[Scan]
initial_time=2016-01-27T21:14:13
final_time=2016-01-27T21:14:33
ip_count=19
run=1025
dataset=3
scan=206
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.14689E-2
qbias_imon=-3.78444E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.32966E-10
ql2_vset=
ql2_vmon=-8.58307E-4
ql2_imon=4.13406E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.68015E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=8.72695E-10
mult1=-1.71815E-8
mult2=-2.74057E-9
rf_tmon=-5.68403E-3
rf_agc=3.22581E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=4.29142E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67996E0
bslens_imon=2.74323E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20133E1
lens5a_imon=2.00759E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.0497E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53622E1
cs_ef1b_imon=2.78448E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02316E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04754E1
cs_ea1_imon=2.55554E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99029E0
lens1_imon=1.58244E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64506E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04177E1
cs_ea2_imon=1.51839E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85223E1
cs_ef1a_imon=2.91386E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=4.10783E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11015E1
os_restr1_imon=2.87314E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15354E1
os_ea1_imon=1.89511E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64026E1
os_ef1bup_imon=3.08722E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25811E0
cs_ionrep_imon=1.19827E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91885E2
cs_nozzle_imon=1.93276E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01329E1
cs_anode1_imon=2.92071E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=8.14128E-10
tplens_vset=1.4E-1
tplens_vmon=1.66907E0
tplens_imon=-1.65963E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.50181E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26819E1
iondef2_imon=1.56598E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02899E2
lens6_imon=2.98483E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=4.30369E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2539E0
ionrepsh_imon=1.7592E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33826E1
lens5b_imon=2.18675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74844E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.07863E-1
os_ea2_imon=-3.4621E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00641E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71071E1
cs_ef2a_imon=3.21119E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65822E0
os_ef2alow_imon=-2.56184E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.24744E-1
os_ef2bup_imon=-5.37293E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10937E1
os_restr2_imon=2.87206E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.29424E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.22947E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73694E1
iondef1_imon=1.08255E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68172E1
iondef4_imon=1.07981E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.02453E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=3.24142E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10431E0
cs_ionaccel_imon=-1.68247E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.8356E-6
window_vset=0.0E0
window_vmon=2.09534E-1
window_imon=-1.04457E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39369E-4
mask2_vset=0.0E0
mask2_vmon=-1.86602E1
mask2_imon=-8.13916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=8.38499E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93679E3
defgrida_imon=6.68705E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=6.98987E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.42839E0
defgridb_imon=6.00572E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33894E1
os_fil1_imon=5.07655E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.11279E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6257E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30645E1
cs_fil1_imon=9.94714E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63441E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62672E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.20869E-2
os_fil2_imon=-2.40768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.92058E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.13921E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-2.3296E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.68882E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2172E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.86632E-1
res40_imon=-2.56905E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.413E3	1.0E0	1.47E2	4.1E1	-7.23964E-2	-8.8002E1	-3.57628E-4	-8.80003E1	3.8147E-4	4.69685E-3	9.37939E-2	2.7366E1	-3.26567E1	-3.26545E1	2.68128E1	1.19861E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.02659E-1
2.0E0	9.59E4	1.0E2	3.16E2	1.6E2	-7.24736E-2	-8.8002E1	-8.10623E-4	-8.80003E1	5.48363E-4	4.91142E-3	9.35078E-2	2.73902E1	-3.26578E1	-3.26156E1	2.67968E1	1.20078E-7	2.5199E-3	2.5199E-3	6.33863E-3	3.01733E-1
3.0E0	2.2E1	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80018E1	-9.29832E-4	-8.80002E1	2.6226E-4	4.69685E-3	9.36985E-2	2.7498E1	-3.26782E1	-3.26208E1	2.68105E1	1.20031E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.00144E-1
4.0E0	2.0562E4	7.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80018E1	-9.77516E-4	-8.80001E1	4.29153E-4	4.673E-3	9.34839E-2	2.7245E1	-3.26434E1	-3.26248E1	2.67824E1	1.20092E-7	2.51287E-3	2.51287E-3	6.29684E-3	3.01104E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.80018E1	-6.19888E-4	-8.80001E1	1.43051E-4	4.64916E-3	9.39131E-2	2.72402E1	-3.26344E1	-3.26422E1	2.68142E1	1.19953E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.15461E-2	-8.80016E1	-6.67572E-4	-8.8E1	2.86102E-4	4.8399E-3	9.35793E-2	2.72552E1	-3.265E1	-3.2638E1	2.68004E1	1.19978E-7	2.51359E-3	2.51359E-3	6.32978E-3	3.02277E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.80017E1	-4.76837E-5	-8.80004E1	5.00679E-4	4.60148E-3	9.36508E-2	2.7449E1	-3.26708E1	-3.26071E1	2.68298E1	1.20174E-7	2.51443E-3	2.51443E-3	6.28006E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80018E1	-7.15256E-4	-8.79999E1	5.00679E-4	4.8399E-3	9.36031E-2	2.73478E1	-3.26536E1	-3.26482E1	2.6798E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00197E-1
1.2E1	4.7E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80018E1	-9.77516E-4	-8.79998E1	5.24521E-4	4.69685E-3	9.35793E-2	2.73682E1	-3.26615E1	-3.26194E1	2.6801E1	1.20174E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.01347E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.8002E1	-8.10623E-4	-8.8E1	4.52995E-4	4.72069E-3	9.35078E-2	2.72697E1	-3.26402E1	-3.26537E1	2.67958E1	1.19965E-7	2.51552E-3	2.51552E-3	6.28006E-3	3.02396E-1
1.4E1	3.078E3	4.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80019E1	-9.77516E-4	-8.80002E1	2.86102E-4	4.8399E-3	9.35555E-2	2.72294E1	-3.26506E1	-3.26206E1	2.67964E1	1.20004E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.02511E-1
1.5E1	3.2E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80019E1	-9.05991E-4	-8.79998E1	7.39098E-4	4.62532E-3	9.38177E-2	2.73754E1	-3.26633E1	-3.26098E1	2.6792E1	1.20158E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.00197E-1
1.6E1	2.59E2	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80016E1	-1.33514E-3	-8.79997E1	5.00679E-4	4.57764E-3	9.36508E-2	2.73405E1	-3.26735E1	-3.26488E1	2.68292E1	1.19925E-7	2.51915E-3	2.51915E-3	6.29624E-3	3.01209E-1
1.7E1	2.51E2	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80019E1	-1.12057E-3	-8.79998E1	1.43051E-4	5.05447E-3	9.377E-2	2.72914E1	-3.26613E1	-3.26499E1	2.67804E1	1.20174E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.00824E-1
1.8E1	1.122E3	3.0E0	7.27E2	5.0E2	-7.17779E-2	-8.80016E1	-1.14441E-3	-8.80001E1	5.48363E-4	4.93526E-3	9.39846E-2	2.74101E1	-3.27253E1	-3.25579E1	2.67991E1	1.20078E-7	2.51679E-3	2.51679E-3	6.31779E-3	3.00741E-1
1.9E1	9.86E2	2.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80018E1	-1.0252E-3	-8.80004E1	3.09944E-4	4.8399E-3	9.37223E-2	2.73321E1	-3.26609E1	-3.2602E1	2.67937E1	1.19785E-7	2.51527E-3	2.51527E-3	6.32483E-3	3.0147E-1
2.0E1	2.2511E4	1.3E1	8.08E2	5.58E2	-7.17007E-2	-8.80017E1	-1.14441E-3	-8.80002E1	5.00679E-4	4.52995E-3	9.39846E-2	2.72138E1	-3.26543E1	-3.26224E1	2.67764E1	1.20174E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01085E-1
2.1E1	5.0E1	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80019E1	-7.86781E-4	-8.79999E1	3.09944E-4	4.86374E-3	9.34601E-2	2.74154E1	-3.2672E1	-3.26213E1	2.6792E1	1.19861E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.00302E-1
2.2E1	1.587E3	2.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80018E1	-7.15256E-4	-8.8E1	7.15256E-5	5.05447E-3	9.38177E-2	2.72096E1	-3.26482E1	-3.26524E1	2.68082E1	1.20311E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.0071E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.14689E-2	-8.80018E1	-8.58307E-4	-8.80001E1	4.52995E-4	5.31673E-3	9.38416E-2	2.73694E1	-3.26819E1	-3.26224E1	2.68172E1	1.19913E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.9978E-1