[Scan]
initial_time=2016-01-27T21:03:33
final_time=2016-01-27T21:03:52
ip_count=19
run=1025
dataset=3
scan=182
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.84968E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-6.2952E-10
ql2_vset=
ql2_vmon=-8.58307E-4
ql2_imon=4.14896E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.74338E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=8.33511E-10
mult1=-1.87347E-8
mult2=-2.66072E-9
rf_tmon=-4.26609E-3
rf_agc=3.35379E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=4.15802E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66914E0
bslens_imon=2.57741E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19941E1
lens5a_imon=1.97694E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.05053E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53638E1
cs_ef1b_imon=2.78212E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05132E1
cs_ea1_imon=2.56347E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01252E0
lens1_imon=1.58244E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64868E1
os_ef1alow_imon=2.97967E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04033E1
cs_ea2_imon=1.51226E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84312E1
cs_ef1a_imon=2.90917E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=4.33016E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=2.87796E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1527E1
os_ea1_imon=1.90052E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63663E1
os_ef1bup_imon=3.08506E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22386E0
cs_ionrep_imon=1.17051E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93467E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02042E1
cs_anode1_imon=2.92166E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=8.57306E-10
tplens_vset=1.4E-1
tplens_vmon=1.63182E0
tplens_imon=-4.86804E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26518E1
iondef3_imon=1.49893E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26296E1
iondef2_imon=1.5685E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.9849E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=4.44376E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2569E0
ionrepsh_imon=1.75596E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3385E1
lens5b_imon=2.1781E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74771E1
cs_ef2b_imon=3.13243E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.07863E-1
os_ea2_imon=-4.07495E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06117E2
lens4b_imon=2.00576E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71184E1
cs_ef2a_imon=3.18604E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62953E0
os_ef2alow_imon=-2.61937E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.51932E-1
os_ef2bup_imon=-5.38069E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11172E1
os_restr2_imon=2.87135E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.30613E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01778E1
cs_anode2_imon=2.25189E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71543E1
iondef1_imon=1.0894E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68208E1
iondef4_imon=1.0798E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.02563E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=3.53193E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12953E0
cs_ionaccel_imon=-1.61692E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47153E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56295E1
einzel_imon=7.7723E-6
window_vset=0.0E0
window_vmon=1.95435E-1
window_imon=-1.11386E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39341E-4
mask2_vset=0.0E0
mask2_vmon=-1.86803E1
mask2_imon=-7.83385E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.63155E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93754E3
defgrida_imon=6.69787E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=6.93579E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.40433E0
defgridb_imon=5.96606E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3392E1
os_fil1_imon=3.39447E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.18272E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62545E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30737E1
cs_fil1_imon=9.97989E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64446E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62974E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.01522E-2
os_fil2_imon=-2.50515E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.017E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.2578E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30245E-1
cs_fil2_imon=-2.11347E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17906E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21681E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=3.00348E-1
chamber_ion_pmon=1.19891E-7
chamber_cvt_pmon=2.51603E-3
foreline_cvt_pmon=2.51603E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.92079E-1
res40_imon=-2.35131E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.374E3	0.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80018E1	-4.29153E-4	-8.80001E1	3.09944E-4	5.19753E-3	9.36508E-2	2.73252E1	-3.26638E1	-3.25706E1	2.67891E1	1.19861E-7	2.52647E-3	2.52647E-3	6.32386E-3	3.01085E-1
2.0E0	9.7524E4	8.4E1	3.16E2	1.6E2	-7.37103E-2	-8.80016E1	-3.33786E-4	-8.80001E1	5.00679E-4	5.10216E-3	9.39608E-2	2.72959E1	-3.26695E1	-3.26517E1	2.67808E1	1.19941E-7	2.52342E-3	2.52342E-3	6.31798E-3	2.99594E-1
3.0E0	1.5E1	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80017E1	-6.19888E-4	-8.80002E1	7.15256E-5	4.93526E-3	9.39846E-2	2.72072E1	-3.26671E1	-3.26422E1	2.67995E1	1.19883E-7	2.51271E-3	2.51271E-3	6.3074E-3	2.97823E-1
4.0E0	2.0879E4	1.7E1	6.55E2	3.98E2	-7.41738E-2	-8.80018E1	-1.66893E-4	-8.80001E1	3.09944E-4	4.8399E-3	9.377E-2	2.74108E1	-3.26549E1	-3.26236E1	2.68226E1	1.19941E-7	2.52342E-3	2.52342E-3	6.31798E-3	2.99093E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80018E1	-2.6226E-4	-8.8E1	3.09944E-4	5.17368E-3	9.38177E-2	2.71789E1	-3.26679E1	-3.2626E1	2.67897E1	1.19965E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37103E-2	-8.80022E1	-4.52995E-4	-8.8E1	3.33786E-4	4.12464E-3	9.39131E-2	2.73027E1	-3.26579E1	-3.26098E1	2.6795E1	1.19697E-7	2.52492E-3	2.52492E-3	6.32356E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.8002E1	-2.6226E-4	-8.80003E1	3.09944E-4	4.57764E-3	9.37223E-2	2.73796E1	-3.265E1	-3.25936E1	2.67812E1	1.20055E-7	2.52169E-3	2.52169E-3	6.33977E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80018E1	-3.8147E-4	-8.80003E1	3.57628E-4	4.64916E-3	9.38177E-2	2.70656E1	-3.26537E1	-3.26408E1	2.68046E1	1.19978E-7	2.51248E-3	2.51248E-3	6.29624E-3	2.98819E-1
1.2E1	5.1E1	1.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80019E1	-8.82149E-4	-8.80005E1	1.66893E-4	4.52995E-3	9.38177E-2	2.71212E1	-3.26735E1	-3.26104E1	2.67694E1	1.20209E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.01738E-1
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80019E1	-5.72205E-4	-8.80005E1	-4.76837E-5	4.76837E-3	9.38654E-2	2.73222E1	-3.26419E1	-3.26459E1	2.68082E1	1.19953E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.00966E-1
1.4E1	3.167E3	3.0E0	5.66E2	3.82E2	-7.286E-2	-8.80018E1	-7.62939E-4	-8.80002E1	7.15256E-5	4.64916E-3	9.37462E-2	2.74698E1	-3.26678E1	-3.26079E1	2.67751E1	1.1969E-7	2.51393E-3	2.51393E-3	6.29157E-3	3.01104E-1
1.5E1	4.5E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80022E1	-6.67572E-4	-8.8E1	7.15256E-5	4.52995E-3	9.41753E-2	2.74523E1	-3.26188E1	-3.26248E1	2.67914E1	1.20045E-7	2.51952E-3	2.51952E-3	6.33021E-3	2.98092E-1
1.6E1	2.56E2	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80022E1	-3.33786E-4	-8.80003E1	2.86102E-4	4.93526E-3	9.38654E-2	2.73586E1	-3.27065E1	-3.26236E1	2.68166E1	1.20122E-7	2.51771E-3	2.51771E-3	6.34588E-3	2.9952E-1
1.7E1	2.95E2	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80022E1	-4.29153E-4	-8.80002E1	1.90735E-4	4.93526E-3	9.38654E-2	2.74601E1	-3.265E1	-3.26885E1	2.68244E1	1.19953E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.0148E-1
1.8E1	1.137E3	1.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80023E1	-6.4373E-4	-8.79999E1	2.38419E-5	4.88758E-3	9.37462E-2	2.757E1	-3.26437E1	-3.26071E1	2.67989E1	1.2033E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.9874E-1
1.9E1	9.52E2	0.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80022E1	-5.72205E-4	-8.80001E1	9.53674E-5	5.03063E-3	9.38654E-2	2.74745E1	-3.26452E1	-3.26188E1	2.6804E1	1.20055E-7	2.52169E-3	2.52169E-3	6.33436E-3	3.0148E-1
2.0E1	2.3143E4	1.4E1	8.08E2	5.58E2	-7.26282E-2	-8.80024E1	-3.33786E-4	-8.79999E1	2.38419E-4	4.95911E-3	9.38416E-2	2.74532E1	-3.26791E1	-3.26372E1	2.67866E1	1.19809E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00563E-1
2.1E1	6.6E1	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.8002E1	-7.15256E-4	-8.80001E1	4.29153E-4	4.72069E-3	9.36985E-2	2.74241E1	-3.26819E1	-3.26044E1	2.68064E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00197E-1
2.2E1	1.658E3	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80025E1	-5.48363E-4	-8.80001E1	1.43051E-4	4.91142E-3	9.36985E-2	2.72929E1	-3.26619E1	-3.26718E1	2.68169E1	1.20069E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80024E1	-8.58307E-4	-8.8E1	2.6226E-4	4.72069E-3	9.38416E-2	2.71543E1	-3.26296E1	-3.26518E1	2.68208E1	1.19891E-7	2.51603E-3	2.51603E-3	6.31269E-3	3.00348E-1