[Scan]
initial_time=2016-01-27T21:04:53
final_time=2016-01-27T21:05:12
ip_count=19
run=1025
dataset=3
scan=185
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.80967E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.27935E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=4.10187E-10
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-1.70395E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=8.6621E-10
mult1=-1.74149E-8
mult2=-2.75853E-9
rf_tmon=-5.21747E-3
rf_agc=3.27427E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=4.04513E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63847E0
bslens_imon=2.31462E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19775E1
lens5a_imon=1.99372E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05097E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53642E1
cs_ef1b_imon=2.777E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04573E1
cs_ea1_imon=2.55449E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99158E0
lens1_imon=1.26957E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64474E1
os_ef1alow_imon=2.98437E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04009E1
cs_ea2_imon=1.5371E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83969E1
cs_ef1a_imon=2.90082E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=4.12631E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11168E1
os_restr1_imon=2.87599E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15072E1
os_ea1_imon=1.87418E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63881E1
os_ef1bup_imon=3.08771E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20428E0
cs_ionrep_imon=1.19319E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.93328E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02195E1
cs_anode1_imon=2.93068E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20461E0
olens4_imon=7.65181E-10
tplens_vset=1.4E-1
tplens_vmon=1.64769E0
tplens_imon=-1.54579E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25954E1
iondef3_imon=1.4927E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26628E1
iondef2_imon=1.57194E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.98342E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=4.54366E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26405E0
ionrepsh_imon=1.7468E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33754E1
lens5b_imon=2.18087E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74501E1
cs_ef2b_imon=3.13335E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.41193E-1
os_ea2_imon=-6.15633E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00401E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71157E1
cs_ef2a_imon=3.19945E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6356E0
os_ef2alow_imon=-2.62336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69648E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=2.86022E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.31089E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01843E1
cs_anode2_imon=2.23745E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73856E1
iondef1_imon=1.07468E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6792E1
iondef4_imon=1.07815E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=2.02457E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=3.68571E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11113E0
cs_ionaccel_imon=-1.71068E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56204E1
einzel_imon=7.70797E-6
window_vset=0.0E0
window_vmon=1.80537E-1
window_imon=-1.08993E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39218E-4
mask2_vset=0.0E0
mask2_vmon=-1.86819E1
mask2_imon=-7.6781E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.28377E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.78856E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50101E3
multb_neg_imon=7.29743E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.36381E0
defgridb_imon=6.01672E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33928E1
os_fil1_imon=4.34623E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.46677E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62639E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30679E1
cs_fil1_imon=9.97281E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63591E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63027E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.74777E-2
os_fil2_imon=-2.51E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.45413E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.08467E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30255E-1
cs_fil2_imon=-2.15768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.12503E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21728E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31779E-3
inlet_lpb_pmon=3.00494E-1
chamber_ion_pmon=1.20276E-7
chamber_cvt_pmon=2.51472E-3
foreline_cvt_pmon=2.51472E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.95477E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=184
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.455E3	1.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80017E1	-4.29153E-4	-8.80003E1	2.86102E-4	5.36442E-3	9.40084E-2	2.71387E1	-3.26609E1	-3.2632E1	2.68004E1	1.19967E-7	2.51244E-3	2.51244E-3	6.31251E-3	2.99906E-1
2.0E0	9.7176E4	8.6E1	3.16E2	1.6E2	-7.3401E-2	-8.80016E1	-7.39098E-4	-8.80003E1	3.09944E-4	4.95911E-3	9.36747E-2	2.74275E1	-3.2675E1	-3.26444E1	2.67945E1	1.19913E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00824E-1
3.0E0	1.2E1	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80016E1	-4.29153E-4	-8.80003E1	1.90735E-4	4.79221E-3	9.41038E-2	2.72159E1	-3.26683E1	-3.26393E1	2.6814E1	1.19872E-7	2.51359E-3	2.51359E-3	6.29067E-3	2.99613E-1
4.0E0	2.0825E4	9.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80018E1	-3.8147E-4	-8.80003E1	4.52995E-4	4.86374E-3	9.39846E-2	2.73754E1	-3.26909E1	-3.26038E1	2.67992E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80019E1	-5.96046E-4	-8.80005E1	3.09944E-4	4.43459E-3	9.37939E-2	2.72072E1	-3.26536E1	-3.26146E1	2.6816E1	1.20174E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80017E1	-3.57628E-4	-8.80003E1	2.38419E-4	4.17233E-3	9.36508E-2	2.73877E1	-3.26744E1	-3.26366E1	2.67842E1	1.20106E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.01995E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80016E1	-1.00136E-3	-8.79998E1	4.05312E-4	4.43459E-3	9.37939E-2	2.7233E1	-3.26627E1	-3.26374E1	2.68059E1	1.19705E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02659E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80017E1	-9.05991E-4	-8.79999E1	3.09944E-4	4.48227E-3	9.37223E-2	2.71957E1	-3.26356E1	-3.2623E1	2.68026E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.02511E-1
1.2E1	4.3E1	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80017E1	-3.57628E-4	-8.80004E1	9.53674E-5	4.50611E-3	9.37223E-2	2.73796E1	-3.26639E1	-3.26074E1	2.6804E1	1.20191E-7	2.5147E-3	2.5147E-3	6.31299E-3	3.03349E-1
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80017E1	-5.48363E-4	-8.80002E1	3.57628E-4	4.57764E-3	9.39131E-2	2.75022E1	-3.26615E1	-3.2647E1	2.67782E1	1.19965E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.02133E-1
1.4E1	3.2E3	3.0E0	5.66E2	3.82E2	-7.16233E-2	-8.80016E1	-7.15256E-4	-8.80002E1	2.38419E-4	4.93526E-3	9.37223E-2	2.72031E1	-3.26631E1	-3.26341E1	2.68377E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01085E-1
1.5E1	3.2E1	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80016E1	-5.24521E-4	-8.80001E1	7.15256E-5	4.64916E-3	9.37462E-2	2.72342E1	-3.26458E1	-3.26362E1	2.67848E1	1.19891E-7	2.51603E-3	2.51603E-3	6.31798E-3	3.00348E-1
1.6E1	2.53E2	0.0E0	6.47E2	4.41E2	-7.201E-2	-8.80014E1	-5.00679E-4	-8.80002E1	2.86102E-4	4.81606E-3	9.38416E-2	2.72476E1	-3.26272E1	-3.26621E1	2.68436E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00041E-1
1.7E1	2.66E2	0.0E0	6.87E2	4.7E2	-7.17007E-2	-8.80016E1	-9.53674E-4	-8.80001E1	2.6226E-4	4.43459E-3	9.38416E-2	2.73976E1	-3.26861E1	-3.2626E1	2.67788E1	1.20031E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.0041E-1
1.8E1	1.101E3	1.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80017E1	-1.04904E-3	-8.80003E1	1.90735E-4	4.69685E-3	9.35316E-2	2.72732E1	-3.26502E1	-3.26679E1	2.68364E1	1.20226E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01347E-1
1.9E1	9.67E2	1.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80016E1	-5.72205E-4	-8.80001E1	-1.19209E-4	4.62532E-3	9.38416E-2	2.72366E1	-3.26675E1	-3.26086E1	2.68124E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.02769E-1
2.0E1	2.2987E4	1.8E1	8.08E2	5.58E2	-7.17007E-2	-8.80015E1	-6.91414E-4	-8.80004E1	-1.43051E-4	4.76837E-3	9.38892E-2	2.73898E1	-3.26518E1	-3.26404E1	2.67978E1	1.19913E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01871E-1
2.1E1	5.0E1	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80015E1	-4.76837E-4	-8.80002E1	7.15256E-5	4.50611E-3	9.40084E-2	2.73959E1	-3.2682E1	-3.25847E1	2.6789E1	1.20209E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.99941E-1
2.2E1	1.593E3	1.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80014E1	-9.53674E-5	-8.80001E1	1.90735E-4	4.62532E-3	9.36747E-2	2.7264E1	-3.26509E1	-3.26312E1	2.67926E1	1.20069E-7	2.51334E-3	2.51334E-3	6.28006E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80014E1	-7.86781E-4	-8.79998E1	2.86102E-4	4.88758E-3	9.36985E-2	2.73856E1	-3.26628E1	-3.25954E1	2.6792E1	1.20276E-7	2.51472E-3	2.51472E-3	6.31779E-3	3.00494E-1