[Scan]
initial_time=2016-01-27T21:19:33
final_time=2016-01-27T21:19:52
ip_count=19
run=1025
dataset=3
scan=218
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.7535E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-6.91092E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=4.10497E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.80641E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=8.29029E-10
mult1=-2.07335E-8
mult2=-2.78648E-9
rf_tmon=-4.54247E-3
rf_agc=3.33636E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=4.27401E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66734E0
bslens_imon=2.72521E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19544E1
lens5a_imon=1.99929E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.05096E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53772E1
cs_ef1b_imon=2.77619E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04904E1
cs_ea1_imon=2.57825E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00711E0
lens1_imon=1.39498E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.9845E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03949E1
cs_ea2_imon=1.5393E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=2.89332E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=4.21917E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=2.88215E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15354E1
os_ea1_imon=1.89908E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.09262E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22867E0
cs_ionrep_imon=1.2026E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=2.89801E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=7.98583E-10
tplens_vset=1.4E-1
tplens_vmon=1.64444E0
tplens_imon=-2.52482E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26506E1
iondef3_imon=1.49676E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26669E1
iondef2_imon=1.57319E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02915E2
lens6_imon=2.98483E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=4.19509E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29235E0
ionrepsh_imon=1.76822E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33862E1
lens5b_imon=2.17125E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74327E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.65542E-1
os_ea2_imon=-4.47149E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.19353E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6402E0
os_ef2alow_imon=-2.46814E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.22942E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10769E1
os_restr2_imon=2.86305E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.30757E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.2374E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7412E1
iondef1_imon=1.09301E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67956E1
iondef4_imon=1.10215E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.05041E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=3.43013E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14876E0
cs_ionaccel_imon=-1.75816E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02015E2
cs_ionfocb_imon=1.47154E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=7.79236E-6
window_vset=0.0E0
window_vmon=1.65686E-1
window_imon=-9.86907E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39001E-4
mask2_vset=0.0E0
mask2_vmon=-1.86644E1
mask2_imon=-5.29203E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.45491E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.76276E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.26745E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.55772E0
defgridb_imon=6.16073E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33956E1
os_fil1_imon=4.92038E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.20289E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6217E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30672E1
cs_fil1_imon=9.95987E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63934E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62522E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.20869E-2
os_fil2_imon=-2.4257E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.83939E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.16112E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.325E-1
cs_fil2_imon=-2.38366E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20229E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21537E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19705E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=5.06454E-1
res40_imon=-2.56184E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.439E3	1.0E0	1.47E2	4.1E1	-7.201E-2	-8.80021E1	-5.00679E-4	-8.79998E1	-1.19209E-4	4.8399E-3	9.36985E-2	2.73387E1	-3.26644E1	-3.26119E1	2.67694E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00302E-1
2.0E0	9.5103E4	9.9E1	3.16E2	1.6E2	-7.16233E-2	-8.80023E1	-2.86102E-4	-8.79999E1	2.86102E-4	4.95911E-3	9.33647E-2	2.73345E1	-3.26789E1	-3.26128E1	2.68174E1	1.19749E-7	2.51203E-3	2.51203E-3	6.32896E-3	3.0071E-1
3.0E0	1.4E1	1.0E0	4.85E2	2.79E2	-7.13915E-2	-8.80022E1	-2.38419E-4	-8.80002E1	2.14577E-4	4.79221E-3	9.38416E-2	2.72779E1	-3.26625E1	-3.26376E1	2.68019E1	1.19809E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9952E-1
4.0E0	2.0408E4	1.1E1	6.55E2	3.98E2	-7.13143E-2	-8.80018E1	-4.29153E-4	-8.8E1	2.38419E-4	4.673E-3	9.37939E-2	2.73321E1	-3.26843E1	-3.2608E1	2.681E1	1.19991E-7	2.51709E-3	2.51709E-3	6.31798E-3	2.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17007E-2	-8.80022E1	-5.96046E-4	-8.79999E1	2.38419E-4	4.93526E-3	9.38416E-2	2.72985E1	-3.26579E1	-3.2614E1	2.68046E1	1.20383E-7	2.52428E-3	2.52428E-3	6.29645E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.12368E-2	-8.80023E1	-3.57628E-4	-8.79999E1	3.09944E-4	5.05447E-3	9.38654E-2	2.72763E1	-3.26506E1	-3.25767E1	2.68052E1	1.19757E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.09279E-2	-8.80021E1	-6.91414E-4	-8.79998E1	6.4373E-4	4.76837E-3	9.39369E-2	2.73454E1	-3.26609E1	-3.26278E1	2.67836E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80021E1	-4.52995E-4	-8.80002E1	4.05312E-4	4.98295E-3	9.39131E-2	2.72979E1	-3.26416E1	-3.2623E1	2.67992E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
1.2E1	5.0E1	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80021E1	-8.58307E-4	-8.80002E1	7.15256E-5	4.45843E-3	9.36747E-2	2.73021E1	-3.26482E1	-3.2599E1	2.681E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00563E-1
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.8002E1	-5.48363E-4	-8.80003E1	4.29153E-4	4.76837E-3	9.37462E-2	2.72935E1	-3.26768E1	-3.26493E1	2.67914E1	1.20069E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.00824E-1
1.4E1	3.086E3	1.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80022E1	-8.10623E-4	-8.8E1	1.19209E-4	4.45843E-3	9.40561E-2	2.7285E1	-3.26708E1	-3.26172E1	2.68157E1	1.20031E-7	2.52139E-3	2.52139E-3	6.31299E-3	3.00676E-1
1.5E1	3.8E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80022E1	-5.48363E-4	-8.80003E1	-1.90735E-4	4.673E-3	9.37223E-2	2.73598E1	-3.26741E1	-3.26128E1	2.67908E1	1.2026E-7	2.52169E-3	2.52169E-3	6.29128E-3	2.99175E-1
1.6E1	2.42E2	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80021E1	-5.00679E-4	-8.79999E1	7.15256E-5	4.55379E-3	9.36985E-2	2.7227E1	-3.26621E1	-3.2629E1	2.67818E1	1.19965E-7	2.51334E-3	2.51334E-3	6.36244E-3	2.99E-1
1.7E1	2.89E2	0.0E0	6.87E2	4.7E2	-7.23189E-2	-8.8002E1	-7.86781E-4	-8.8E1	7.15256E-5	4.98295E-3	9.37223E-2	2.73594E1	-3.26649E1	-3.26537E1	2.68082E1	1.20174E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.99E-1
1.8E1	1.172E3	1.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80023E1	-6.91414E-4	-8.80001E1	4.05312E-4	4.98295E-3	9.39608E-2	2.72451E1	-3.26566E1	-3.26407E1	2.68214E1	1.2026E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99175E-1
1.9E1	9.6E2	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80026E1	-3.57628E-4	-8.79998E1	3.09944E-4	4.76837E-3	9.39608E-2	2.72799E1	-3.26669E1	-3.26152E1	2.67878E1	1.19978E-7	2.51581E-3	2.51581E-3	6.29624E-3	3.01742E-1
2.0E1	2.2472E4	1.3E1	8.08E2	5.58E2	-7.37874E-2	-8.80023E1	-3.8147E-4	-8.80001E1	1.43051E-4	4.48227E-3	9.408E-2	2.7393E1	-3.26697E1	-3.26225E1	2.67836E1	1.19861E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9978E-1
2.1E1	4.9E1	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.80023E1	-2.86102E-4	-8.80001E1	-2.38419E-5	4.8399E-3	9.3627E-2	2.7298E1	-3.26685E1	-3.26354E1	2.68053E1	1.20158E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.9892E-1
2.2E1	1.466E3	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80021E1	-7.86781E-4	-8.79999E1	9.53674E-5	4.64916E-3	9.37223E-2	2.73081E1	-3.26921E1	-3.25305E1	2.67938E1	1.20414E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.98665E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80022E1	-7.15256E-4	-8.79999E1	2.86102E-4	4.86374E-3	9.35316E-2	2.7412E1	-3.26669E1	-3.26506E1	2.67956E1	1.19705E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00563E-1