[Scan]
initial_time=2016-01-27T21:13:47
final_time=2016-01-27T21:14:06
ip_count=19
run=1025
dataset=3
scan=205
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.201E-2
qbias_imon=-3.73921E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.23953E-10
ql2_vset=
ql2_vmon=-8.10623E-4
ql2_imon=3.72696E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.71858E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=8.48436E-10
mult1=-1.63146E-8
mult2=-2.82241E-9
rf_tmon=-5.44971E-3
rf_agc=3.25765E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=4.11832E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64391E0
bslens_imon=2.60985E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19664E1
lens5a_imon=1.99497E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.0528E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53466E1
cs_ef1b_imon=2.77259E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04576E2
lens23_imon=1.02045E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05367E1
cs_ea1_imon=2.55842E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99449E0
lens1_imon=1.46708E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64272E1
os_ef1alow_imon=2.98883E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03949E1
cs_ea2_imon=1.51839E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83805E1
cs_ef1a_imon=2.89873E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=4.04131E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11183E1
os_restr1_imon=2.88395E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1533E1
os_ea1_imon=1.88862E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63509E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23828E0
cs_ionrep_imon=1.17664E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93434E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01503E1
cs_anode1_imon=2.92648E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=8.4275E-10
tplens_vset=1.4E-1
tplens_vmon=1.63362E0
tplens_imon=-3.02951E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26344E1
iondef3_imon=1.51443E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2653E1
iondef2_imon=1.58653E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98382E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=4.16672E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27012E0
ionrepsh_imon=1.75416E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33694E1
lens5b_imon=2.18819E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.13046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.22884E-1
os_ea2_imon=-4.14704E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.0045E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71065E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63119E0
os_ef2alow_imon=-2.37443E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70394E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=2.87566E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.30793E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.23848E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74793E1
iondef1_imon=1.09625E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.09999E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.00909E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=3.1662E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0935E0
cs_ionaccel_imon=-1.79059E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02151E2
cs_ionfocb_imon=1.47435E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=2.65395E-1
window_imon=-1.10584E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39344E-4
mask2_vset=0.0E0
mask2_vmon=-1.86825E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.18454E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.52123E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.46933E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.49155E0
defgridb_imon=6.43471E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33925E1
os_fil1_imon=4.86632E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.42514E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62441E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30667E1
cs_fil1_imon=9.96275E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63153E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6255E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.26028E-2
os_fil2_imon=-2.35963E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.99846E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.30291E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.3356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.41853E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21602E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.55688E-1
res40_imon=-2.38164E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.402E3	1.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80016E1	-9.53674E-4	-8.80001E1	5.96046E-4	5.07832E-3	9.34601E-2	2.72829E1	-3.26533E1	-3.26317E1	2.68146E1	1.19653E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9978E-1
2.0E0	9.6181E4	9.8E1	3.16E2	1.6E2	-7.201E-2	-8.80018E1	-7.39098E-4	-8.79999E1	3.33786E-4	5.24521E-3	9.38177E-2	2.72009E1	-3.26697E1	-3.26148E1	2.68184E1	1.20325E-7	2.52093E-3	2.52093E-3	6.30221E-3	3.00741E-1
3.0E0	2.4E1	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80018E1	-9.53674E-4	-8.79998E1	3.33786E-4	4.88758E-3	9.34601E-2	2.73415E1	-3.26693E1	-3.26323E1	2.68215E1	1.20084E-7	2.5225E-3	2.5225E-3	6.32418E-3	2.99879E-1
4.0E0	2.0205E4	1.5E1	6.55E2	3.98E2	-7.30146E-2	-8.80023E1	-5.72205E-4	-8.8E1	4.29153E-4	4.91142E-3	9.40323E-2	2.7504E1	-3.26518E1	-3.2629E1	2.68022E1	1.20042E-7	2.52131E-3	2.52131E-3	6.31269E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80022E1	-9.77516E-4	-8.80002E1	1.43051E-4	4.86374E-3	9.39369E-2	2.72603E1	-3.26679E1	-3.2613E1	2.67897E1	1.20122E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80025E1	-6.19888E-4	-8.80002E1	4.29153E-4	5.34058E-3	9.40084E-2	2.73159E1	-3.26675E1	-3.26344E1	2.67889E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80021E1	-6.4373E-4	-8.80001E1	5.72205E-4	4.8399E-3	9.36508E-2	2.72868E1	-3.26644E1	-3.25735E1	2.67931E1	1.20174E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.11597E-2	-8.80018E1	-9.53674E-4	-8.80002E1	1.90735E-4	4.93526E-3	9.38416E-2	2.73633E1	-3.26878E1	-3.26389E1	2.68274E1	1.20004E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.9943E-1
1.2E1	4.1E1	0.0E0	4.85E2	3.23E2	-7.16233E-2	-8.80018E1	-5.72205E-4	-8.80002E1	4.52995E-4	5.17368E-3	9.38892E-2	2.72684E1	-3.26512E1	-3.26416E1	2.67848E1	1.20174E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.9978E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80017E1	-7.62939E-4	-8.80001E1	3.57628E-4	4.79221E-3	9.36508E-2	2.72084E1	-3.26398E1	-3.26056E1	2.68034E1	1.20031E-7	2.51581E-3	2.51581E-3	6.3074E-3	2.98554E-1
1.4E1	3.06E3	6.0E0	5.66E2	3.82E2	-7.31692E-2	-8.8002E1	-5.24521E-4	-8.79999E1	5.24521E-4	4.76837E-3	9.39131E-2	2.73605E1	-3.26608E1	-3.26343E1	2.68118E1	1.20069E-7	2.52209E-3	2.52209E-3	6.28552E-3	2.9926E-1
1.5E1	4.0E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80019E1	-6.67572E-4	-8.79998E1	5.24521E-4	4.8399E-3	9.377E-2	2.72204E1	-3.26687E1	-3.2599E1	2.67956E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99941E-1
1.6E1	2.41E2	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80017E1	-6.4373E-4	-8.8E1	1.90735E-4	4.64916E-3	9.38654E-2	2.74331E1	-3.26633E1	-3.25996E1	2.67734E1	1.20226E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.03449E-1
1.7E1	2.53E2	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80021E1	-8.58307E-4	-8.8E1	3.33786E-4	4.88758E-3	9.37939E-2	2.72516E1	-3.26735E1	-3.26134E1	2.67776E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.02659E-1
1.8E1	1.131E3	1.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80021E1	-8.10623E-4	-8.79998E1	2.14577E-4	4.95911E-3	9.37939E-2	2.74878E1	-3.26169E1	-3.25384E1	2.6811E1	1.19998E-7	2.52096E-3	2.52096E-3	6.31541E-3	2.98628E-1
1.9E1	9.87E2	0.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80019E1	-1.04904E-3	-8.80001E1	3.09944E-4	4.57764E-3	9.377E-2	2.74475E1	-3.2647E1	-3.26561E1	2.68178E1					
2.0E1	2.2664E4	1.1E1	8.08E2	5.58E2	-7.20871E-2	-8.80021E1	-9.29832E-4	-8.80001E1	2.38419E-4	4.64916E-3	9.36985E-2	2.72745E1	-3.26663E1	-3.2614E1	2.68286E1	1.20487E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00563E-1
2.1E1	3.5E1	0.0E0	8.49E2	5.88E2	-7.10825E-2	-8.80019E1	-8.34465E-4	-8.80002E1	1.66893E-4	4.62532E-3	9.37939E-2	2.72786E1	-3.2659E1	-3.26413E1	2.67956E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00824E-1
2.2E1	1.541E3	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80018E1	-7.39098E-4	-8.8E1	1.43051E-4	4.64916E-3	9.39846E-2	2.7528E1	-3.26603E1	-3.26567E1	2.6783E1	1.20004E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.9943E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.201E-2	-8.80017E1	-8.10623E-4	-8.80001E1	3.33786E-4	5.22137E-3	9.377E-2	2.74793E1	-3.2653E1	-3.26344E1	2.67974E1	1.20069E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01347E-1