106E1	1.19913E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.00041E-1
2.1E1	4.5E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.8002E1	-6.67572E-4	-8.80001E1	3.33786E-4	4.98295E-3	9.37223E-2	2.71026E1	-3.26813E1	-3.26597E1	2.68172E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01871E-1
2.2E1	1.68E3	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80019E1	-4.76837E-4	-8.80005E1	5.72205E-4	4.45843E-3	9.39846E-2	2.72172E1	-3.2649E1	-3.26296E1	2.67949E1	1.20209E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80022E1	-7.62939E-4	-8.80003E1	7.39098E-4	5.126E-3	9.37939E-2	2.74547E1	-3.26681E1	-3.26428E1	2.68052E1	1.19757E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.99E-1