[Scan]
initial_time=2016-01-27T21:01:46
final_time=2016-01-27T21:02:06
ip_count=19
run=1025
dataset=3
scan=178
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.83178E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.51705E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=3.87692E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.72629E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=8.46636E-10
mult1=-1.74825E-8
mult2=-2.70663E-9
rf_tmon=-4.55448E-3
rf_agc=3.39344E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=4.2938E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6727E0
bslens_imon=2.41938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19435E1
lens5a_imon=1.98651E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.05026E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=2.78196E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.02149E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04764E1
cs_ea1_imon=2.58113E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00764E0
lens1_imon=1.45312E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64494E1
os_ef1alow_imon=2.99748E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0385E1
cs_ea2_imon=1.52922E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=2.90377E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=4.00007E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=2.87386E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15129E1
os_ea1_imon=1.88564E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2462E0
cs_ionrep_imon=1.19899E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93353E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01905E1
cs_anode1_imon=2.92972E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=7.8454E-10
tplens_vset=1.4E-1
tplens_vmon=1.64438E0
tplens_imon=-1.78547E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26116E1
iondef3_imon=1.50445E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26693E1
iondef2_imon=1.56886E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98434E-4
ql6_vset=1.0E-1
ql6_vmon=9.40084E-2
ql6_imon=4.11332E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28513E0
ionrepsh_imon=1.75291E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33504E1
lens5b_imon=2.1787E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7476E1
cs_ef2b_imon=3.11136E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.26259E-1
os_ea2_imon=-5.43106E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00602E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70933E1
cs_ef2a_imon=3.19317E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60897E0
os_ef2alow_imon=-2.72402E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.33153E-1
os_ef2bup_imon=-5.24319E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11105E1
os_restr2_imon=2.86773E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.30247E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.24317E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72204E1
iondef1_imon=1.09564E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68214E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.01302E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=3.27146E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10732E0
cs_ionaccel_imon=-1.73293E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55925E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=1.31448E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39073E-4
mask2_vset=0.0E0
mask2_vmon=-1.86825E1
mask2_imon=-5.50827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92606E3
multa_neg_imon=7.53382E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.49678E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.1905E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.53404E0
defgridb_imon=6.16761E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33926E1
os_fil1_imon=5.37688E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.37108E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6243E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30711E1
cs_fil1_imon=9.96822E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63777E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63037E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.93972E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.87833E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.14526E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29263E-1
cs_fil2_imon=-2.13138E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37047E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2168E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32418E-3
inlet_lpb_pmon=3.01209E-1
chamber_ion_pmon=1.20244E-7
chamber_cvt_pmon=2.52139E-3
foreline_cvt_pmon=2.52139E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.56889E-1
res40_imon=-2.41408E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.41E3	0.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80015E1	-5.48363E-4	-8.80003E1	-4.76837E-5	4.98295E-3	9.37939E-2	2.72514E1	-3.26626E1	-3.26095E1	2.681E1	1.20106E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.97647E-1
2.0E0	9.6785E4	9.4E1	3.16E2	1.6E2	-7.27828E-2	-8.80016E1	-7.15256E-4	-8.80005E1	3.09944E-4	5.126E-3	9.38416E-2	2.73806E1	-3.26406E1	-3.26266E1	2.68208E1	1.20158E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.00197E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80017E1	-1.00136E-3	-8.80006E1	5.24521E-4	4.8399E-3	9.37462E-2	2.71468E1	-3.26662E1	-3.26293E1	2.67903E1	1.19773E-7	2.5216E-3	2.5216E-3	6.31251E-3	3.02097E-1
4.0E0	2.0521E4	1.4E1	6.55E2	3.98E2	-7.22418E-2	-8.8002E1	-9.77516E-4	-8.80003E1	5.00679E-4	4.673E-3	9.38416E-2	2.73958E1	-3.26591E1	-3.2626E1	2.68117E1	1.20245E-7	2.52029E-3	2.52029E-3	6.29558E-3	3.01326E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.8002E1	-7.86781E-4	-8.80004E1	4.29153E-4	4.91142E-3	9.38177E-2	2.72366E1	-3.26741E1	-3.26272E1	2.68304E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80018E1	-5.24521E-4	-8.80001E1	3.09944E-4	4.98295E-3	9.40323E-2	2.72666E1	-3.26603E1	-3.26416E1	2.68076E1	1.19965E-7	2.52647E-3	2.52647E-3	6.31837E-3	3.02922E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80018E1	-6.19888E-4	-8.80004E1	2.38419E-4	4.81606E-3	9.377E-2	2.72485E1	-3.26915E1	-3.26248E1	2.67914E1	1.20004E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.0148E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80017E1	-1.0252E-3	-8.80003E1	2.38419E-5	5.126E-3	9.35793E-2	2.73796E1	-3.26458E1	-3.26308E1	2.68094E1	1.20487E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.01085E-1
1.2E1	4.5E1	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80019E1	-1.14441E-3	-8.80002E1	2.14577E-4	4.64916E-3	9.38654E-2	2.73735E1	-3.26726E1	-3.26207E1	2.6828E1	1.20174E-7	2.51116E-3	2.51116E-3	6.31837E-3	2.9952E-1
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80018E1	-1.09673E-3	-8.80005E1	1.19209E-4	4.72069E-3	9.38654E-2	2.71861E1	-3.26567E1	-3.26434E1	2.68146E1	1.198E-7	2.51203E-3	2.51203E-3	6.31817E-3	2.98156E-1
1.4E1	3.214E3	1.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80018E1	-8.82149E-4	-8.80007E1	7.15256E-5	4.64916E-3	9.39131E-2	2.73616E1	-3.26639E1	-3.26374E1	2.68088E1	1.20226E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00041E-1
1.5E1	3.6E1	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80018E1	-4.52995E-4	-8.80001E1	3.57628E-4	4.86374E-3	9.36747E-2	2.73399E1	-3.26651E1	-3.26452E1	2.6819E1	1.20122E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00563E-1
1.6E1	2.38E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80017E1	-4.76837E-4	-8.80003E1	1.43051E-4	4.69685E-3	9.38416E-2	2.72769E1	-3.26789E1	-3.26014E1	2.67982E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00824E-1
1.7E1	2.96E2	1.0E0	6.87E2	4.7E2	-7.18554E-2	-8.80019E1	-7.39098E-4	-8.80002E1	7.15256E-5	4.57764E-3	9.40323E-2	2.72576E1	-3.2614E1	-3.26705E1	2.67952E1	1.2033E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.97963E-1
1.8E1	1.155E3	2.0E0	7.27E2	5.0E2	-7.14689E-2	-8.80021E1	-9.53674E-4	-8.8E1	3.57628E-4	4.57764E-3	9.40084E-2	2.73502E1	-3.265E1	-3.2626E1	2.68247E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.97187E-1
1.9E1	9.99E2	1.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80017E1	-9.53674E-4	-8.80001E1	5.96046E-4	4.79221E-3	9.40323E-2	2.72302E1	-3.26691E1	-3.25888E1	2.68214E1	1.19913E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.97445E-1
2.0E1	2.25E4	6.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80018E1	-8.10623E-4	-8.8E1	4.05312E-4	4.45843E-3	9.36031E-2	2.74902E1	-3.26452E1	-3.26603E1	2.68262E1	1.20158E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.97901E-1
2.1E1	5.2E1	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80017E1	-5.96046E-4	-8.79998E1	3.09944E-4	4.8399E-3	9.38892E-2	2.75127E1	-3.26661E1	-3.26001E1	2.68012E1	1.20174E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00824E-1
2.2E1	1.653E3	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.8002E1	-8.34465E-4	-8.8E1	1.90735E-4	4.93526E-3	9.38416E-2	2.73259E1	-3.26548E1	-3.26566E1	2.68051E1	1.19953E-7	2.51096E-3	2.51096E-3	6.32356E-3	3.02511E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80018E1	-5.72205E-4	-8.80003E1	1.19209E-4	4.48227E-3	9.40084E-2	2.72204E1	-3.26693E1	-3.26116E1	2.68214E1	1.20244E-7	2.52139E-3	2.52139E-3	6.32418E-3	3.01209E-1