[Scan]
initial_time=2016-01-27T21:13:20
final_time=2016-01-27T21:13:40
ip_count=19
run=1025
dataset=3
scan=204
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.38649E-2
qbias_imon=-3.81008E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.55186E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=4.2181E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.72101E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=8.57532E-10
mult1=-1.967E-8
mult2=-2.85285E-9
rf_tmon=-6.26211E-3
rf_agc=3.2486E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=4.25684E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64616E0
bslens_imon=2.62113E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19754E1
lens5a_imon=1.97483E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05196E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53526E1
cs_ef1b_imon=2.75925E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.02273E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05065E1
cs_ea1_imon=2.56768E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97697E0
lens1_imon=1.58408E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=3.01153E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04274E1
cs_ea2_imon=1.5225E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84448E1
cs_ef1a_imon=2.89909E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=4.22442E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11484E1
os_restr1_imon=2.88251E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15129E1
os_ea1_imon=1.90475E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63491E1
os_ef1bup_imon=3.0692E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26449E0
cs_ionrep_imon=1.18519E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93547E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=2.91819E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=7.82836E-10
tplens_vset=1.4E-1
tplens_vmon=1.69393E0
tplens_imon=-2.70572E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26121E1
iondef3_imon=1.49772E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26602E1
iondef2_imon=1.59081E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02903E2
lens6_imon=2.98364E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=4.56095E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32053E0
ionrepsh_imon=1.76176E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33705E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.12181E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.43956E-1
os_ea2_imon=-5.28949E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00633E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.19425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64381E0
os_ef2alow_imon=-2.45372E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.28348E-1
os_ef2bup_imon=-5.20355E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=2.86737E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.28831E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0223E1
cs_anode2_imon=2.2565E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74088E1
iondef1_imon=1.10343E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67723E1
iondef4_imon=1.09206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.05405E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=3.53777E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14215E0
cs_ionaccel_imon=-1.89511E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47406E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=2.56986E-1
window_imon=-7.13005E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82667E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.86849E1
mask2_imon=-5.40015E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.90546E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.87549E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=6.87903E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.73483E0
defgridb_imon=6.03311E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33939E1
os_fil1_imon=5.13662E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.40111E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62406E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30602E1
cs_fil1_imon=9.98155E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62972E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62549E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.20564E-2
os_fil2_imon=-2.47976E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.05853E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.46291E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28228E-1
cs_fil2_imon=-2.38366E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22632E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21612E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.02659E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.69503E-1
res40_imon=-2.26992E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=221
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.369E3	1.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80018E1	-5.48363E-4	-8.80002E1	5.24521E-4	4.57764E-3	9.34839E-2	2.71831E1	-3.265E1	-3.26506E1	2.68123E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.9943E-1
2.0E0	9.6051E4	8.0E1	3.16E2	1.6E2	-7.286E-2	-8.8002E1	-3.8147E-4	-8.79999E1	3.33786E-4	5.03063E-3	9.35793E-2	2.74557E1	-3.26805E1	-3.25985E1	2.67889E1	1.20278E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9926E-1
3.0E0	1.2E1	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80021E1	-2.6226E-4	-8.80002E1	4.05312E-4	4.79221E-3	9.35555E-2	2.74224E1	-3.26812E1	-3.26414E1	2.68004E1	1.20031E-7	2.51804E-3	2.51804E-3	6.30182E-3	2.98819E-1
4.0E0	2.004E4	1.2E1	6.55E2	3.98E2	-7.22418E-2	-8.8002E1	-3.8147E-4	-8.80002E1	3.57628E-4	4.86374E-3	9.35793E-2	2.73958E1	-3.26524E1	-3.26002E1	2.67884E1	1.20028E-7	2.51783E-3	2.51783E-3	6.31779E-3	2.99753E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.8002E1	-3.09944E-4	-8.80001E1	-2.38419E-5	4.36306E-3	9.37223E-2	2.75251E1	-3.26478E1	-3.26431E1	2.681E1	1.20174E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80018E1	-4.52995E-4	-8.79998E1	9.53674E-5	4.50611E-3	9.35793E-2	2.7504E1	-3.26753E1	-3.2641E1	2.6804E1	1.20122E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80015E1	-5.96046E-4	-8.79999E1	5.48363E-4	4.41074E-3	9.37462E-2	2.74956E1	-3.2647E1	-3.26302E1	2.67758E1	1.20158E-7	2.51096E-3	2.51096E-3	6.29665E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80021E1	-4.52995E-4	-8.8E1	1.19209E-4	4.62532E-3	9.39369E-2	2.74373E1	-3.26663E1	-3.2632E1	2.68286E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00041E-1
1.2E1	3.9E1	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.8002E1	-3.09944E-4	-8.79998E1	1.43051E-4	4.72069E-3	9.39131E-2	2.74439E1	-3.26543E1	-3.26212E1	2.681E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.02659E-1
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80021E1	-3.09944E-4	-8.80002E1	1.19209E-4	4.72069E-3	9.36747E-2	2.74517E1	-3.2638E1	-3.26152E1	2.68016E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01609E-1
1.4E1	3.035E3	4.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80021E1	-3.8147E-4	-8.80003E1	2.86102E-4	5.10216E-3	9.3627E-2	2.73948E1	-3.26366E1	-3.26119E1	2.6798E1	1.2033E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01609E-1
1.5E1	4.4E1	0.0E0	6.06E2	4.11E2	-7.13915E-2	-8.80018E1	-2.86102E-4	-8.8E1	7.15256E-5	4.88758E-3	9.34601E-2	2.74619E1	-3.26356E1	-3.26062E1	2.68124E1	1.2033E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.98481E-1
1.6E1	2.92E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80023E1	-5.00679E-4	-8.79999E1	1.90735E-4	4.86374E-3	9.36508E-2	2.74968E1	-3.26549E1	-3.26086E1	2.67595E1	1.19851E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.9892E-1
1.7E1	2.61E2	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80019E1	-5.96046E-4	-8.79998E1	1.43051E-4	4.81606E-3	9.38892E-2	2.74532E1	-3.26708E1	-3.26278E1	2.68065E1	1.19861E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.00563E-1
1.8E1	1.092E3	0.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80019E1	-5.00679E-4	-8.79999E1	9.53674E-5	4.74453E-3	9.37939E-2	2.74283E1	-3.27612E1	-3.26224E1	2.67992E1	1.198E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.0071E-1
1.9E1	9.83E2	3.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80018E1	-4.29153E-4	-8.8E1	3.09944E-4	4.91142E-3	9.36031E-2	2.72998E1	-3.26862E1	-3.26272E1	2.68308E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00041E-1
2.0E1	2.287E4	1.8E1	8.08E2	5.58E2	-7.286E-2	-8.80018E1	-5.96046E-4	-8.80001E1	1.90735E-4	4.81606E-3	9.40323E-2	2.72114E1	-3.26699E1	-3.26176E1	2.68064E1	1.20158E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.99686E-1
2.1E1	5.1E1	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80017E1	-5.48363E-4	-8.80001E1	2.38419E-4	5.126E-3	9.38892E-2	2.73352E1	-3.2695E1	-3.26213E1	2.67848E1	1.20069E-7	2.51225E-3	2.51225E-3	6.29645E-3	3.01085E-1
2.2E1	1.644E3	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80016E1	-9.53674E-4	-8.80001E1	3.33786E-4	4.93526E-3	9.36031E-2	2.7224E1	-3.26549E1	-3.26392E1	2.68106E1	1.19902E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.01995E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.38649E-2	-8.80016E1	-7.86781E-4	-8.79999E1	7.15256E-5	4.74453E-3	9.36031E-2	2.74088E1	-3.26602E1	-3.26121E1	2.67723E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02659E-1