[Scan]
initial_time=2016-01-27T21:12:00
final_time=2016-01-27T21:12:19
ip_count=19
run=1025
dataset=3
scan=201
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.77264E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.24335E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=3.70502E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.63633E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=8.48675E-10
mult1=-1.89922E-8
mult2=-2.85652E-9
rf_tmon=-4.63335E-3
rf_agc=3.30967E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=4.03702E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67152E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19636E1
lens5a_imon=1.9897E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.05043E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53719E1
cs_ef1b_imon=2.78216E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02209E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0543E1
cs_ea1_imon=2.55919E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01177E0
lens1_imon=1.60178E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.98986E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04144E1
cs_ea2_imon=1.53311E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84132E1
cs_ef1a_imon=2.91308E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=4.00651E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11224E1
os_restr1_imon=2.86248E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1517E1
os_ea1_imon=1.89059E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63597E1
os_ef1bup_imon=3.10734E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.34235E0
cs_ionrep_imon=1.20395E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93516E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01756E1
cs_anode1_imon=2.9152E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=8.2339E-10
tplens_vset=1.4E-1
tplens_vmon=1.62669E0
tplens_imon=-2.10402E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26502E1
iondef3_imon=1.49914E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.5901E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98402E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=4.03452E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2639E0
ionrepsh_imon=1.78866E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33864E1
lens5b_imon=2.18118E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7459E1
cs_ef2b_imon=3.13565E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.31568E-1
os_ea2_imon=-3.73215E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00478E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.18306E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64164E0
os_ef2alow_imon=-2.35779E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.39236E-1
os_ef2bup_imon=-5.26639E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10711E1
os_restr2_imon=2.8692E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.30813E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01868E1
cs_anode2_imon=2.24997E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72933E1
iondef1_imon=1.08715E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6837E1
iondef4_imon=1.08547E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=2.00036E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=3.07417E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12012E0
cs_ionaccel_imon=-1.83056E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47269E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56305E1
einzel_imon=7.88599E-6
window_vset=0.0E0
window_vmon=2.29607E-1
window_imon=-1.10518E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39279E-4
mask2_vset=0.0E0
mask2_vmon=-1.86904E1
mask2_imon=-8.00876E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.54444E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.75162E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.19758E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.60786E0
defgridb_imon=6.20301E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33905E1
os_fil1_imon=5.22311E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.3049E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62386E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30626E1
cs_fil1_imon=9.96334E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63758E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62743E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.20564E-2
os_fil2_imon=-2.42581E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.82884E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.34268E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30351E-1
cs_fil2_imon=-2.34915E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37211E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21539E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.02004E-1
res40_imon=-2.45687E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.409E3	1.0E0	1.47E2	4.1E1	-7.30918E-2	-8.8002E1	-4.52995E-4	-8.8E1	4.29153E-4	4.3869E-3	9.37939E-2	2.73501E1	-3.26659E1	-3.26528E1	2.68099E1	1.20017E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.01347E-1
2.0E0	9.5665E4	6.3E1	3.16E2	1.6E2	-7.27053E-2	-8.8002E1	-7.15256E-4	-8.79999E1	1.19209E-4	4.76837E-3	9.40084E-2	2.74138E1	-3.26927E1	-3.25918E1	2.6792E1	1.1987E-7	2.51854E-3	2.51854E-3	6.29721E-3	3.00635E-1
3.0E0	1.3E1	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80021E1	-6.19888E-4	-8.80001E1	2.38419E-5	4.81606E-3	9.38177E-2	2.73358E1	-3.26626E1	-3.26195E1	2.67931E1	1.20174E-7	2.51007E-3	2.51007E-3	6.29645E-3	2.99E-1
4.0E0	2.0331E4	6.0E0	6.55E2	3.98E2	-7.24736E-2	-8.8002E1	-5.00679E-4	-8.80001E1	9.53674E-5	4.48227E-3	9.37223E-2	2.73472E1	-3.26705E1	-3.26344E1	2.67848E1	1.20004E-7	2.52276E-3	2.52276E-3	6.35059E-3	2.99175E-1
5.0E0	2.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80019E1	-6.67572E-4	-8.80003E1	-2.38419E-5	4.86374E-3	9.38654E-2	2.73868E1	-3.26404E1	-3.2644E1	2.67932E1	1.20069E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9952E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80022E1	-7.39098E-4	-8.80004E1	4.29153E-4	4.60148E-3	9.37462E-2	2.74154E1	-3.26573E1	-3.2629E1	2.68016E1	1.20122E-7	2.51443E-3	2.51443E-3	6.27461E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80023E1	-1.14441E-3	-8.80003E1	3.8147E-4	4.48227E-3	9.39369E-2	2.73285E1	-3.2638E1	-3.26284E1	2.67716E1	1.20311E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.01738E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80021E1	-7.62939E-4	-8.80003E1	1.66893E-4	4.93526E-3	9.36985E-2	2.73874E1	-3.26675E1	-3.2587E1	2.67722E1	1.20069E-7	2.51007E-3	2.51007E-3	6.3074E-3	3.00302E-1
1.2E1	4.4E1	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80021E1	-5.24521E-4	-8.80005E1	4.29153E-4	4.98295E-3	9.38416E-2	2.71897E1	-3.26621E1	-3.26044E1	2.68136E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.98481E-1
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80022E1	-3.09944E-4	-8.80003E1	3.09944E-4	5.00679E-3	9.38177E-2	2.72992E1	-3.26508E1	-3.26331E1	2.68221E1	1.20017E-7	2.52099E-3	2.52099E-3	6.29098E-3	2.99E-1
1.4E1	3.17E3	3.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80021E1	-2.86102E-4	-8.80004E1	3.33786E-4	5.19753E-3	9.40084E-2	2.73039E1	-3.26514E1	-3.26372E1	2.68046E1	1.19953E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.01738E-1
1.5E1	3.2E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80018E1	-7.39098E-4	-8.80004E1	1.19209E-4	5.07832E-3	9.37223E-2	2.73517E1	-3.26992E1	-3.26231E1	2.67884E1	1.20192E-7	2.51701E-3	2.51701E-3	6.32371E-3	3.02194E-1
1.6E1	2.88E2	1.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80018E1	-7.86781E-4	-8.8E1	1.43051E-4	4.93526E-3	9.37223E-2	2.75388E1	-3.26909E1	-3.2626E1	2.67798E1					
1.7E1	2.82E2	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80017E1	-8.82149E-4	-8.80002E1	2.38419E-4	5.24521E-3	9.34124E-2	2.73135E1	-3.26825E1	-3.26344E1	2.68418E1	1.20004E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.98665E-1
1.8E1	1.169E3	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.8002E1	-7.39098E-4	-8.8E1	1.19209E-4	5.07832E-3	9.35078E-2	2.71004E1	-3.26549E1	-3.26384E1	2.68052E1	1.20069E-7	2.51225E-3	2.51225E-3	6.34037E-3	2.98222E-1
1.9E1	9.86E2	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80021E1	-6.91414E-4	-8.80002E1	4.05312E-4	5.17368E-3	9.377E-2	2.709E1	-3.26488E1	-3.26248E1	2.68124E1	1.20278E-7	2.52428E-3	2.52428E-3	6.28552E-3	2.99E-1
2.0E1	2.2175E4	1.1E1	8.08E2	5.58E2	-7.29374E-2	-8.8002E1	-6.67572E-4	-8.80004E1	4.76837E-5	4.98295E-3	9.36747E-2	2.70894E1	-3.26188E1	-3.26266E1	2.67842E1	1.20517E-7	2.52707E-3	2.52707E-3	6.33977E-3	2.99686E-1
2.1E1	4.3E1	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80019E1	-4.29153E-4	-8.80001E1	6.91414E-4	4.93526E-3	9.35793E-2	2.70986E1	-3.26927E1	-3.26762E1	2.6807E1	1.20017E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.00041E-1
2.2E1	1.592E3	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80017E1	-2.86102E-4	-8.79997E1	3.57628E-4	4.88758E-3	9.38892E-2	2.70969E1	-3.26632E1	-3.26089E1	2.67956E1	1.20004E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80015E1	-6.67572E-4	-8.80001E1	3.8147E-4	5.36442E-3	9.35078E-2	2.72933E1	-3.26573E1	-3.26502E1	2.6837E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.01738E-1