[Scan]
initial_time=2016-01-27T21:18:13
final_time=2016-01-27T21:18:33
ip_count=19
run=1025
dataset=3
scan=215
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37103E-2
qbias_imon=-3.76732E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-6.31762E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=3.82602E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.7045E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=8.34119E-10
mult1=-1.64952E-8
mult2=-2.70464E-9
rf_tmon=-4.62658E-3
rf_agc=3.30091E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=4.46737E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63964E0
bslens_imon=2.53814E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19892E1
lens5a_imon=2.00374E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05038E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54142E1
cs_ef1b_imon=2.80285E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02177E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04814E1
cs_ea1_imon=2.57766E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02033E0
lens1_imon=1.2867E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64504E1
os_ef1alow_imon=2.96619E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03841E1
cs_ea2_imon=1.53167E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84058E1
cs_ef1a_imon=2.90398E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=4.47547E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11338E1
os_restr1_imon=2.88799E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15103E1
os_ea1_imon=1.88276E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63734E1
os_ef1bup_imon=3.08052E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2463E0
cs_ionrep_imon=1.18405E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93493E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01775E1
cs_anode1_imon=2.89738E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=8.46636E-10
tplens_vset=1.4E-1
tplens_vmon=1.66635E0
tplens_imon=-2.49778E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25996E1
iondef3_imon=1.49899E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26645E1
iondef2_imon=1.56434E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02931E2
lens6_imon=2.98426E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=4.23002E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26542E0
ionrepsh_imon=1.7392E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33692E1
lens5b_imon=2.19284E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74617E1
cs_ef2b_imon=3.14586E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.31832E-1
os_ea2_imon=-5.00065E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00553E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.19277E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59264E0
os_ef2alow_imon=-2.71012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.62478E-1
os_ef2bup_imon=-5.25748E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10718E1
os_restr2_imon=2.8727E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.28712E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01867E1
cs_anode2_imon=2.22457E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73237E1
iondef1_imon=1.12287E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68064E1
iondef4_imon=1.11283E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.14022E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=3.7874E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10929E0
cs_ionaccel_imon=-1.99769E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02043E2
cs_ionfocb_imon=1.47428E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56672E1
einzel_imon=7.84075E-6
window_vset=0.0E0
window_vmon=2.77924E-1
window_imon=-1.04547E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82597E2
mask1_imon=2.39108E-4
mask2_vset=0.0E0
mask2_vmon=-1.86946E1
mask2_imon=-4.85955E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.21711E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93672E3
defgrida_imon=6.35154E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.39787E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.488E0
defgridb_imon=5.99696E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3391E1
os_fil1_imon=5.33548E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.48435E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62261E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30736E1
cs_fil1_imon=9.96854E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63704E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62572E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.05346E-2
os_fil2_imon=-2.57651E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.68246E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.30148E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30526E-1
cs_fil2_imon=-2.38537E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10146E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21588E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.9841E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.13652E-1
res40_imon=-2.73097E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=185
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.392E3	0.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80019E1	-1.0252E-3	-8.8E1	5.24521E-4	4.88758E-3	9.37223E-2	2.73021E1	-3.2644E1	-3.26188E1	2.67692E1	1.20293E-7	2.51603E-3	2.51603E-3	6.32858E-3	3.00852E-1
2.0E0	9.5599E4	8.7E1	3.16E2	1.6E2	-7.21643E-2	-8.80017E1	-9.05991E-4	-8.8E1	4.52995E-4	4.86374E-3	9.36031E-2	2.71912E1	-3.26578E1	-3.26438E1	2.68144E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9952E-1
3.0E0	1.5E1	0.0E0	4.85E2	2.79E2	-7.11597E-2	-8.80019E1	-7.39098E-4	-8.79999E1	2.14577E-4	4.79221E-3	9.36508E-2	2.71804E1	-3.26801E1	-3.2618E1	2.68216E1	1.20031E-7	2.52362E-3	2.52362E-3	6.31858E-3	2.98554E-1
4.0E0	2.0533E4	1.7E1	6.55E2	3.98E2	-7.17007E-2	-8.80019E1	-1.09673E-3	-8.8E1	1.66893E-4	4.95911E-3	9.3627E-2	2.71637E1	-3.26505E1	-3.26297E1	2.68026E1	1.20424E-7	2.52093E-3	2.52093E-3	6.30221E-3	2.99753E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.11597E-2	-8.80019E1	-1.14441E-3	-8.80004E1	4.52995E-4	5.10216E-3	9.36031E-2	2.73717E1	-3.26789E1	-3.26795E1	2.67858E1	1.20031E-7	2.51915E-3	2.51915E-3	6.27954E-3	2.99348E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.13915E-2	-8.80014E1	-6.67572E-4	-8.80002E1	4.29153E-4	4.72069E-3	9.38892E-2	2.73488E1	-3.2626E1	-3.26223E1	2.68026E1	1.20028E-7	2.51369E-3	2.51369E-3	6.31779E-3	3.00989E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.8002E1	-8.10623E-4	-8.80002E1	3.33786E-4	4.52995E-3	9.36747E-2	2.71951E1	-3.26518E1	-3.26416E1	2.6792E1	1.19937E-7	2.52293E-3	2.52293E-3	6.29035E-3	3.01881E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.10825E-2	-8.80017E1	-1.09673E-3	-8.80003E1	3.33786E-4	4.95911E-3	9.34601E-2	2.73508E1	-3.2647E1	-3.26014E1	2.6807E1	1.20226E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.99E-1
1.2E1	4.4E1	0.0E0	4.85E2	3.23E2	-7.16233E-2	-8.80018E1	-9.05991E-4	-8.80001E1	9.53674E-5	5.03063E-3	9.37462E-2	2.74199E1	-3.26633E1	-3.26374E1	2.67968E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.98481E-1
1.3E1	6.0E0	1.0E0	5.25E2	3.53E2	-7.24736E-2	-8.8002E1	-8.10623E-4	-8.80001E1	1.19209E-4	5.34058E-3	9.35078E-2	2.73009E1	-3.26747E1	-3.2584E1	2.68058E1	1.20226E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9874E-1
1.4E1	3.067E3	1.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80019E1	-1.04904E-3	-8.8E1	2.14577E-4	4.86374E-3	9.34124E-2	2.71218E1	-3.26308E1	-3.26777E1	2.68262E1	1.20278E-7	2.51225E-3	2.51225E-3	6.30192E-3	2.9978E-1
1.5E1	4.2E1	0.0E0	6.06E2	4.11E2	-7.44059E-2	-8.80021E1	-4.29153E-4	-8.8E1	-4.76837E-5	4.79221E-3	9.37462E-2	2.73081E1	-3.26855E1	-3.26242E1	2.67986E1	1.19913E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01871E-1
1.6E1	2.35E2	0.0E0	6.47E2	4.41E2	-7.42513E-2	-8.8002E1	-8.82149E-4	-8.79998E1	2.6226E-4	5.4121E-3	9.35793E-2	2.73027E1	-3.26885E1	-3.26128E1	2.68136E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02922E-1
1.7E1	2.48E2	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80018E1	-8.10623E-4	-8.8E1	1.90735E-4	4.93526E-3	9.377E-2	2.72597E1	-3.26467E1	-3.26372E1	2.67764E1	1.19653E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9926E-1
1.8E1	1.167E3	1.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80019E1	-7.15256E-4	-8.80001E1	4.05312E-4	4.88758E-3	9.38177E-2	2.75118E1	-3.26753E1	-3.2635E1	2.67926E1	1.19705E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00824E-1
1.9E1	9.95E2	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80019E1	-7.15256E-4	-8.80002E1	1.43051E-4	4.673E-3	9.34362E-2	2.73429E1	-3.26723E1	-3.26512E1	2.6786E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00453E-1
2.0E1	2.2559E4	1.5E1	8.08E2	5.58E2	-7.40192E-2	-8.8002E1	-6.91414E-4	-8.80003E1	0.0E0	4.98295E-3	9.39131E-2	2.72642E1	-3.26554E1	-3.26308E1	2.67908E1	1.20122E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.00041E-1
2.1E1	6.4E1	0.0E0	8.49E2	5.88E2	-7.39421E-2	-8.80019E1	-1.04904E-3	-8.80004E1	1.19209E-4	5.03063E-3	9.35793E-2	2.73057E1	-3.26685E1	-3.26767E1	2.67688E1	1.20226E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.01085E-1
2.2E1	1.558E3	1.0E0	8.89E2	6.17E2	-7.286E-2	-8.80022E1	-6.19888E-4	-8.80001E1	3.33786E-4	5.17368E-3	9.3627E-2	2.71399E1	-3.26413E1	-3.27918E1	2.68136E1	1.20055E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00966E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.37103E-2	-8.80022E1	-7.62939E-4	-8.80003E1	-2.38419E-5	5.07832E-3	9.38416E-2	2.73237E1	-3.26645E1	-3.25996E1	2.68064E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9841E-1