[Scan]
initial_time=2016-01-27T21:10:40
final_time=2016-01-27T21:10:59
ip_count=19
run=1025
dataset=3
scan=198
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.81001E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.43456E-10
ql2_vset=
ql2_vmon=-6.4373E-4
ql2_imon=3.51477E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.66119E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=8.18229E-10
mult1=-2.56148E-8
mult2=-2.71415E-9
rf_tmon=-5.00546E-3
rf_agc=3.333E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=4.25148E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64026E0
bslens_imon=2.82995E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20231E1
lens5a_imon=1.96846E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.0521E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53661E1
cs_ef1b_imon=2.76949E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02188E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05088E1
cs_ea1_imon=2.57972E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01531E0
lens1_imon=1.31154E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64574E1
os_ef1alow_imon=2.98982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.52781E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84249E1
cs_ef1a_imon=2.91267E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=4.2851E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11187E1
os_restr1_imon=2.87826E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15064E1
os_ea1_imon=1.88741E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63855E1
os_ef1bup_imon=3.09095E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25505E0
cs_ionrep_imon=1.18448E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=2.92587E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=7.94601E-10
tplens_vset=1.4E-1
tplens_vmon=1.66857E0
tplens_imon=-3.87372E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26336E1
iondef3_imon=1.49241E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26495E1
iondef2_imon=1.56886E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02883E2
lens6_imon=2.98356E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=4.17924E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30342E0
ionrepsh_imon=1.73769E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33221E1
lens5b_imon=2.18897E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74959E1
cs_ef2b_imon=3.1257E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.62833E-1
os_ea2_imon=-5.07712E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00697E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.17748E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65346E0
os_ef2alow_imon=-2.60586E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.27147E-1
os_ef2bup_imon=-5.42081E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10816E1
os_restr2_imon=2.86679E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.2968E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.24855E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74781E1
iondef1_imon=1.09671E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68032E1
iondef4_imon=1.08329E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.0402E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=3.05116E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11161E0
cs_ionaccel_imon=-1.71967E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47483E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56475E1
einzel_imon=7.69827E-6
window_vset=0.0E0
window_vmon=1.5571E-1
window_imon=-1.04895E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39039E-4
mask2_vset=0.0E0
mask2_vmon=-1.86778E1
mask2_imon=-5.41559E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.32854E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.69852E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.02415E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.40411E0
defgridb_imon=5.98356E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3392E1
os_fil1_imon=5.20226E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.91093E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6243E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30709E1
cs_fil1_imon=9.96877E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63183E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62526E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.99037E-2
os_fil2_imon=-2.44329E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.06067E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.22119E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30775E-1
cs_fil2_imon=-2.33324E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44899E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21588E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.323E-3
inlet_lpb_pmon=3.00494E-1
chamber_ion_pmon=1.20078E-7
chamber_cvt_pmon=2.52509E-3
foreline_cvt_pmon=2.52509E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.68677E-1
res40_imon=-2.47728E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.437E3	1.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80019E1	-1.00136E-3	-8.79999E1	4.52995E-4	5.17368E-3	9.41515E-2	2.73746E1	-3.26793E1	-3.26214E1	2.67692E1	1.20106E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.01223E-1
2.0E0	9.8139E4	7.5E1	3.16E2	1.6E2	-7.29374E-2	-8.80019E1	-1.00136E-3	-8.80003E1	2.86102E-4	4.72069E-3	9.38416E-2	2.74153E1	-3.26517E1	-3.26321E1	2.6831E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00453E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.80018E1	-5.96046E-4	-8.80002E1	2.86102E-4	4.88758E-3	9.38654E-2	2.72862E1	-3.26537E1	-3.26095E1	2.67995E1	1.2035E-7	2.52921E-3	2.52921E-3	6.31299E-3	2.99879E-1
4.0E0	2.1079E4	7.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80014E1	-6.19888E-4	-8.80005E1	3.57628E-4	4.26769E-3	9.36508E-2	2.72526E1	-3.26472E1	-3.26012E1	2.67962E1	1.19891E-7	2.51814E-3	2.51814E-3	6.31798E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80018E1	-4.29153E-4	-8.80002E1	2.6226E-4	4.57764E-3	9.36747E-2	2.7367E1	-3.26567E1	-3.26044E1	2.6792E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.02133E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80018E1	-5.96046E-4	-8.80002E1	2.14577E-4	4.31538E-3	9.36508E-2	2.7108E1	-3.26729E1	-3.26032E1	2.68118E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80023E1	-6.91414E-4	-8.79998E1	3.57628E-4	4.48227E-3	9.38177E-2	2.73273E1	-3.26476E1	-3.26386E1	2.67902E1	1.20244E-7	2.51025E-3	2.51025E-3	6.31858E-3	2.99879E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80021E1	-4.76837E-4	-8.8E1	4.29153E-4	5.05447E-3	9.38177E-2	2.73446E1	-3.26242E1	-3.26431E1	2.68118E1	1.2033E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.02659E-1
1.2E1	5.0E1	0.0E0	4.85E2	3.23E2	-7.36328E-2	-8.80019E1	-1.00136E-3	-8.8E1	4.52995E-4	4.74453E-3	9.3627E-2	2.72945E1	-3.26384E1	-3.26673E1	2.68175E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.01738E-1
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.8002E1	-5.96046E-4	-8.79999E1	2.38419E-5	4.55379E-3	9.37223E-2	2.74747E1	-3.26762E1	-3.26058E1	2.67998E1	1.20142E-7	2.51814E-3	2.51814E-3	6.30212E-3	3.01104E-1
1.4E1	3.093E3	2.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80023E1	-5.96046E-4	-8.79998E1	1.90735E-4	4.93526E-3	9.38416E-2	2.72467E1	-3.26331E1	-3.26119E1	2.68106E1	1.20031E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.01475E-1
1.5E1	5.1E1	0.0E0	6.06E2	4.11E2	-7.45602E-2	-8.80023E1	-8.58307E-4	-8.79995E1	9.53674E-5	4.62532E-3	9.37939E-2	2.74036E1	-3.26711E1	-3.2647E1	2.6804E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01871E-1
1.6E1	2.6E2	0.0E0	6.47E2	4.41E2	-7.47149E-2	-8.80025E1	-7.15256E-4	-8.80001E1	-2.38419E-4	4.72069E-3	9.35555E-2	2.72841E1	-3.26651E1	-3.262E1	2.68154E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01609E-1
1.7E1	2.7E2	0.0E0	6.87E2	4.7E2	-7.39421E-2	-8.80021E1	-9.05991E-4	-8.79999E1	0.0E0	4.69685E-3	9.35793E-2	2.71173E1	-3.2638E1	-3.26573E1	2.68032E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00824E-1
1.8E1	1.208E3	1.0E0	7.27E2	5.0E2	-7.44059E-2	-8.80023E1	-7.62939E-4	-8.79996E1	2.86102E-4	4.673E-3	9.34839E-2	2.72847E1	-3.26737E1	-3.26247E1	2.67959E1	1.20078E-7	2.5199E-3	2.5199E-3	6.31779E-3	3.00247E-1
1.9E1	9.42E2	2.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80021E1	-1.14441E-3	-8.80001E1	1.66893E-4	4.86374E-3	9.36747E-2	2.72516E1	-3.26543E1	-3.26633E1	2.681E1	1.19895E-7	2.5118E-3	2.5118E-3	6.33065E-3	3.01193E-1
2.0E1	2.3124E4	6.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80023E1	-1.16825E-3	-8.79998E1	7.15256E-5	4.98295E-3	9.37939E-2	2.71465E1	-3.26338E1	-3.26374E1	2.68136E1	1.20069E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01871E-1
2.1E1	4.4E1	0.0E0	8.49E2	5.88E2	-7.37874E-2	-8.80022E1	-5.96046E-4	-8.8E1	9.53674E-5	4.64916E-3	9.35555E-2	2.71387E1	-3.2695E1	-3.2626E1	2.67914E1	1.20158E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.01738E-1
2.2E1	1.637E3	1.0E0	8.89E2	6.17E2	-7.32464E-2	-8.8002E1	-6.91414E-4	-8.79997E1	1.43051E-4	4.673E-3	9.36985E-2	2.71383E1	-3.26459E1	-3.26283E1	2.68283E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00563E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80021E1	-6.4373E-4	-8.80002E1	1.19209E-4	4.72069E-3	9.38416E-2	2.74781E1	-3.26495E1	-3.26336E1	2.68032E1	1.20078E-7	2.52509E-3	2.52509E-3	6.323E-3	3.00494E-1