[Scan]
initial_time=2016-01-27T21:18:40
final_time=2016-01-27T21:18:59
ip_count=19
run=1025
dataset=3
scan=216
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.79007E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-6.2356E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=3.81541E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.63087E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=8.31664E-10
mult1=-1.68684E-8
mult2=-2.76452E-9
rf_tmon=-5.3656E-3
rf_agc=3.41868E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=4.13704E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66739E0
bslens_imon=2.73439E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=1.98864E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.04994E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53845E1
cs_ef1b_imon=2.78016E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02231E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04829E1
cs_ea1_imon=2.57299E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01649E0
lens1_imon=1.33986E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.97838E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.52179E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83998E1
cs_ef1a_imon=2.8872E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=4.179E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=2.89296E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15376E1
os_ea1_imon=1.88068E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63894E1
os_ef1bup_imon=3.09406E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23086E0
cs_ionrep_imon=1.1951E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93558E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01707E1
cs_anode1_imon=2.91026E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=7.82216E-10
tplens_vset=1.4E-1
tplens_vmon=1.66326E0
tplens_imon=-2.49335E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26206E1
iondef3_imon=1.50055E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26597E1
iondef2_imon=1.57028E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0291E2
lens6_imon=2.98399E-4
ql6_vset=1.0E-1
ql6_vmon=9.38892E-2
ql6_imon=4.29606E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27923E0
ionrepsh_imon=1.73911E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3354E1
lens5b_imon=2.18578E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.14091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.42777E-1
os_ea2_imon=-5.50185E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00517E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.20362E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64981E0
os_ef2alow_imon=-2.71681E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87813E-1
os_ef2bup_imon=-5.4378E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10859E1
os_restr2_imon=2.87062E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2302E2
cs_ionfoca_imon=6.30105E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.23452E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73604E1
iondef1_imon=1.11051E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68274E1
iondef4_imon=1.10107E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.98284E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=3.31151E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11573E0
cs_ionaccel_imon=-1.83744E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47262E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56483E1
einzel_imon=7.87525E-6
window_vset=0.0E0
window_vmon=1.81303E-1
window_imon=-1.09863E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82586E2
mask1_imon=2.39019E-4
mask2_vset=0.0E0
mask2_vmon=-1.86861E1
mask2_imon=-3.85044E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.32146E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.61004E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.07016E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.50156E0
defgridb_imon=6.03665E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33889E1
os_fil1_imon=5.49101E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.18487E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62333E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3059E1
cs_fil1_imon=9.95687E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63441E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62557E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18031E-2
os_fil2_imon=-2.55785E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.63806E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.34521E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-1.89712E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21571E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.578E-1
res40_imon=-2.66275E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=227
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.406E3	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80021E1	-1.21593E-3	-8.80004E1	9.53674E-5	4.81606E-3	9.3627E-2	2.71942E1	-3.26549E1	-3.26402E1	2.67908E1	1.19749E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.01223E-1
2.0E0	9.5888E4	8.5E1	3.16E2	1.6E2	-7.35556E-2	-8.80021E1	-9.05991E-4	-8.80002E1	-7.15256E-5	4.64916E-3	9.377E-2	2.74116E1	-3.26438E1	-3.26682E1	2.67982E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.99175E-1
3.0E0	1.8E1	1.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80023E1	-7.15256E-4	-8.8E1	-1.43051E-4	4.8399E-3	9.39131E-2	2.72672E1	-3.26563E1	-3.26134E1	2.68185E1	1.20208E-7	2.52066E-3	2.52066E-3	6.3131E-3	2.989E-1
4.0E0	2.0262E4	1.4E1	6.55E2	3.98E2	-7.24736E-2	-8.80027E1	-6.19888E-4	-8.80003E1	9.53674E-5	5.24521E-3	9.39369E-2	2.74163E1	-3.26611E1	-3.26498E1	2.68177E1	1.19851E-7	2.51694E-3	2.51694E-3	6.31234E-3	2.99728E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80024E1	-4.29153E-4	-8.80003E1	-1.19209E-4	4.673E-3	9.3627E-2	2.72907E1	-3.26663E1	-3.26284E1	2.68034E1	1.1992E-7	2.51829E-3	2.51829E-3	6.32555E-3	3.00888E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80024E1	-4.29153E-4	-8.8E1	4.76837E-5	4.64916E-3	9.36985E-2	2.72432E1	-3.2653E1	-3.26314E1	2.67998E1	1.20069E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80023E1	-8.10623E-4	-8.80002E1	4.76837E-5	4.8399E-3	9.36031E-2	2.7403E1	-3.26561E1	-3.26242E1	2.6819E1	1.19965E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80023E1	-7.15256E-4	-8.79996E1	1.90735E-4	4.72069E-3	9.36747E-2	2.71382E1	-3.26573E1	-3.26213E1	2.68146E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9926E-1
1.2E1	4.5E1	0.0E0	4.85E2	3.23E2	-7.15461E-2	-8.80022E1	-5.24521E-4	-8.79997E1	-2.38419E-5	4.673E-3	9.38892E-2	2.72402E1	-3.26909E1	-3.25816E1	2.68124E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.9943E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80021E1	-3.8147E-4	-8.8E1	0.0E0	4.69685E-3	9.33886E-2	2.72666E1	-3.26939E1	-3.2599E1	2.67872E1	1.19809E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00563E-1
1.4E1	3.162E3	3.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80024E1	-1.43051E-4	-8.80001E1	3.09944E-4	4.48227E-3	9.36747E-2	2.73219E1	-3.26386E1	-3.26152E1	2.67926E1	1.19809E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.02396E-1
1.5E1	5.0E1	0.0E0	6.06E2	4.11E2	-7.17007E-2	-8.80022E1	-3.33786E-4	-8.8E1	2.14577E-4	4.91142E-3	9.37462E-2	2.73646E1	-3.26651E1	-3.26392E1	2.67842E1	1.20122E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00563E-1
1.6E1	2.41E2	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80021E1	-5.24521E-4	-8.80002E1	5.48363E-4	4.93526E-3	9.37223E-2	2.72318E1	-3.26771E1	-3.2644E1	2.68046E1	1.19757E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.99E-1
1.7E1	2.87E2	0.0E0	6.87E2	4.7E2	-7.17007E-2	-8.80025E1	-9.53674E-4	-8.79999E1	4.05312E-4	4.57764E-3	9.38654E-2	2.74384E1	-3.26744E1	-3.2626E1	2.6813E1	1.20226E-7	2.52209E-3	2.52209E-3	6.30192E-3	2.99E-1
1.8E1	1.152E3	0.0E0	7.27E2	5.0E2	-7.13915E-2	-8.80024E1	-8.10623E-4	-8.80003E1	4.05312E-4	4.98295E-3	9.36985E-2	2.72673E1	-3.26579E1	-3.26307E1	2.68151E1	1.20055E-7	2.51203E-3	2.51203E-3	6.32356E-3	2.99941E-1
1.9E1	1.009E3	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80022E1	-7.15256E-4	-8.80001E1	3.33786E-4	4.98295E-3	9.39369E-2	2.72378E1	-3.26434E1	-3.26416E1	2.67974E1	1.19902E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.00197E-1
2.0E1	2.2572E4	2.0E1	8.08E2	5.58E2	-7.13143E-2	-8.80021E1	-5.72205E-4	-8.80003E1	1.19209E-4	4.36306E-3	9.38416E-2	2.74054E1	-3.26753E1	-3.2632E1	2.68088E1	1.19809E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01871E-1
2.1E1	5.2E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80021E1	-5.48363E-4	-8.80001E1	2.38419E-5	4.62532E-3	9.377E-2	2.72013E1	-3.26685E1	-3.26189E1	2.67884E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.97704E-1
2.2E1	1.632E3	1.0E0	8.89E2	6.17E2	-7.30918E-2	-8.8002E1	-6.91414E-4	-8.80002E1	4.05312E-4	4.64916E-3	9.38654E-2	2.72829E1	-3.26585E1	-3.28051E1	2.67932E1	1.20158E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.9841E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.8002E1	-8.82149E-4	-8.80001E1	2.6226E-4	4.8399E-3	9.38892E-2	2.73604E1	-3.26597E1	-3.26206E1	2.68274E1	1.20017E-7	2.52209E-3	2.52209E-3	6.29098E-3	3.01085E-1