[Scan]
initial_time=2016-01-27T21:11:33
final_time=2016-01-27T21:11:53
ip_count=19
run=1025
dataset=3
scan=200
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.79687E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.37758E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=4.13215E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.77462E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=8.19755E-10
mult1=-2.01916E-8
mult2=-2.83638E-9
rf_tmon=-4.52444E-3
rf_agc=3.361E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=4.35615E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63318E0
bslens_imon=2.57157E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20037E1
lens5a_imon=1.98934E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12404E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53436E1
cs_ef1b_imon=2.7625E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.02188E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05029E1
cs_ea1_imon=2.55848E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01118E0
lens1_imon=1.71858E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64554E1
os_ef1alow_imon=2.9964E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03566E1
cs_ea2_imon=1.51471E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84268E1
cs_ef1a_imon=2.89729E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=4.08137E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11382E1
os_restr1_imon=2.88575E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=1.88316E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.07424E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24561E0
cs_ionrep_imon=1.18342E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93509E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=2.92179E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=8.48532E-10
tplens_vset=1.4E-1
tplens_vmon=1.63612E0
tplens_imon=-3.97991E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26374E1
iondef3_imon=1.48038E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.58868E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98116E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=4.77576E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29398E0
ionrepsh_imon=1.78052E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33693E1
lens5b_imon=2.14366E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.61064E-1
os_ea2_imon=-1.96244E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00485E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71053E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61377E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.38559E-1
os_ef2bup_imon=-5.18553E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10859E1
os_restr2_imon=2.86701E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.3276E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02007E1
cs_anode2_imon=2.24605E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74517E1
iondef1_imon=1.0783E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68099E1
iondef4_imon=1.08882E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.9861E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=3.78978E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13375E0
cs_ionaccel_imon=-1.82303E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47251E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56507E1
einzel_imon=7.70586E-6
window_vset=0.0E0
window_vmon=2.46775E-1
window_imon=-1.09142E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39207E-4
mask2_vset=0.0E0
mask2_vmon=-1.8644E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.36039E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93752E3
defgrida_imon=6.84718E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.15511E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.67578E0
defgridb_imon=5.83845E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33919E1
os_fil1_imon=4.52995E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.52124E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62347E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30645E1
cs_fil1_imon=9.97657E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63057E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62462E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.05368E-2
os_fil2_imon=-2.54584E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.79714E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.31358E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.31158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.83939E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21495E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=3.01871E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.42473E-1
res40_imon=-2.34921E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=217
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.435E3	4.0E0	1.47E2	4.1E1	-7.33239E-2	-8.80018E1	-8.34465E-4	-8.79998E1	2.38419E-5	4.95911E-3	9.37939E-2	2.72078E1	-3.26765E1	-3.26248E1	2.67758E1	1.20069E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01085E-1
2.0E0	9.6732E4	9.7E1	3.16E2	1.6E2	-7.27053E-2	-8.80019E1	-7.39098E-4	-8.79997E1	0.0E0	5.00679E-3	9.36508E-2	2.73571E1	-3.26897E1	-3.26162E1	2.67783E1	1.19953E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.01995E-1
3.0E0	2.1E1	1.0E0	4.85E2	2.79E2	-7.286E-2	-8.80019E1	-4.29153E-4	-8.79999E1	2.38419E-5	5.43594E-3	9.37223E-2	2.74315E1	-3.26724E1	-3.26378E1	2.68065E1	1.19766E-7	2.52139E-3	2.52139E-3	6.30182E-3	3.04156E-1
4.0E0	2.0699E4	9.0E0	6.55E2	3.98E2	-7.286E-2	-8.80023E1	-7.62939E-4	-8.79997E1	-2.38419E-5	5.14984E-3	9.38654E-2	2.72539E1	-3.26822E1	-3.26042E1	2.67988E1	1.1988E-7	2.52405E-3	2.52405E-3	6.28667E-3	3.01981E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80022E1	-7.15256E-4	-8.79997E1	2.38419E-5	4.79221E-3	9.37223E-2	2.7265E1	-3.26767E1	-3.26408E1	2.6783E1	1.20031E-7	2.5225E-3	2.5225E-3	6.31299E-3	3.0041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.8002E1	-9.05991E-4	-8.8E1	3.33786E-4	4.57764E-3	9.36985E-2	2.75136E1	-3.26717E1	-3.2605E1	2.67932E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.43285E-2	-8.80018E1	-5.00679E-4	-8.79998E1	1.43051E-4	4.62532E-3	9.3627E-2	2.73877E1	-3.26597E1	-3.26138E1	2.67986E1	1.20174E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.42513E-2	-8.80019E1	-8.34465E-4	-8.8E1	2.38419E-4	4.45843E-3	9.38177E-2	2.72013E1	-3.26561E1	-3.25953E1	2.68194E1	1.19861E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.01085E-1
1.2E1	3.9E1	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.8002E1	-4.76837E-4	-8.79998E1	2.14577E-4	4.8399E-3	9.3627E-2	2.72774E1	-3.26614E1	-3.26325E1	2.68052E1	1.20226E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00302E-1
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80017E1	-3.09944E-4	-8.79998E1	7.15256E-5	4.8399E-3	9.40561E-2	2.72042E1	-3.26384E1	-3.26301E1	2.67902E1	1.19851E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.00197E-1
1.4E1	3.113E3	4.0E0	5.66E2	3.82E2	-7.42513E-2	-8.80016E1	-5.24521E-4	-8.8E1	2.38419E-4	4.60148E-3	9.39131E-2	2.70774E1	-3.26722E1	-3.26154E1	2.68226E1	1.20158E-7	2.51096E-3	2.51096E-3	6.31817E-3	2.99941E-1
1.5E1	3.4E1	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80019E1	-5.00679E-4	-8.8E1	2.38419E-5	4.45843E-3	9.38177E-2	2.71093E1	-3.26455E1	-3.26024E1	2.68046E1	1.19925E-7	2.50803E-3	2.50803E-3	6.27399E-3	3.00942E-1
1.6E1	2.43E2	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80021E1	-3.8147E-4	-8.80002E1	2.86102E-4	5.05447E-3	9.39846E-2	2.74561E1	-3.26555E1	-3.26685E1	2.68154E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00824E-1
1.7E1	2.84E2	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80018E1	-5.24521E-4	-8.80005E1	2.38419E-4	4.74453E-3	9.37223E-2	2.72943E1	-3.26777E1	-3.26579E1	2.68221E1	1.20055E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.0071E-1
1.8E1	1.131E3	2.0E0	7.27E2	5.0E2	-7.38649E-2	-8.80018E1	-3.57628E-4	-8.80003E1	4.29153E-4	4.91142E-3	9.39608E-2	2.71346E1	-3.26408E1	-3.26266E1	2.67896E1	1.20106E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.9892E-1
1.9E1	9.55E2	0.0E0	7.68E2	5.29E2	-7.33239E-2	-8.80017E1	-2.38419E-4	-8.80003E1	1.43051E-4	4.79221E-3	9.37939E-2	2.71912E1	-3.26603E1	-3.2637E1	2.67962E1	1.19913E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00824E-1
2.0E1	2.2386E4	1.0E1	8.08E2	5.58E2	-7.3401E-2	-8.80018E1	-5.24521E-4	-8.8E1	5.24521E-4	4.57764E-3	9.3627E-2	2.74219E1	-3.2649E1	-3.26071E1	2.67956E1	1.20278E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.02659E-1
2.1E1	4.1E1	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80019E1	-2.38419E-4	-8.80003E1	2.6226E-4	4.43459E-3	9.38177E-2	2.71507E1	-3.26561E1	-3.26735E1	2.68268E1	1.20122E-7	2.51552E-3	2.51552E-3	6.28006E-3	3.00563E-1
2.2E1	1.574E3	1.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80018E1	-5.00679E-4	-8.80003E1	5.72205E-4	4.48227E-3	9.38177E-2	2.73092E1	-3.26384E1	-3.26136E1	2.68052E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.99941E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80017E1	-3.8147E-4	-8.80001E1	5.24521E-4	4.45843E-3	9.36031E-2	2.74517E1	-3.26609E1	-3.26374E1	2.68099E1	1.20069E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.01871E-1