[Scan]
initial_time=2016-01-27T21:10:13
final_time=2016-01-27T21:10:33
ip_count=19
run=1025
dataset=3
scan=197
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.13143E-2
qbias_imon=-3.80284E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.19793E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=4.1889E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.77189E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=8.51858E-10
mult1=-1.55166E-8
mult2=-2.74873E-9
rf_tmon=-5.5477E-3
rf_agc=3.30967E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=4.22156E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65029E0
bslens_imon=2.58573E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20143E1
lens5a_imon=1.99253E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.05033E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53615E1
cs_ef1b_imon=2.77991E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.01916E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05047E1
cs_ea1_imon=2.55388E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01059E0
lens1_imon=1.36464E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64649E1
os_ef1alow_imon=2.98078E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03737E1
cs_ea2_imon=1.55258E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84128E1
cs_ef1a_imon=2.9005E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=4.22156E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11598E1
os_restr1_imon=2.8734E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15394E1
os_ea1_imon=1.88104E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63763E1
os_ef1bup_imon=3.09755E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2226E0
cs_ionrep_imon=1.20112E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93254E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01914E1
cs_anode1_imon=2.91267E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=7.67446E-10
tplens_vset=1.4E-1
tplens_vmon=1.63022E0
tplens_imon=-1.92739E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26561E1
iondef3_imon=1.4871E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2662E1
iondef2_imon=1.59151E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.98431E-4
ql6_vset=1.0E-1
ql6_vmon=9.4223E-2
ql6_imon=4.25339E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26744E0
ionrepsh_imon=1.77379E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33929E1
lens5b_imon=2.16242E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74576E1
cs_ef2b_imon=3.12535E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.49266E-1
os_ea2_imon=-4.86476E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00435E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71159E1
cs_ef2a_imon=3.18096E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61118E0
os_ef2alow_imon=-2.59196E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.47998E-1
os_ef2bup_imon=-5.18797E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11002E1
os_restr2_imon=2.87687E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01717E1
cs_anode2_imon=2.2416E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72013E1
iondef1_imon=1.09246E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6831E1
iondef4_imon=1.07843E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=2.02912E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=3.43645E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12725E0
cs_ionaccel_imon=-1.77875E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02128E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56515E1
einzel_imon=7.7643E-6
window_vset=0.0E0
window_vmon=2.54176E-1
window_imon=-1.06632E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39122E-4
mask2_vset=0.0E0
mask2_vmon=-1.86831E1
mask2_imon=-6.35391E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92576E3
multa_neg_imon=7.40995E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.52509E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.09848E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.56652E0
defgridb_imon=6.16761E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33953E1
os_fil1_imon=4.44929E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.65811E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62575E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30696E1
cs_fil1_imon=9.9748E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63762E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62398E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00303E-2
os_fil2_imon=-2.44329E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.06067E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.26295E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32024E-1
cs_fil2_imon=-2.25216E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.75572E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2154E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=2.74062E-1
res40_imon=-2.5155E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.439E3	1.0E0	1.47E2	4.1E1	-7.30918E-2	-8.8002E1	-4.76837E-4	-8.79999E1	1.43051E-4	4.3869E-3	9.37939E-2	2.75022E1	-3.26224E1	-3.26422E1	2.67882E1	1.19953E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.03027E-1
2.0E0	9.7828E4	8.7E1	3.16E2	1.6E2	-7.31692E-2	-8.80022E1	-7.15256E-4	-8.79999E1	5.48363E-4	4.48227E-3	9.37223E-2	2.73694E1	-3.2675E1	-3.26334E1	2.68112E1	1.19913E-7	2.5188E-3	2.5188E-3	6.34588E-3	2.9926E-1
3.0E0	2.5E1	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80021E1	-5.24521E-4	-8.79997E1	1.90735E-4	4.98295E-3	9.38177E-2	2.72495E1	-3.2659E1	-3.26208E1	2.68036E1	1.19925E-7	2.52697E-3	2.52697E-3	6.32418E-3	2.99348E-1
4.0E0	2.0774E4	1.2E1	6.55E2	3.98E2	-7.27828E-2	-8.80017E1	-6.67572E-4	-8.8E1	4.05312E-4	4.79221E-3	9.377E-2	2.73576E1	-3.26608E1	-3.2636E1	2.68172E1	1.19891E-7	2.51709E-3	2.51709E-3	6.3074E-3	2.98842E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80022E1	-9.29832E-4	-8.80002E1	4.05312E-4	4.98295E-3	9.39369E-2	2.73015E1	-3.26747E1	-3.26074E1	2.67812E1	1.20158E-7	2.51847E-3	2.51847E-3	6.33977E-3	2.9892E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.8002E1	-5.72205E-4	-8.8E1	3.57628E-4	4.64916E-3	9.39608E-2	2.7263E1	-3.27071E1	-3.26092E1	2.67828E1	1.20069E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9952E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80018E1	-7.39098E-4	-8.79999E1	4.52995E-4	4.79221E-3	9.4223E-2	2.73387E1	-3.26795E1	-3.26014E1	2.68052E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01347E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.40967E-2	-8.80017E1	-8.82149E-4	-8.80001E1	7.15256E-5	4.81606E-3	9.39846E-2	2.74169E1	-3.26999E1	-3.26218E1	2.68213E1	1.19902E-7	2.52492E-3	2.52492E-3	6.31817E-3	3.0148E-1
1.2E1	3.0E1	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80018E1	-7.39098E-4	-8.79999E1	4.76837E-5	4.93526E-3	9.39369E-2	2.72096E1	-3.26646E1	-3.26358E1	2.6819E1	1.19872E-7	2.5225E-3	2.5225E-3	6.32418E-3	3.00144E-1
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80018E1	-9.53674E-4	-8.8E1	5.72205E-4	4.79221E-3	9.38892E-2	2.74805E1	-3.26422E1	-3.26597E1	2.6819E1	1.19861E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.99E-1
1.4E1	3.058E3	2.0E0	5.66E2	3.82E2	-7.38649E-2	-8.80019E1	-7.15256E-4	-8.79999E1	4.52995E-4	4.52995E-3	9.36985E-2	2.71629E1	-3.26868E1	-3.26331E1	2.67836E1	1.20174E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9952E-1
1.5E1	4.0E1	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80023E1	-1.23978E-3	-8.79998E1	7.15256E-5	4.72069E-3	9.38177E-2	2.71729E1	-3.26543E1	-3.26536E1	2.68018E1	1.20174E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00041E-1
1.6E1	2.48E2	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.8002E1	-9.53674E-4	-8.80001E1	2.38419E-4	4.55379E-3	9.377E-2	2.73838E1	-3.26567E1	-3.262E1	2.67895E1	1.19861E-7	2.51225E-3	2.51225E-3	6.34037E-3	3.01609E-1
1.7E1	2.6E2	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.8002E1	-9.05991E-4	-8.79999E1	5.48363E-4	5.05447E-3	9.3627E-2	2.74733E1	-3.26693E1	-3.25864E1	2.68148E1	1.20122E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.03449E-1
1.8E1	1.124E3	0.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80022E1	-9.29832E-4	-8.79999E1	5.96046E-4	5.05447E-3	9.38416E-2	2.74277E1	-3.26549E1	-3.26254E1	2.68053E1	1.19705E-7	2.51225E-3	2.51225E-3	6.34588E-3	3.03712E-1
1.9E1	1.007E3	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80021E1	-9.77516E-4	-8.80001E1	9.53674E-5	5.14984E-3	9.3627E-2	2.74717E1	-3.26596E1	-3.26601E1	2.67897E1	1.20004E-7	2.51096E-3	2.51096E-3	6.32896E-3	3.02253E-1
2.0E1	2.2997E4	1.6E1	8.08E2	5.58E2	-7.19325E-2	-8.80023E1	-1.00136E-3	-8.79998E1	1.19209E-4	4.98295E-3	9.41038E-2	2.72916E1	-3.26416E1	-3.26267E1	2.68312E1	1.1993E-7	2.51369E-3	2.51369E-3	6.3074E-3	3.01237E-1
2.1E1	8.0E1	0.0E0	8.49E2	5.88E2	-7.15461E-2	-8.80022E1	-8.58307E-4	-8.80001E1	3.57628E-4	5.07832E-3	9.39846E-2	2.7278E1	-3.26431E1	-3.2606E1	2.68094E1	1.20076E-7	2.51203E-3	2.51203E-3	6.30149E-3	2.98512E-1
2.2E1	1.651E3	2.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80019E1	-1.00136E-3	-8.80003E1	3.8147E-4	5.31673E-3	9.37939E-2	2.74343E1	-3.26364E1	-3.26229E1	2.68045E1	1.20226E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.13143E-2	-8.80021E1	-9.53674E-4	-8.80002E1	5.24521E-4	4.95911E-3	9.4223E-2	2.72013E1	-3.2662E1	-3.26561E1	2.6831E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1