[Scan]
initial_time=2016-01-27T21:07:06
final_time=2016-01-27T21:07:26
ip_count=19
run=1025
dataset=3
scan=190
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.85957E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.56259E-10
ql2_vset=
ql2_vmon=-9.77516E-4
ql2_imon=4.35817E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.76065E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=8.76248E-10
mult1=-1.58712E-8
mult2=-2.74089E-9
rf_tmon=-5.09348E-3
rf_agc=3.3433E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=4.53699E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66916E0
bslens_imon=2.60697E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19718E1
lens5a_imon=1.97306E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.0498E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53621E1
cs_ef1b_imon=2.78791E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02202E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04746E1
cs_ea1_imon=2.58007E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00057E0
lens1_imon=1.38233E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64377E1
os_ef1alow_imon=2.98495E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.53276E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=2.90572E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=4.16756E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=2.87513E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15111E1
os_ea1_imon=1.88139E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63618E1
os_ef1bup_imon=3.08295E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27569E0
cs_ionrep_imon=1.18661E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02139E1
cs_anode1_imon=2.92205E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=8.25131E-10
tplens_vset=1.4E-1
tplens_vmon=1.64025E0
tplens_imon=-3.02427E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26113E1
iondef3_imon=1.50126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2662E1
iondef2_imon=1.59258E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98296E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=3.98493E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27392E0
ionrepsh_imon=1.7568E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33764E1
lens5b_imon=2.18472E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74629E1
cs_ef2b_imon=3.11041E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.35108E-1
os_ea2_imon=-5.28949E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.00573E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7109E1
cs_ef2a_imon=3.2025E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61176E0
os_ef2alow_imon=-2.60238E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3178E-1
os_ef2bup_imon=-5.37216E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11037E1
os_restr2_imon=2.86436E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.30034E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01931E1
cs_anode2_imon=2.24368E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73228E1
iondef1_imon=1.09671E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67752E1
iondef4_imon=1.09233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.05513E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=3.45719E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10292E0
cs_ionaccel_imon=-1.80655E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47202E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56226E1
einzel_imon=7.71912E-6
window_vset=0.0E0
window_vmon=1.5629E-1
window_imon=-1.04547E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39234E-4
mask2_vset=0.0E0
mask2_vmon=-1.86628E1
mask2_imon=-6.97946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.21882E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93675E3
defgrida_imon=6.54633E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.17634E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.4425E0
defgridb_imon=6.13222E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33922E1
os_fil1_imon=4.57092E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.52489E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62406E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30724E1
cs_fil1_imon=9.97103E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63756E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62888E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.95238E-2
os_fil2_imon=-2.44909E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.24978E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.18576E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32149E-1
cs_fil2_imon=-2.10735E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28681E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21528E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.81998E-1
res40_imon=-2.48075E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.384E3	1.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80018E1	-5.72205E-4	-8.80003E1	2.14577E-4	4.88758E-3	9.36747E-2	2.71423E1	-3.26675E1	-3.26308E1	2.67974E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.0071E-1
2.0E0	9.7298E4	9.0E1	3.16E2	1.6E2	-7.37874E-2	-8.80018E1	-6.67572E-4	-8.80003E1	1.19209E-4	4.62532E-3	9.35555E-2	2.73482E1	-3.26601E1	-3.2631E1	2.6797E1	1.20278E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01085E-1
3.0E0	2.4E1	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80016E1	-6.67572E-4	-8.79997E1	2.38419E-4	4.52995E-3	9.37223E-2	2.74533E1	-3.26476E1	-3.2633E1	2.68173E1	1.19887E-7	2.51498E-3	2.51498E-3	6.31014E-3	2.9991E-1
4.0E0	2.0421E4	1.0E1	6.55E2	3.98E2	-7.20871E-2	-8.80015E1	-5.48363E-4	-8.80003E1	3.09944E-4	4.76837E-3	9.37939E-2	2.73351E1	-3.26675E1	-3.26164E1	2.68059E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80016E1	-2.86102E-4	-8.79999E1	4.05312E-4	4.60148E-3	9.37939E-2	2.717E1	-3.26319E1	-3.2649E1	2.68238E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.16233E-2	-8.80018E1	-6.19888E-4	-8.80001E1	6.19888E-4	4.74453E-3	9.40323E-2	2.71327E1	-3.26669E1	-3.26494E1	2.68268E1	1.20435E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.03185E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80015E1	-5.96046E-4	-8.80002E1	3.8147E-4	4.55379E-3	9.39846E-2	2.72108E1	-3.26789E1	-3.26128E1	2.67986E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80018E1	-5.00679E-4	-8.80001E1	2.6226E-4	5.26905E-3	9.41038E-2	2.723E1	-3.26549E1	-3.2638E1	2.67998E1	1.19902E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.0071E-1
1.2E1	3.4E1	0.0E0	4.85E2	3.23E2	-7.40967E-2	-8.80015E1	-6.91414E-4	-8.79998E1	-7.15256E-5	4.64916E-3	9.38892E-2	2.72809E1	-3.26543E1	-3.26496E1	2.67968E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00824E-1
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80017E1	-5.48363E-4	-8.79998E1	-2.38419E-5	4.8399E-3	9.37223E-2	2.73149E1	-3.26578E1	-3.26083E1	2.68064E1	1.20122E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00302E-1
1.4E1	3.147E3	1.0E0	5.66E2	3.82E2	-7.29374E-2	-8.8002E1	-7.86781E-4	-8.80003E1	2.38419E-5	4.72069E-3	9.38416E-2	2.73267E1	-3.26747E1	-3.26296E1	2.67968E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.02659E-1
1.5E1	2.8E1	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80023E1	-6.91414E-4	-8.80004E1	-2.14577E-4	4.91142E-3	9.39131E-2	2.73044E1	-3.26554E1	-3.2625E1	2.67981E1	1.20017E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.02396E-1
1.6E1	2.45E2	1.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80019E1	-8.10623E-4	-8.80004E1	-4.76837E-5	4.86374E-3	9.38654E-2	2.72862E1	-3.26395E1	-3.26168E1	2.67958E1	1.19845E-7	2.52298E-3	2.52298E-3	6.29816E-3	3.02051E-1
1.7E1	2.9E2	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80021E1	-5.24521E-4	-8.80003E1	-2.14577E-4	4.72069E-3	9.43184E-2	2.71018E1	-3.26728E1	-3.2627E1	2.68063E1	1.20273E-7	2.51301E-3	2.51301E-3	6.32716E-3	3.00432E-1
1.8E1	1.2E3	1.0E0	7.27E2	5.0E2	-7.31692E-2	-8.8002E1	-8.10623E-4	-8.80001E1	-9.53674E-5	4.95911E-3	9.39846E-2	2.73147E1	-3.26645E1	-3.26621E1	2.68136E1	1.1995E-7	2.51238E-3	2.51238E-3	6.3074E-3	2.9871E-1
1.9E1	9.65E2	0.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80022E1	-5.96046E-4	-8.80003E1	4.76837E-5	4.8399E-3	9.37939E-2	2.73827E1	-3.26782E1	-3.26173E1	2.67908E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00563E-1
2.0E1	2.2909E4	1.1E1	8.08E2	5.58E2	-7.27053E-2	-8.80019E1	-7.62939E-4	-8.79998E1	-2.38419E-5	4.69685E-3	9.38177E-2	2.7542E1	-3.26799E1	-3.26156E1	2.68107E1	1.19991E-7	2.51498E-3	2.51498E-3	6.31269E-3	3.02368E-1
2.1E1	4.3E1	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80021E1	-1.04904E-3	-8.80002E1	-2.38419E-5	5.05447E-3	9.38892E-2	2.76791E1	-3.27263E1	-3.25004E1	2.68018E1	1.19991E-7	2.51725E-3	2.51725E-3	6.30171E-3	3.00251E-1
2.2E1	1.604E3	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80019E1	-9.29832E-4	-8.80003E1	-7.15256E-5	5.126E-3	9.38416E-2	2.74986E1	-3.26687E1	-3.2644E1	2.68238E1	1.20142E-7	2.52131E-3	2.52131E-3	6.3074E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80021E1	-9.77516E-4	-8.8E1	0.0E0	5.17368E-3	9.36747E-2	2.73228E1	-3.2662E1	-3.26113E1	2.67752E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.01085E-1