[Scan]
initial_time=2016-01-27T21:08:00
final_time=2016-01-27T21:08:19
ip_count=19
run=1025
dataset=3
scan=192
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.78888E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.37484E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=4.12238E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.77001E-9
ql4_vset=
ql4_vmon=6.4373E-4
ql4_imon=8.47924E-10
mult1=-1.66515E-8
mult2=-2.73894E-9
rf_tmon=-3.91367E-3
rf_agc=3.33563E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=4.27926E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6668E0
bslens_imon=2.47955E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19606E1
lens5a_imon=1.98793E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05054E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53673E1
cs_ef1b_imon=2.77887E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02213E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04888E1
cs_ea1_imon=2.57653E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03832E0
lens1_imon=1.48144E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64776E1
os_ef1alow_imon=2.98982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04074E1
cs_ea2_imon=1.51542E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84267E1
cs_ef1a_imon=2.91232E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=3.82805E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11349E1
os_restr1_imon=2.87861E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15123E1
os_ea1_imon=1.88776E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63606E1
os_ef1bup_imon=3.08226E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2108E0
cs_ionrep_imon=1.17917E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.93374E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01699E1
cs_anode1_imon=2.91788E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=8.14664E-10
tplens_vset=1.4E-1
tplens_vmon=1.61607E0
tplens_imon=-2.03323E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26142E1
iondef3_imon=1.5094E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26579E1
iondef2_imon=1.58868E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98448E-4
ql6_vset=1.0E-1
ql6_vmon=9.4223E-2
ql6_imon=3.88718E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26095E0
ionrepsh_imon=1.76282E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.1826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.13091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.2213E-1
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00414E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71379E1
cs_ef2a_imon=3.19729E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62508E0
os_ef2alow_imon=-2.59196E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.59003E-1
os_ef2bup_imon=-5.23315E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10944E1
os_restr2_imon=2.86923E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.29822E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.24507E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72797E1
iondef1_imon=1.08361E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67995E1
iondef4_imon=1.08573E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.0618E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=3.24225E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11508E0
cs_ionaccel_imon=-1.8552E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47282E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56365E1
einzel_imon=7.70869E-6
window_vset=0.0E0
window_vmon=2.26953E-1
window_imon=-1.05242E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.3915E-4
mask2_vset=0.0E0
mask2_vmon=-1.86738E1
mask2_imon=-5.24183E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.51259E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.69145E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.34978E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.56061E0
defgridb_imon=6.02958E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33929E1
os_fil1_imon=5.27177E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.4438E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62346E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30702E1
cs_fil1_imon=9.96275E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6327E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62813E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.33904E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.48146E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.38445E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29777E-1
cs_fil2_imon=-2.14211E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33315E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21633E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.58627E-1
res40_imon=-2.47032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.409E3	2.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80018E1	-9.77516E-4	-8.80001E1	3.8147E-4	5.10216E-3	9.41038E-2	2.72337E1	-3.26626E1	-3.26266E1	2.67986E1	1.20055E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.0071E-1
2.0E0	9.6488E4	1.02E2	3.16E2	1.6E2	-7.30918E-2	-8.80017E1	-1.0252E-3	-8.80004E1	4.05312E-4	5.4121E-3	9.36747E-2	2.73793E1	-3.2636E1	-3.25992E1	2.681E1	1.2026E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.03545E-1
3.0E0	1.3E1	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80016E1	-7.39098E-4	-8.80005E1	3.8147E-4	4.91142E-3	9.38654E-2	2.73897E1	-3.26642E1	-3.26556E1	2.67972E1	1.19775E-7	2.51838E-3	2.51838E-3	6.31879E-3	3.02699E-1
4.0E0	2.0903E4	1.0E1	6.55E2	3.98E2	-7.23189E-2	-8.80018E1	-6.19888E-4	-8.80004E1	4.05312E-4	5.10216E-3	9.35793E-2	2.75292E1	-3.26476E1	-3.26573E1	2.68069E1	1.20042E-7	2.51393E-3	2.51393E-3	6.31798E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40967E-2	-8.80017E1	-7.15256E-4	-8.80003E1	3.09944E-4	4.60148E-3	9.34124E-2	2.72598E1	-3.26462E1	-3.25832E1	2.67962E1	1.20122E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37874E-2	-8.80019E1	-6.67572E-4	-8.79999E1	3.33786E-4	4.48227E-3	9.35793E-2	2.70986E1	-3.26632E1	-3.26113E1	2.6795E1	1.20031E-7	2.51248E-3	2.51248E-3	6.29624E-3	3.01742E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.39421E-2	-8.8002E1	-7.15256E-4	-8.80004E1	1.43051E-4	4.52995E-3	9.36747E-2	2.72095E1	-3.26408E1	-3.26124E1	2.68175E1	1.19953E-7	2.51954E-3	2.51954E-3	6.29128E-3	3.00966E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.41738E-2	-8.80014E1	-7.39098E-4	-8.80001E1	2.38419E-4	4.76837E-3	9.35316E-2	2.707E1	-3.26909E1	-3.26083E1	2.68088E1	1.19953E-7	2.51417E-3	2.51417E-3	6.33977E-3	3.00966E-1
1.2E1	4.9E1	3.0E0	4.85E2	3.23E2	-7.37874E-2	-8.80015E1	-6.91414E-4	-8.79999E1	3.33786E-4	4.62532E-3	9.36747E-2	2.72078E1	-3.26555E1	-3.26172E1	2.68052E1	1.20084E-7	2.52027E-3	2.52027E-3	6.31858E-3	2.99613E-1
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80015E1	-5.96046E-4	-8.80001E1	-4.76837E-5	4.52995E-3	9.36508E-2	2.72859E1	-3.26422E1	-3.26615E1	2.68016E1	1.20106E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.01738E-1
1.4E1	3.092E3	1.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80016E1	-4.29153E-4	-8.79998E1	-1.66893E-4	4.86374E-3	9.37223E-2	2.73393E1	-3.26681E1	-3.26398E1	2.67992E1	1.20017E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01609E-1
1.5E1	3.4E1	0.0E0	6.06E2	4.11E2	-7.36328E-2	-8.80018E1	-5.00679E-4	-8.79999E1	-4.76837E-5	4.79221E-3	9.36747E-2	2.73478E1	-3.26597E1	-3.26422E1	2.67956E1	1.19757E-7	2.51662E-3	2.51662E-3	6.27461E-3	3.01085E-1
1.6E1	2.66E2	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80012E1	-5.24521E-4	-8.80001E1	-1.19209E-4	5.19753E-3	9.36985E-2	2.74427E1	-3.26885E1	-3.25924E1	2.67968E1	1.20069E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00302E-1
1.7E1	2.68E2	1.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80013E1	-7.39098E-4	-8.8E1	1.43051E-4	4.72069E-3	9.37939E-2	2.74719E1	-3.26767E1	-3.26289E1	2.67873E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00563E-1
1.8E1	1.198E3	0.0E0	7.27E2	5.0E2	-7.21643E-2	-8.80013E1	-5.96046E-4	-8.8E1	4.76837E-4	4.91142E-3	9.3627E-2	2.73706E1	-3.26515E1	-3.26356E1	2.68069E1	1.20028E-7	2.51783E-3	2.51783E-3	6.3074E-3	3.02977E-1
1.9E1	9.81E2	1.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80013E1	-7.62939E-4	-8.79998E1	2.38419E-4	5.00679E-3	9.37462E-2	2.72018E1	-3.26717E1	-3.26344E1	2.67854E1	1.20281E-7	2.51874E-3	2.51874E-3	6.33065E-3	2.99535E-1
2.0E1	2.2914E4	1.2E1	8.08E2	5.58E2	-7.20871E-2	-8.80016E1	-6.19888E-4	-8.80001E1	1.43051E-4	4.74453E-3	9.38654E-2	2.70756E1	-3.26512E1	-3.26098E1	2.68262E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.99E-1
2.1E1	4.3E1	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80014E1	-5.48363E-4	-8.79998E1	2.86102E-4	4.86374E-3	9.39846E-2	2.71591E1	-3.2633E1	-3.26347E1	2.67972E1	1.20311E-7	2.52815E-3	2.52815E-3	6.32356E-3	2.9714E-1
2.2E1	1.662E3	1.0E0	8.89E2	6.17E2	-7.36328E-2	-8.80014E1	-8.10623E-4	-8.8E1	3.33786E-4	4.95911E-3	9.377E-2	2.7301E1	-3.2659E1	-3.2613E1	2.6795E1	1.20055E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80017E1	-7.86781E-4	-8.80003E1	6.4373E-4	5.10216E-3	9.4223E-2	2.72797E1	-3.26579E1	-3.26142E1	2.67995E1	1.20055E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.01223E-1