[Scan]
initial_time=2016-01-27T21:09:20
final_time=2016-01-27T21:09:39
ip_count=19
run=1025
dataset=3
scan=195
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.7778E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.62577E-10
ql2_vset=
ql2_vmon=-1.0252E-3
ql2_imon=4.06659E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.75649E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=8.52871E-10
mult1=-1.9698E-8
mult2=-2.80844E-9
rf_tmon=-5.41366E-3
rf_agc=3.31413E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=4.21381E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66916E0
bslens_imon=2.50079E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19689E1
lens5a_imon=1.97589E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.04994E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=2.77511E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02355E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04894E1
cs_ea1_imon=2.57866E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02947E0
lens1_imon=1.40357E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.99676E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03903E1
cs_ea2_imon=1.5317E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84538E1
cs_ef1a_imon=2.91242E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=4.02033E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=2.88503E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14781E1
os_ea1_imon=1.8959E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63743E1
os_ef1bup_imon=3.09046E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22555E0
cs_ionrep_imon=1.17634E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93346E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01785E1
cs_anode1_imon=2.92035E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=8.22222E-10
tplens_vset=1.4E-1
tplens_vmon=1.6432E0
tplens_imon=-3.83833E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26338E1
iondef3_imon=1.51648E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26819E1
iondef2_imon=1.57983E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02921E2
lens6_imon=2.98381E-4
ql6_vset=1.0E-1
ql6_vmon=9.39846E-2
ql6_imon=4.16756E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29044E0
ionrepsh_imon=1.73875E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33982E1
lens5b_imon=2.19074E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.13695E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.00304E-1
os_ea2_imon=-5.2187E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.00527E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71084E1
cs_ef2a_imon=3.18596E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61498E0
os_ef2alow_imon=-2.64113E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.62586E-1
os_ef2bup_imon=-5.2504E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10991E1
os_restr2_imon=2.87278E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.29716E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.2392E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73916E1
iondef1_imon=1.11157E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67908E1
iondef4_imon=1.08305E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.05033E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=3.37505E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10371E0
cs_ionaccel_imon=-1.81582E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02022E2
cs_ionfocb_imon=1.47169E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=1.91514E-1
window_imon=-1.20314E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86656E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.57984E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.61358E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.23651E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.40116E0
defgridb_imon=6.08267E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33913E1
os_fil1_imon=4.87233E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.95061E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.625E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30721E1
cs_fil1_imon=9.97861E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62744E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62748E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.9777E-2
os_fil2_imon=-2.34161E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.15753E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.23005E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31594E-1
cs_fil2_imon=-2.25752E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46658E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21655E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.13952E-1
res40_imon=-2.58346E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.381E3	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80021E1	-7.39098E-4	-8.8E1	2.14577E-4	4.98295E-3	9.41277E-2	2.7219E1	-3.26573E1	-3.26537E1	2.68124E1	1.2033E-7	2.51116E-3	2.51116E-3	6.29645E-3	3.01347E-1
2.0E0	9.7434E4	9.7E1	3.16E2	1.6E2	-7.29374E-2	-8.80024E1	-6.4373E-4	-8.80001E1	3.8147E-4	5.126E-3	9.37939E-2	2.74043E1	-3.26634E1	-3.26372E1	2.6822E1	1.19953E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.01738E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.13915E-2	-8.80023E1	-6.67572E-4	-8.80004E1	1.66893E-4	4.93526E-3	9.41753E-2	2.71948E1	-3.26219E1	-3.2613E1	2.68004E1	1.20154E-7	2.51271E-3	2.51271E-3	6.34164E-3	2.99981E-1
4.0E0	2.0783E4	1.6E1	6.55E2	3.98E2	-7.17779E-2	-8.8002E1	-5.24521E-4	-8.80004E1	3.57628E-4	5.03063E-3	9.40084E-2	2.74611E1	-3.26789E1	-3.26203E1	2.68054E1	1.19841E-7	2.51182E-3	2.51182E-3	6.29684E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80023E1	-9.53674E-4	-8.80004E1	1.19209E-4	4.74453E-3	9.38654E-2	2.7277E1	-3.26541E1	-3.26653E1	2.68147E1	1.20078E-7	2.51886E-3	2.51886E-3	6.29185E-3	3.02728E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.08504E-2	-8.80022E1	-7.86781E-4	-8.80006E1	1.66893E-4	4.79221E-3	9.377E-2	2.7263E1	-3.26783E1	-3.26026E1	2.67891E1	1.20116E-7	2.51874E-3	2.51874E-3	6.3074E-3	3.00087E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.13915E-2	-8.80017E1	-5.96046E-4	-8.80002E1	2.6226E-4	4.57764E-3	9.37223E-2	2.72962E1	-3.26673E1	-3.25971E1	2.68166E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80021E1	-6.19888E-4	-8.80001E1	2.14577E-4	4.69685E-3	9.37939E-2	2.71717E1	-3.26434E1	-3.26458E1	2.68058E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9952E-1
1.2E1	4.0E1	0.0E0	4.85E2	3.23E2	-7.14689E-2	-8.8002E1	-3.57628E-4	-8.8E1	5.24521E-4	4.41074E-3	9.34601E-2	2.71885E1	-3.26585E1	-3.26554E1	2.67944E1	1.20017E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.02133E-1
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.80019E1	-6.19888E-4	-8.80002E1	4.76837E-5	5.14984E-3	9.377E-2	2.71429E1	-3.26496E1	-3.26555E1	2.67806E1	1.20209E-7	2.52169E-3	2.52169E-3	6.29665E-3	2.99941E-1
1.4E1	3.121E3	1.0E0	5.66E2	3.82E2	-7.17779E-2	-8.80019E1	-6.91414E-4	-8.80003E1	3.8147E-4	4.8399E-3	9.39369E-2	2.74313E1	-3.27239E1	-3.26248E1	2.68508E1	1.20487E-7	2.51662E-3	2.51662E-3	6.29098E-3	2.9926E-1
1.5E1	3.6E1	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80017E1	-5.72205E-4	-8.80004E1	4.05312E-4	4.95911E-3	9.39846E-2	2.72961E1	-3.26759E1	-3.2635E1	2.68175E1	1.20017E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00041E-1
1.6E1	2.32E2	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80016E1	-4.29153E-4	-8.80003E1	3.8147E-4	4.57764E-3	9.41038E-2	2.71842E1	-3.26779E1	-3.25853E1	2.6783E1	1.20158E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.99175E-1
1.7E1	2.84E2	0.0E0	6.87E2	4.7E2	-7.15461E-2	-8.80016E1	-5.24521E-4	-8.80002E1	5.00679E-4	4.76837E-3	9.41992E-2	2.74877E1	-3.26374E1	-3.265E1	2.68364E1	1.20226E-7	2.5199E-3	2.5199E-3	6.28552E-3	3.01347E-1
1.8E1	1.137E3	0.0E0	7.27E2	5.0E2	-7.10051E-2	-8.80013E1	-5.48363E-4	-8.80003E1	5.96046E-4	5.126E-3	9.39608E-2	2.74421E1	-3.26633E1	-3.26242E1	2.67872E1	1.20122E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01347E-1
1.9E1	9.82E2	0.0E0	7.68E2	5.29E2	-7.12368E-2	-8.80015E1	-5.24521E-4	-8.80004E1	2.38419E-5	5.03063E-3	9.39608E-2	2.73027E1	-3.26945E1	-3.26086E1	2.67812E1	1.19861E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00824E-1
2.0E1	2.3089E4	2.3E1	8.08E2	5.58E2	-7.22418E-2	-8.80018E1	-5.24521E-4	-8.80003E1	2.38419E-5	4.91142E-3	9.40323E-2	2.71393E1	-3.26717E1	-3.26404E1	2.68406E1	1.19809E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00302E-1
2.1E1	6.2E1	0.0E0	8.49E2	5.88E2	-7.05415E-2	-8.80017E1	-7.15256E-4	-8.79999E1	-2.38419E-5	5.05447E-3	9.40084E-2	2.71759E1	-3.2662E1	-3.26178E1	2.67675E1	1.20106E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.01738E-1
2.2E1	1.604E3	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80016E1	-7.15256E-4	-8.79998E1	1.43051E-4	4.98295E-3	9.37939E-2	2.72865E1	-3.26717E1	-3.26182E1	2.68418E1	1.19913E-7	2.52757E-3	2.52757E-3	6.30192E-3	3.00041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80015E1	-1.0252E-3	-8.79999E1	2.86102E-4	5.07832E-3	9.39846E-2	2.73916E1	-3.26819E1	-3.26338E1	2.67908E1	1.20226E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.01609E-1