[Scan]
initial_time=2016-01-27T21:19:06
final_time=2016-01-27T21:19:26
ip_count=19
run=1025
dataset=3
scan=217
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.15461E-2
qbias_imon=-3.75143E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-6.38914E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=4.15277E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.7136E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=8.6695E-10
mult1=-1.32562E-8
mult2=-2.76452E-9
rf_tmon=-4.58452E-3
rf_agc=3.32014E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=4.31871E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67565E0
bslens_imon=2.74146E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20043E1
lens5a_imon=1.98828E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05079E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5349E1
cs_ef1b_imon=2.77583E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04587E2
lens23_imon=1.02202E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04646E1
cs_ea1_imon=2.55813E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03242E0
lens1_imon=1.42127E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6447E1
os_ef1alow_imon=3.00144E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04156E1
cs_ea2_imon=1.52427E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=2.90594E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=4.32515E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11177E1
os_restr1_imon=2.88503E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15164E1
os_ea1_imon=1.89767E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23027E0
cs_ionrep_imon=1.20395E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93491E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=2.92179E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=8.5597E-10
tplens_vset=1.4E-1
tplens_vmon=1.62963E0
tplens_imon=-1.50232E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26458E1
iondef3_imon=1.48816E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26428E1
iondef2_imon=1.577E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98296E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=4.19998E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28867E0
ionrepsh_imon=1.75822E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33799E1
lens5b_imon=2.18791E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.13875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.65193E-1
os_ea2_imon=-4.40464E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00471E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71065E1
cs_ef2a_imon=3.18741E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6354E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.34354E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10829E1
os_restr2_imon=2.87314E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.29999E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01893E1
cs_anode2_imon=2.24857E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73393E1
iondef1_imon=1.10343E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67992E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.06697E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=3.70228E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13615E0
cs_ionaccel_imon=-1.66085E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02139E2
cs_ionfocb_imon=1.47381E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.71307E-6
window_vset=0.0E0
window_vmon=2.53983E-1
window_imon=-9.94115E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39149E-4
mask2_vset=0.0E0
mask2_vmon=-1.86698E1
mask2_imon=-7.09401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92591E3
multa_neg_imon=8.03642E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.50386E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.22944E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.62558E0
defgridb_imon=6.19947E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33922E1
os_fil1_imon=4.83629E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.68342E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62173E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30627E1
cs_fil1_imon=9.9669E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63777E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62347E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.117E-2
os_fil2_imon=-2.25151E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.89945E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.43E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29911E-1
cs_fil2_imon=-2.41369E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.27437E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21471E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.70104E-1
res40_imon=-2.37443E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.407E3	2.0E0	1.47E2	4.1E1	-7.26282E-2	-8.80024E1	-6.19888E-4	-8.8E1	-4.76837E-5	4.74453E-3	9.39608E-2	2.73823E1	-3.26534E1	-3.26154E1	2.68183E1	1.20122E-7	2.51443E-3	2.51443E-3	6.34037E-3	2.9978E-1
2.0E0	9.5856E4	8.7E1	3.16E2	1.6E2	-7.26282E-2	-8.80019E1	-1.04904E-3	-8.80002E1	9.53674E-5	4.79221E-3	9.35316E-2	2.71905E1	-3.26856E1	-3.26174E1	2.68088E1	1.20146E-7	2.51723E-3	2.51723E-3	6.32247E-3	3.01489E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.8002E1	-1.07288E-3	-8.80002E1	2.86102E-4	4.98295E-3	9.38654E-2	2.74266E1	-3.26614E1	-3.26425E1	2.67758E1	1.1992E-7	2.51829E-3	2.51829E-3	6.33767E-3	3.01753E-1
4.0E0	2.0396E4	1.3E1	6.55E2	3.98E2	-7.33239E-2	-8.8002E1	-1.04904E-3	-8.80002E1	4.29153E-4	4.673E-3	9.38416E-2	2.72168E1	-3.26651E1	-3.26452E1	2.6798E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80023E1	-8.58307E-4	-8.80003E1	4.52995E-4	4.69685E-3	9.37462E-2	2.72473E1	-3.26472E1	-3.26284E1	2.67845E1	1.20122E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80021E1	-9.53674E-4	-8.8E1	2.38419E-4	5.03063E-3	9.36031E-2	2.74018E1	-3.26615E1	-3.26086E1	2.68118E1	1.20311E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.02511E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80021E1	-1.0252E-3	-8.80002E1	5.48363E-4	4.72069E-3	9.33886E-2	2.7288E1	-3.26602E1	-3.25924E1	2.68022E1	1.20069E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.02133E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80023E1	-5.48363E-4	-8.80001E1	4.76837E-4	4.98295E-3	9.3627E-2	2.72372E1	-3.26765E1	-3.26254E1	2.6816E1	1.20106E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.00966E-1
1.2E1	5.0E1	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80022E1	-8.34465E-4	-8.80002E1	5.72205E-4	4.95911E-3	9.34601E-2	2.72053E1	-3.26707E1	-3.2615E1	2.68124E1	1.19965E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.02133E-1
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80021E1	-7.39098E-4	-8.80001E1	3.33786E-4	4.88758E-3	9.3627E-2	2.73517E1	-3.26785E1	-3.26472E1	2.68238E1	1.19713E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.0201E-1
1.4E1	3.094E3	1.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80023E1	-1.0252E-3	-8.79999E1	3.57628E-4	4.81606E-3	9.35793E-2	2.73016E1	-3.26313E1	-3.26148E1	2.68001E1	1.20363E-7	2.52707E-3	2.52707E-3	6.32356E-3	2.99941E-1
1.5E1	3.8E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80023E1	-7.86781E-4	-8.80002E1	2.6226E-4	5.126E-3	9.38892E-2	2.7242E1	-3.26891E1	-3.2614E1	2.68338E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.97901E-1
1.6E1	2.35E2	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80026E1	-7.62939E-4	-8.80001E1	7.15256E-4	4.64916E-3	9.36985E-2	2.74563E1	-3.26712E1	-3.26243E1	2.67886E1	1.19601E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.98222E-1
1.7E1	3.08E2	0.0E0	6.87E2	4.7E2	-7.26282E-2	-8.80021E1	-8.82149E-4	-8.80004E1	8.34465E-4	4.98295E-3	9.38416E-2	2.72336E1	-3.26777E1	-3.25978E1	2.68126E1	1.19941E-7	2.52131E-3	2.52131E-3	6.33919E-3	2.98592E-1
1.8E1	1.171E3	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80021E1	-3.33786E-4	-8.80001E1	2.86102E-4	4.93526E-3	9.39369E-2	2.7364E1	-3.26633E1	-3.26056E1	2.68065E1	1.2033E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00041E-1
1.9E1	9.96E2	0.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80021E1	-2.86102E-4	-8.80004E1	3.09944E-4	4.55379E-3	9.37223E-2	2.72721E1	-3.26685E1	-3.26248E1	2.68028E1	1.19965E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01347E-1
2.0E1	2.2298E4	1.5E1	8.08E2	5.58E2	-7.16233E-2	-8.80023E1	-6.19888E-4	-8.80002E1	1.90735E-4	4.55379E-3	9.34601E-2	2.72588E1	-3.26452E1	-3.2629E1	2.681E1	1.2026E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.02511E-1
2.1E1	3.8E1	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80018E1	-4.05312E-4	-8.80001E1	4.52995E-4	4.3869E-3	9.37462E-2	2.73021E1	-3.26478E1	-3.26596E1	2.67972E1	1.19809E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.98481E-1
2.2E1	1.535E3	0.0E0	8.89E2	6.17E2	-7.16233E-2	-8.80022E1	-4.29153E-4	-8.80003E1	4.05312E-4	4.50611E-3	9.36747E-2	2.73995E1	-3.27257E1	-3.26437E1	2.67854E1	1.19646E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.98156E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.15461E-2	-8.80023E1	-6.19888E-4	-8.79999E1	7.15256E-5	4.81606E-3	9.38654E-2	2.73393E1	-3.26428E1	-3.26458E1	2.67992E1	1.20055E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.9943E-1