[Scan]
initial_time=2016-01-27T21:02:39
final_time=2016-01-27T21:02:59
ip_count=19
run=1025
dataset=3
scan=180
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.86472E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.50907E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=4.10402E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.74418E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=8.27992E-10
mult1=-1.68203E-8
mult2=-2.76851E-9
rf_tmon=-5.28148E-3
rf_agc=3.30632E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=4.12583E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62805E0
bslens_imon=2.58681E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19869E1
lens5a_imon=1.98635E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.05048E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53616E1
cs_ef1b_imon=2.78268E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04774E1
cs_ea1_imon=2.56306E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03134E0
lens1_imon=1.47442E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64897E1
os_ef1alow_imon=3.00036E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03945E1
cs_ea2_imon=1.5275E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=2.90449E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=4.09949E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11003E1
os_restr1_imon=2.87963E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14981E1
os_ea1_imon=1.88833E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63503E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22834E0
cs_ionrep_imon=1.17431E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=2.93333E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=7.9155E-10
tplens_vset=1.4E-1
tplens_vmon=1.65881E0
tplens_imon=-3.29731E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.50942E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26753E1
iondef2_imon=1.58972E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98328E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=4.05657E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24225E0
ionrepsh_imon=1.775E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3415E1
lens5b_imon=2.1546E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.28935E-1
os_ea2_imon=-4.47922E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06143E2
lens4b_imon=2.00376E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.19173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62699E0
os_ef2alow_imon=-2.69158E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.23543E-1
os_ef2bup_imon=-5.22157E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10967E1
os_restr2_imon=2.85728E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.31875E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.23272E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71339E1
iondef1_imon=1.06446E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.0708E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.03004E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=3.42417E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11693E0
cs_ionaccel_imon=-1.65724E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56501E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=2.1494E-1
window_imon=-1.1671E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.86632E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.44306E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93689E3
defgrida_imon=6.81735E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=6.98073E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.68521E0
defgridb_imon=6.21249E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33896E1
os_fil1_imon=5.59913E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.95061E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62816E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30661E1
cs_fil1_imon=9.95837E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63441E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63047E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.99127E-2
os_fil2_imon=-2.4257E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.53906E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.9547E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31723E-1
cs_fil2_imon=-2.6059E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04612E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21546E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.20311E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.01939E-1
res40_imon=-2.40327E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.387E3	2.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80015E1	-5.72205E-4	-8.80006E1	1.90735E-4	5.29289E-3	9.408E-2	2.72769E1	-3.26248E1	-3.26356E1	2.68118E1	1.20142E-7	2.52025E-3	2.52025E-3	6.32328E-3	3.00348E-1
2.0E0	9.7428E4	9.9E1	3.16E2	1.6E2	-7.35556E-2	-8.80015E1	-6.67572E-4	-8.80003E1	0.0E0	5.45979E-3	9.39369E-2	2.73277E1	-3.26468E1	-3.26303E1	2.6825E1	1.20122E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.01871E-1
3.0E0	2.0E1	0.0E0	4.85E2	2.79E2	-7.40967E-2	-8.8002E1	-5.00679E-4	-8.80003E1	9.53674E-5	5.14984E-3	9.39131E-2	2.74555E1	-3.26667E1	-3.26378E1	2.68172E1	1.20244E-7	2.52139E-3	2.52139E-3	6.31299E-3	3.00942E-1
4.0E0	2.0731E4	9.0E0	6.55E2	3.98E2	-7.43285E-2	-8.80018E1	-2.14577E-4	-8.80004E1	3.33786E-4	4.93526E-3	9.41992E-2	2.73747E1	-3.26521E1	-3.26486E1	2.68197E1	1.19953E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.99175E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80018E1	-8.58307E-4	-8.80006E1	1.66893E-4	5.03063E-3	9.42945E-2	2.71627E1	-3.26609E1	-3.26338E1	2.6801E1	1.20325E-7	2.51886E-3	2.51886E-3	6.31519E-3	2.98276E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80018E1	-6.67572E-4	-8.80006E1	3.09944E-4	5.07832E-3	9.38654E-2	2.73081E1	-3.26657E1	-3.26236E1	2.68082E1	1.20122E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.80018E1	-6.4373E-4	-8.8E1	2.6226E-4	4.8399E-3	9.4223E-2	2.73135E1	-3.26603E1	-3.2653E1	2.67963E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.02253E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.43285E-2	-8.8002E1	-6.91414E-4	-8.80005E1	3.8147E-4	4.8399E-3	9.38177E-2	2.73488E1	-3.26703E1	-3.26236E1	2.67943E1	1.19766E-7	2.51359E-3	2.51359E-3	6.32418E-3	3.01475E-1
1.2E1	5.3E1	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80021E1	-5.96046E-4	-8.80002E1	1.66893E-4	4.91142E-3	9.41515E-2	2.71477E1	-3.26669E1	-3.26158E1	2.681E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.02511E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80019E1	-3.8147E-4	-8.80003E1	2.38419E-4	4.86374E-3	9.40084E-2	2.73321E1	-3.26681E1	-3.265E1	2.67836E1	1.20122E-7	2.51116E-3	2.51116E-3	6.31288E-3	2.9926E-1
1.4E1	3.151E3	1.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80019E1	-6.67572E-4	-8.8E1	-1.43051E-4	4.76837E-3	9.38892E-2	2.72841E1	-3.26512E1	-3.26116E1	2.68028E1	1.19653E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9952E-1
1.5E1	3.2E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80018E1	-4.52995E-4	-8.80004E1	2.38419E-5	4.91142E-3	9.38177E-2	2.71199E1	-3.26567E1	-3.25924E1	2.68052E1	1.20226E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00302E-1
1.6E1	2.67E2	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80016E1	-4.29153E-4	-8.80003E1	4.52995E-4	4.48227E-3	9.39369E-2	2.71134E1	-3.26476E1	-3.2617E1	2.68124E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0071E-1
1.7E1	3.04E2	1.0E0	6.87E2	4.7E2	-7.286E-2	-8.80013E1	-5.72205E-4	-8.80004E1	5.24521E-4	4.64916E-3	9.36747E-2	2.74408E1	-3.26773E1	-3.2636E1	2.67989E1	1.19809E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.02922E-1
1.8E1	1.152E3	0.0E0	7.27E2	5.0E2	-7.42513E-2	-8.80017E1	-6.19888E-4	-8.80003E1	2.6226E-4	5.07832E-3	9.39369E-2	2.74865E1	-3.26543E1	-3.26236E1	2.6804E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.0148E-1
1.9E1	9.76E2	1.0E0	7.68E2	5.29E2	-7.37874E-2	-8.80014E1	-5.48363E-4	-8.80003E1	3.09944E-4	4.57764E-3	9.41515E-2	2.74095E1	-3.26785E1	-3.26195E1	2.68322E1	1.20226E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9874E-1
2.0E1	2.2702E4	8.0E0	8.08E2	5.58E2	-7.35556E-2	-8.80023E1	-8.82149E-4	-8.80003E1	1.66893E-4	4.55379E-3	9.40323E-2	2.7203E1	-3.26714E1	-3.26136E1	2.68128E1	1.19902E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.00966E-1
2.1E1	5.0E1	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80017E1	-6.19888E-4	-8.80002E1	4.05312E-4	4.98295E-3	9.41992E-2	2.71717E1	-3.26771E1	-3.2608E1	2.67908E1	1.20209E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.99686E-1
2.2E1	1.677E3	1.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80019E1	-4.52995E-4	-8.79998E1	2.6226E-4	5.126E-3	9.4223E-2	2.72774E1	-3.26809E1	-3.26325E1	2.6834E1	1.20174E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00563E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80017E1	-4.29153E-4	-8.80001E1	1.43051E-4	4.60148E-3	9.37462E-2	2.71339E1	-3.26753E1	-3.26224E1	2.67926E1	1.20311E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99175E-1