[Scan]
initial_time=2016-01-27T21:08:53
final_time=2016-01-27T21:09:13
ip_count=19
run=1025
dataset=3
scan=194
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.78442E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-6.26469E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=4.09079E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.77336E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=8.64315E-10
mult1=-1.76872E-8
mult2=-2.8284E-9
rf_tmon=-3.77341E-3
rf_agc=3.28229E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=4.25303E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64035E0
bslens_imon=2.40348E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19798E1
lens5a_imon=1.98795E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.04979E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53887E1
cs_ef1b_imon=2.77944E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02187E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05147E1
cs_ea1_imon=2.55799E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97411E0
lens1_imon=1.40444E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.99207E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.53507E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=2.90954E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=4.18746E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=2.87062E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15434E1
os_ea1_imon=1.88033E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63647E1
os_ef1bup_imon=3.0883E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27046E0
cs_ionrep_imon=1.18026E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91906E2
cs_nozzle_imon=1.93266E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02001E1
cs_anode1_imon=2.91603E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=8.07667E-10
tplens_vset=1.4E-1
tplens_vmon=1.62797E0
tplens_imon=-3.10841E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26122E1
iondef3_imon=1.49908E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26957E1
iondef2_imon=1.57658E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98327E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=4.1846E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32005E0
ionrepsh_imon=1.74994E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33872E1
lens5b_imon=2.17674E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.31624E-1
os_ea2_imon=-6.19371E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00608E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71108E1
cs_ef2a_imon=3.18632E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61077E0
os_ef2alow_imon=-2.48976E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.63787E-1
os_ef2bup_imon=-5.22517E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=2.8753E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.30075E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01755E1
cs_anode2_imon=2.23776E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73093E1
iondef1_imon=1.08183E-5
iondef4_vset=2.691E1
iondef4_vmon=2.684E1
iondef4_imon=1.08593E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.02745E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=3.3108E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10611E0
cs_ionaccel_imon=-1.86267E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47424E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=1.92715E-1
window_imon=-1.17431E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.86644E1
mask2_imon=-7.34629E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.14896E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.81105E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50163E3
multb_neg_imon=7.40607E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.57003E0
defgridb_imon=5.83404E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33897E1
os_fil1_imon=4.63206E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.18487E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62491E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30731E1
cs_fil1_imon=9.97038E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63483E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62871E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.50379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.07965E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.12112E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33277E-1
cs_fil2_imon=-2.20947E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.25985E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2164E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.98156E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.65299E-1
res40_imon=-2.55463E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.439E3	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80023E1	-8.10623E-4	-8.79998E1	-1.19209E-4	4.98295E-3	9.37939E-2	2.71666E1	-3.26764E1	-3.26046E1	2.68028E1	1.20031E-7	2.51581E-3	2.51581E-3	6.31858E-3	2.97762E-1
2.0E0	9.7318E4	8.3E1	3.16E2	1.6E2	-7.38649E-2	-8.80022E1	-4.52995E-4	-8.80004E1	-7.15256E-5	4.55379E-3	9.38654E-2	2.7299E1	-3.26682E1	-3.26444E1	2.68064E1	1.19841E-7	2.51919E-3	2.51919E-3	6.32328E-3	2.99343E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.8002E1	-5.72205E-4	-8.80006E1	1.43051E-4	5.03063E-3	9.35793E-2	2.73936E1	-3.26673E1	-3.26107E1	2.67955E1	1.19978E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.00144E-1
4.0E0	2.0879E4	1.3E1	6.55E2	3.98E2	-7.22418E-2	-8.80018E1	-5.72205E-4	-8.80003E1	4.05312E-4	4.45843E-3	9.38892E-2	2.72444E1	-3.26561E1	-3.26278E1	2.68182E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.01223E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.8002E1	-2.14577E-4	-8.80005E1	0.0E0	4.86374E-3	9.38177E-2	2.71633E1	-3.26603E1	-3.26272E1	2.68118E1	1.20174E-7	2.52538E-3	2.52538E-3	6.32386E-3	3.03449E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80022E1	-7.39098E-4	-8.80004E1	1.19209E-4	5.26905E-3	9.37223E-2	2.73918E1	-3.26954E1	-3.25891E1	2.67987E1	1.20017E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.8002E1	-7.86781E-4	-8.80003E1	1.19209E-4	4.62532E-3	9.34124E-2	2.7198E1	-3.26351E1	-3.26721E1	2.68144E1	1.19822E-7	2.51447E-3	2.51447E-3	6.33297E-3	3.01121E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80018E1	-6.91414E-4	-8.80003E1	2.6226E-4	4.673E-3	9.38177E-2	2.73135E1	-3.26693E1	-3.26104E1	2.6807E1	1.20188E-7	2.52502E-3	2.52502E-3	6.3074E-3	3.00197E-1
1.2E1	4.8E1	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80018E1	-6.4373E-4	-8.80004E1	2.38419E-4	5.05447E-3	9.39131E-2	2.74297E1	-3.26677E1	-3.26156E1	2.68012E1	1.19861E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.01085E-1
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80017E1	-6.19888E-4	-8.80002E1	4.29153E-4	4.86374E-3	9.377E-2	2.72023E1	-3.26689E1	-3.26529E1	2.68438E1	1.20142E-7	2.51603E-3	2.51603E-3	6.31269E-3	3.006E-1
1.4E1	3.044E3	2.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80018E1	-7.86781E-4	-8.79999E1	5.00679E-4	5.00679E-3	9.39131E-2	2.73736E1	-3.26585E1	-3.26422E1	2.68142E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
1.5E1	3.6E1	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.8002E1	-1.16825E-3	-8.80004E1	1.19209E-4	4.52995E-3	9.3627E-2	2.72154E1	-3.26708E1	-3.26113E1	2.68028E1	1.20383E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9926E-1
1.6E1	2.49E2	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.8002E1	-9.29832E-4	-8.80001E1	7.15256E-5	4.69685E-3	9.37223E-2	2.72378E1	-3.2638E1	-3.2602E1	2.67908E1	1.20122E-7	2.52428E-3	2.52428E-3	6.33486E-3	2.9978E-1
1.7E1	2.99E2	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80018E1	-7.86781E-4	-8.80001E1	2.86102E-4	4.88758E-3	9.39846E-2	2.74036E1	-3.26543E1	-3.26213E1	2.6785E1	1.20069E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01871E-1
1.8E1	1.122E3	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80019E1	-7.15256E-4	-8.8E1	2.14577E-4	4.8399E-3	9.39608E-2	2.71849E1	-3.26554E1	-3.26795E1	2.68004E1	1.19953E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.99941E-1
1.9E1	9.83E2	0.0E0	7.68E2	5.29E2	-7.27053E-2	-8.8002E1	-5.96046E-4	-8.8E1	4.76837E-5	4.76837E-3	9.38177E-2	2.7391E1	-3.26627E1	-3.26218E1	2.68821E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01085E-1
2.0E1	2.271E4	1.1E1	8.08E2	5.58E2	-7.201E-2	-8.80019E1	-7.15256E-4	-8.8E1	1.90735E-4	4.8399E-3	9.39131E-2	2.74704E1	-3.26878E1	-3.26046E1	2.68064E1	1.20226E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01609E-1
2.1E1	4.4E1	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80019E1	-5.24521E-4	-8.80003E1	1.90735E-4	4.50611E-3	9.38416E-2	2.73729E1	-3.26331E1	-3.2629E1	2.68094E1	1.20122E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01609E-1
2.2E1	1.63E3	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80021E1	-5.72205E-4	-8.79999E1	4.29153E-4	5.10216E-3	9.39131E-2	2.74685E1	-3.26714E1	-3.26213E1	2.68065E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.8002E1	-5.00679E-4	-8.80002E1	3.09944E-4	4.8399E-3	9.377E-2	2.73093E1	-3.26957E1	-3.26122E1	2.684E1	1.20106E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.98156E-1