[Scan]
initial_time=2016-01-27T21:03:06
final_time=2016-01-27T21:03:26
ip_count=19
run=1025
dataset=3
scan=181
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.80538E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.22892E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=4.07672E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.78626E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=8.12185E-10
mult1=-1.91923E-8
mult2=-2.69266E-9
rf_tmon=-4.23604E-3
rf_agc=3.33576E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=4.07207E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64175E0
bslens_imon=2.51392E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20151E1
lens5a_imon=1.98459E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.05288E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53714E1
cs_ef1b_imon=2.79076E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05021E1
cs_ea1_imon=2.56233E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02665E0
lens1_imon=1.37231E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64564E1
os_ef1alow_imon=2.98168E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03894E1
cs_ea2_imon=1.54181E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.845E1
cs_ef1a_imon=2.90551E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=4.09377E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11291E1
os_restr1_imon=2.87632E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15113E1
os_ea1_imon=1.87406E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63579E1
os_ef1bup_imon=3.09174E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.218E0
cs_ionrep_imon=1.1825E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93456E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01513E1
cs_anode1_imon=2.92967E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=7.97725E-10
tplens_vset=1.4E-1
tplens_vmon=1.63648E0
tplens_imon=-3.13705E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2623E1
iondef3_imon=1.48869E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26494E1
iondef2_imon=1.57942E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02903E2
lens6_imon=2.98402E-4
ql6_vset=1.0E-1
ql6_vmon=9.38892E-2
ql6_imon=4.27556E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26255E0
ionrepsh_imon=1.74604E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33613E1
lens5b_imon=2.16837E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74803E1
cs_ef2b_imon=3.13234E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.1992E-1
os_ea2_imon=-7.06339E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00487E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.18032E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63225E0
os_ef2alow_imon=-2.52269E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.59582E-1
os_ef2bup_imon=-5.36473E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10889E1
os_restr2_imon=2.86122E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.30159E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.25456E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73129E1
iondef1_imon=1.07922E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68118E1
iondef4_imon=1.08621E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=2.03295E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=3.37577E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12455E0
cs_ionaccel_imon=-1.87845E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47243E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56338E1
einzel_imon=7.62409E-6
window_vset=0.0E0
window_vmon=2.30868E-1
window_imon=-9.42292E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39155E-4
mask2_vset=0.0E0
mask2_vmon=-1.86752E1
mask2_imon=-6.30238E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92617E3
multa_neg_imon=7.4367E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93743E3
defgrida_imon=6.94178E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50155E3
multb_neg_imon=7.35092E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.44735E0
defgridb_imon=6.14662E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33916E1
os_fil1_imon=4.08898E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.52269E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62891E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30679E1
cs_fil1_imon=9.96744E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63932E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63018E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.01741E-2
os_fil2_imon=-2.5156E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.28636E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.03526E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30978E-1
cs_fil2_imon=-2.31427E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29839E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21749E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=2.97187E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.31268E-1
res40_imon=-2.49585E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.496E3	0.0E0	1.47E2	4.1E1	-7.22418E-2	-8.8002E1	-8.10623E-4	-8.80004E1	3.09944E-4	4.55379E-3	9.37939E-2	2.74632E1	-3.26803E1	-3.26272E1	2.68024E1	1.20242E-7	2.51323E-3	2.51323E-3	6.31744E-3	2.99577E-1
2.0E0	9.7841E4	9.7E1	3.16E2	1.6E2	-7.25507E-2	-8.80019E1	-6.19888E-4	-8.80003E1	3.33786E-4	4.79221E-3	9.36508E-2	2.74457E1	-3.26524E1	-3.26206E1	2.6816E1	1.19959E-7	2.51593E-3	2.51593E-3	6.31555E-3	2.98445E-1
3.0E0	1.3E1	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80022E1	-6.19888E-4	-8.80003E1	5.00679E-4	4.33922E-3	9.3627E-2	2.72721E1	-3.26496E1	-3.26425E1	2.6792E1					
4.0E0	2.0834E4	1.7E1	6.55E2	3.98E2	-7.17007E-2	-8.8002E1	-3.57628E-4	-8.8E1	4.76837E-4	4.74453E-3	9.38654E-2	2.72684E1	-3.26759E1	-3.259E1	2.68208E1	1.20243E-7	2.51498E-3	2.51498E-3	6.32858E-3	2.98592E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80021E1	-1.90735E-4	-8.79999E1	6.4373E-4	4.79221E-3	9.37462E-2	2.7251E1	-3.26218E1	-3.2647E1	2.68288E1	1.19872E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.0041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.8002E1	-3.57628E-4	-8.80002E1	3.57628E-4	4.91142E-3	9.38654E-2	2.71777E1	-3.26797E1	-3.25782E1	2.67908E1	1.20069E-7	2.53196E-3	2.53196E-3	6.31837E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80022E1	-5.72205E-4	-8.80001E1	2.86102E-4	4.52995E-3	9.41277E-2	2.74239E1	-3.26291E1	-3.26346E1	2.68032E1	1.19851E-7	2.52384E-3	2.52384E-3	6.29665E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80018E1	-8.10623E-4	-8.80001E1	4.29153E-4	4.62532E-3	9.38892E-2	2.73275E1	-3.26472E1	-3.26183E1	2.68105E1	1.20084E-7	2.52027E-3	2.52027E-3	6.29067E-3	2.99348E-1
1.2E1	4.6E1	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.8002E1	-8.58307E-4	-8.80001E1	3.33786E-4	4.76837E-3	9.408E-2	2.71937E1	-3.26407E1	-3.26646E1	2.68094E1	1.198E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.9892E-1
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80019E1	-7.62939E-4	-8.79999E1	3.09944E-4	5.07832E-3	9.44614E-2	2.72979E1	-3.26332E1	-3.26188E1	2.67962E1	1.19809E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01347E-1
1.4E1	3.17E3	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80019E1	-7.15256E-4	-8.8E1	1.19209E-4	4.3869E-3	9.42945E-2	2.73508E1	-3.26561E1	-3.26386E1	2.6819E1	1.20137E-7	2.52027E-3	2.52027E-3	6.32978E-3	3.0201E-1
1.5E1	3.0E1	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80021E1	-5.24521E-4	-8.79999E1	2.6226E-4	4.31538E-3	9.39131E-2	2.72575E1	-3.26635E1	-3.25952E1	2.68111E1	1.20004E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.03027E-1
1.6E1	2.5E2	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80018E1	-4.76837E-4	-8.79997E1	3.33786E-4	4.3869E-3	9.37223E-2	2.74158E1	-3.26731E1	-3.26336E1	2.68188E1	1.20028E-7	2.51679E-3	2.51679E-3	6.3074E-3	3.00989E-1
1.7E1	2.86E2	1.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80016E1	-6.91414E-4	-8.8E1	1.43051E-4	4.8399E-3	9.39369E-2	2.72763E1	-3.2653E1	-3.26506E1	2.67992E1	1.20337E-7	2.5199E-3	2.5199E-3	6.34231E-3	3.01748E-1
1.8E1	1.172E3	0.0E0	7.27E2	5.0E2	-7.43285E-2	-8.80017E1	-8.34465E-4	-8.79998E1	2.14577E-4	4.76837E-3	9.40084E-2	2.74084E1	-3.26488E1	-3.26591E1	2.6774E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
1.9E1	1.022E3	0.0E0	7.68E2	5.29E2	-7.43285E-2	-8.80018E1	-8.34465E-4	-8.80002E1	9.53674E-5	4.673E-3	9.37223E-2	2.73336E1	-3.26528E1	-3.2659E1	2.6807E1	1.20174E-7	2.51116E-3	2.51116E-3	6.29098E-3	3.00824E-1
2.0E1	2.3221E4	1.2E1	8.08E2	5.58E2	-7.32464E-2	-8.80021E1	-7.86781E-4	-8.80001E1	4.05312E-4	4.55379E-3	9.38177E-2	2.71789E1	-3.26543E1	-3.2632E1	2.68154E1	1.1993E-7	2.52093E-3	2.52093E-3	6.29703E-3	3.01733E-1
2.1E1	6.0E1	0.0E0	8.49E2	5.88E2	-7.42513E-2	-8.80017E1	-8.34465E-4	-8.80003E1	3.09944E-4	4.48227E-3	9.38416E-2	2.75186E1	-3.26408E1	-3.26649E1	2.68088E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9926E-1
2.2E1	1.68E3	0.0E0	8.89E2	6.17E2	-7.42513E-2	-8.8002E1	-6.19888E-4	-8.80001E1	5.48363E-4	4.45843E-3	9.39846E-2	2.72312E1	-3.2644E1	-3.26146E1	2.681E1	1.19646E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.9892E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80017E1	-7.86781E-4	-8.80001E1	2.86102E-4	4.86374E-3	9.38892E-2	2.73129E1	-3.26494E1	-3.2623E1	2.68118E1	1.19809E-7	2.51662E-3	2.51662E-3	6.29098E-3	2.97187E-1