[Scan]
initial_time=2016-01-27T21:03:59
final_time=2016-01-27T21:04:19
ip_count=19
run=1025
dataset=3
scan=183
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.87692E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.36613E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=3.98028E-10
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-1.74307E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=8.41939E-10
mult1=-1.69943E-8
mult2=-2.77813E-9
rf_tmon=-3.63642E-3
rf_agc=3.46069E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=4.14848E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65029E0
bslens_imon=2.49371E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19877E1
lens5a_imon=1.97979E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05121E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5385E1
cs_ef1b_imon=2.77908E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02001E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04882E1
cs_ea1_imon=2.57087E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0159E0
lens1_imon=1.54514E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64278E1
os_ef1alow_imon=2.99099E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03791E1
cs_ea2_imon=1.54019E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=2.91098E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=3.92294E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11496E1
os_restr1_imon=2.87963E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15435E1
os_ea1_imon=1.87927E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26803E0
cs_ionrep_imon=1.19829E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93356E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02103E1
cs_anode1_imon=2.92612E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=8.67999E-10
tplens_vset=1.4E-1
tplens_vmon=1.6084E0
tplens_imon=-2.70572E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.50621E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26667E1
iondef2_imon=1.57099E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02899E2
lens6_imon=2.98385E-4
ql6_vset=1.0E-1
ql6_vmon=9.40323E-2
ql6_imon=4.14169E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28749E0
ionrepsh_imon=1.73911E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33369E1
lens5b_imon=2.17729E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.11677E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.45726E-1
os_ea2_imon=-4.44003E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06059E2
lens4b_imon=2.00814E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.19894E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63239E0
os_ef2alow_imon=-2.64473E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4877E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=2.88467E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.283E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.25037E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7278E1
iondef1_imon=1.11192E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68046E1
iondef4_imon=1.07909E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.00666E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=3.38459E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12413E0
cs_ionaccel_imon=-1.68968E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47255E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56159E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=2.02326E-1
window_imon=-1.11665E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86656E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.40995E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.37998E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.31438E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.53994E0
defgridb_imon=6.02958E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33922E1
os_fil1_imon=5.61114E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.52124E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62785E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30706E1
cs_fil1_imon=9.96708E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63351E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63043E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00303E-2
os_fil2_imon=-2.49178E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.71925E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.10476E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.08333E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07615E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21582E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32858E-3
inlet_lpb_pmon=3.02621E-1
chamber_ion_pmon=1.19991E-7
chamber_cvt_pmon=2.51709E-3
foreline_cvt_pmon=2.51709E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.0314E-1
res40_imon=-2.71321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.371E3	1.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80019E1	-4.76837E-4	-8.8E1	3.8147E-4	4.95911E-3	9.38654E-2	2.71824E1	-3.26697E1	-3.25959E1	2.68505E1	1.20004E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.01738E-1
2.0E0	9.7964E4	8.0E1	3.16E2	1.6E2	-7.32464E-2	-8.80019E1	-3.8147E-4	-8.80001E1	7.15256E-5	4.72069E-3	9.38177E-2	2.72586E1	-3.2664E1	-3.26278E1	2.67832E1	1.198E-7	2.52276E-3	2.52276E-3	6.29128E-3	3.01223E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.80018E1	-3.8147E-4	-8.79999E1	4.05312E-4	4.81606E-3	9.41753E-2	2.73222E1	-3.26703E1	-3.26071E1	2.68007E1	1.20084E-7	2.52027E-3	2.52027E-3	6.31858E-3	2.99879E-1
4.0E0	2.0841E4	1.2E1	6.55E2	3.98E2	-7.32464E-2	-8.80018E1	-3.33786E-4	-8.80001E1	1.43051E-4	4.69685E-3	9.39131E-2	2.70647E1	-3.26625E1	-3.26382E1	2.68094E1	1.20106E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.99175E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80015E1	-8.10623E-4	-8.80003E1	5.00679E-4	4.48227E-3	9.38654E-2	2.70824E1	-3.2646E1	-3.25936E1	2.68207E1	1.20414E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80019E1	-1.04904E-3	-8.80001E1	4.29153E-4	4.48227E-3	9.35555E-2	2.71585E1	-3.26506E1	-3.25882E1	2.68028E1	1.19925E-7	2.52027E-3	2.52027E-3	6.32978E-3	2.99879E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.8002E1	-1.14441E-3	-8.79999E1	1.19209E-4	4.45843E-3	9.36508E-2	2.74024E1	-3.26254E1	-3.26526E1	2.67902E1	1.19809E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.80021E1	-8.82149E-4	-8.8E1	7.39098E-4	4.57764E-3	9.37939E-2	2.73E1	-3.26744E1	-3.25936E1	2.68171E1	1.20414E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.99686E-1
1.2E1	3.6E1	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80018E1	-7.39098E-4	-8.79999E1	5.24521E-4	4.52995E-3	9.41753E-2	2.72937E1	-3.26236E1	-3.26374E1	2.6804E1	1.20028E-7	2.51679E-3	2.51679E-3	6.3074E-3	3.00494E-1
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80018E1	-7.39098E-4	-8.80001E1	3.33786E-4	4.76837E-3	9.37223E-2	2.71579E1	-3.26687E1	-3.25888E1	2.68172E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00824E-1
1.4E1	3.245E3	0.0E0	5.66E2	3.82E2	-7.17779E-2	-8.80019E1	-7.39098E-4	-8.8E1	4.76837E-4	4.69685E-3	9.40561E-2	2.74337E1	-3.26803E1	-3.26419E1	2.68214E1	1.20226E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00041E-1
1.5E1	2.7E1	0.0E0	6.06E2	4.11E2	-7.06187E-2	-8.80018E1	-3.33786E-4	-8.80001E1	1.66893E-4	4.91142E-3	9.377E-2	2.72612E1	-3.26591E1	-3.26452E1	2.68118E1	1.20055E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.00453E-1
1.6E1	2.41E2	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80018E1	-7.86781E-4	-8.8E1	2.86102E-4	4.72069E-3	9.38654E-2	2.71321E1	-3.26428E1	-3.26627E1	2.67938E1	1.20122E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.01085E-1
1.7E1	3.06E2	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.8002E1	-7.39098E-4	-8.80002E1	7.62939E-4	4.55379E-3	9.39846E-2	2.73249E1	-3.2638E1	-3.2617E1	2.68376E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9978E-1
1.8E1	1.14E3	1.0E0	7.27E2	5.0E2	-7.30918E-2	-8.8002E1	-6.91414E-4	-8.80003E1	3.8147E-4	4.57764E-3	9.40084E-2	2.74865E1	-3.26597E1	-3.26434E1	2.68151E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9952E-1
1.9E1	9.65E2	0.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80019E1	-3.8147E-4	-8.80003E1	1.43051E-4	4.62532E-3	9.40084E-2	2.7513E1	-3.26885E1	-3.26242E1	2.6774E1	1.20414E-7	2.51739E-3	2.51739E-3	6.29128E-3	3.00453E-1
2.0E1	2.2832E4	1.5E1	8.08E2	5.58E2	-7.19325E-2	-8.80019E1	-7.86781E-4	-8.79999E1	1.43051E-4	4.76837E-3	9.40084E-2	2.72865E1	-3.26861E1	-3.26122E1	2.67902E1	1.20017E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.02922E-1
2.1E1	5.8E1	1.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80017E1	-9.05991E-4	-8.8E1	2.86102E-4	4.52995E-3	9.41992E-2	2.71417E1	-3.26549E1	-3.26366E1	2.67914E1	1.20069E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.02133E-1
2.2E1	1.6E3	1.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80019E1	-4.05312E-4	-8.8E1	2.38419E-4	4.76837E-3	9.41038E-2	2.74791E1	-3.26685E1	-3.26744E1	2.67984E1	1.19757E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.02659E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80018E1	-3.57628E-4	-8.79997E1	5.72205E-4	4.79221E-3	9.40323E-2	2.7278E1	-3.26667E1	-3.2626E1	2.68046E1	1.19991E-7	2.51709E-3	2.51709E-3	6.32858E-3	3.02621E-1