[Scan]
initial_time=2016-01-27T21:20:00
final_time=2016-01-27T21:20:19
ip_count=19
run=1025
dataset=3
scan=219
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.81965E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-5.8167E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=4.13728E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.70035E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=8.66878E-10
mult1=-1.7037E-8
mult2=-2.87231E-9
rf_tmon=-4.04378E-3
rf_agc=3.40666E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=4.15337E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62905E0
bslens_imon=2.51848E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19689E1
lens5a_imon=1.98934E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.04966E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5349E1
cs_ef1b_imon=2.77115E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02185E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04876E1
cs_ea1_imon=2.57335E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00293E0
lens1_imon=1.64071E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.9863E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03914E1
cs_ea2_imon=1.51365E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=2.91459E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=4.1188E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11009E1
os_restr1_imon=2.86269E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15199E1
os_ea1_imon=1.8913E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.10163E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=1.18696E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93569E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=2.9254E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=7.69997E-10
tplens_vset=1.4E-1
tplens_vmon=1.62846E0
tplens_imon=-3.05966E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.50338E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26386E1
iondef2_imon=1.57594E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98424E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=4.25279E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25446E0
ionrepsh_imon=1.74512E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33846E1
lens5b_imon=2.17446E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.13911E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.30979E-1
os_ea2_imon=-5.64343E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00548E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.19497E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64441E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40361E-1
os_ef2bup_imon=-5.17832E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10877E1
os_restr2_imon=2.86881E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.31486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.24965E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73466E1
iondef1_imon=1.10166E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67806E1
iondef4_imon=1.08485E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.05307E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=3.60131E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-1.48425E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02153E2
cs_ionfocb_imon=1.47215E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56099E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=1.8791E-1
window_imon=-9.97719E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39232E-4
mask2_vset=0.0E0
mask2_vmon=-1.8674E1
mask2_imon=-6.94985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.53736E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.75162E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.36393E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.53404E0
defgridb_imon=6.12514E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33911E1
os_fil1_imon=4.73418E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.8456E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62206E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30715E1
cs_fil1_imon=9.96179E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64006E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62421E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.2183E-2
os_fil2_imon=-2.39567E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.92058E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.2832E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.11937E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2155E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.20414E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.572E-1
res40_imon=-2.28073E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.349E3	3.0E0	1.47E2	4.1E1	-7.23189E-2	-8.80021E1	-9.53674E-4	-8.8E1	1.43051E-4	4.93526E-3	9.377E-2	2.73567E1	-3.26544E1	-3.2604E1	2.68105E1	1.19851E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.01738E-1
2.0E0	9.507E4	9.3E1	3.16E2	1.6E2	-7.23189E-2	-8.80017E1	-8.58307E-4	-8.79998E1	1.66893E-4	4.79221E-3	9.38892E-2	2.72913E1	-3.26753E1	-3.26518E1	2.68004E1	1.20127E-7	2.51783E-3	2.51783E-3	6.29703E-3	3.00741E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.8002E1	-8.34465E-4	-8.79999E1	2.14577E-4	4.48227E-3	9.39846E-2	2.72933E1	-3.2659E1	-3.26071E1	2.68134E1	1.20191E-7	2.5147E-3	2.5147E-3	6.3074E-3	2.99613E-1
4.0E0	2.0293E4	9.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80022E1	-8.10623E-4	-8.8E1	4.05312E-4	5.03063E-3	9.377E-2	2.73895E1	-3.26708E1	-3.26461E1	2.67866E1	1.19851E-7	2.51203E-3	2.51203E-3	6.31817E-3	2.9892E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80022E1	-9.05991E-4	-8.80001E1	3.57628E-4	4.88758E-3	9.41038E-2	2.71417E1	-3.2662E1	-3.26142E1	2.68169E1	1.20055E-7	2.52276E-3	2.52276E-3	6.33436E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80019E1	-1.0252E-3	-8.80001E1	2.14577E-4	4.76837E-3	9.37223E-2	2.73117E1	-3.26248E1	-3.26164E1	2.68094E1	1.198E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80021E1	-9.29832E-4	-8.79999E1	4.29153E-4	4.88758E-3	9.36031E-2	2.71778E1	-3.26768E1	-3.26193E1	2.68232E1	1.19861E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.02922E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80021E1	-1.0252E-3	-8.79999E1	3.09944E-4	4.88758E-3	9.36508E-2	2.73936E1	-3.27092E1	-3.25582E1	2.68151E1	1.19978E-7	2.51359E-3	2.51359E-3	6.31858E-3	3.00144E-1
1.2E1	4.4E1	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80022E1	-7.15256E-4	-8.80001E1	5.96046E-4	5.03063E-3	9.36747E-2	2.71453E1	-3.26633E1	-3.26512E1	2.68076E1	1.20004E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.01995E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80019E1	-5.72205E-4	-8.79999E1	1.43051E-4	4.79221E-3	9.36031E-2	2.73865E1	-3.26548E1	-3.26034E1	2.68132E1	1.19913E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.00302E-1
1.4E1	3.087E3	2.0E0	5.66E2	3.82E2	-7.17007E-2	-8.80018E1	-6.4373E-4	-8.79998E1	2.38419E-4	4.95911E-3	9.37223E-2	2.74102E1	-3.26591E1	-3.26675E1	2.6795E1	1.19978E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.00942E-1
1.5E1	4.0E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.8002E1	-7.39098E-4	-8.8E1	-7.15256E-5	4.72069E-3	9.36985E-2	2.72348E1	-3.26368E1	-3.2647E1	2.68268E1	1.20122E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.02922E-1
1.6E1	2.83E2	1.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80019E1	-6.91414E-4	-8.79999E1	1.90735E-4	4.52995E-3	9.39369E-2	2.73285E1	-3.26711E1	-3.2614E1	2.67884E1	1.20017E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.02396E-1
1.7E1	2.38E2	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80017E1	-8.10623E-4	-8.80001E1	3.8147E-4	4.88758E-3	9.38177E-2	2.71831E1	-3.26452E1	-3.26272E1	2.67842E1	1.19861E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00563E-1
1.8E1	1.116E3	0.0E0	7.27E2	5.0E2	-7.21643E-2	-8.8002E1	-1.07288E-3	-8.79999E1	4.76837E-5	4.72069E-3	9.36031E-2	2.74397E1	-3.26729E1	-3.26434E1	2.67956E1	1.19965E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00563E-1
1.9E1	9.69E2	0.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80018E1	-8.10623E-4	-8.8E1	6.4373E-4	4.8399E-3	9.36031E-2	2.72306E1	-3.26621E1	-3.26416E1	2.67788E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00563E-1
2.0E1	2.2423E4	9.0E0	8.08E2	5.58E2	-7.13143E-2	-8.80024E1	-9.05991E-4	-8.80001E1	3.09944E-4	4.8399E-3	9.36747E-2	2.73364E1	-3.26667E1	-3.26436E1	2.67995E1	1.19913E-7	2.51225E-3	2.51225E-3	6.34037E-3	3.00824E-1
2.1E1	5.6E1	0.0E0	8.49E2	5.88E2	-7.15461E-2	-8.80023E1	-9.29832E-4	-8.80003E1	2.14577E-4	4.88758E-3	9.37462E-2	2.7298E1	-3.26708E1	-3.26111E1	2.68011E1	1.20194E-7	2.51023E-3	2.51023E-3	6.33253E-3	3.02449E-1
2.2E1	1.616E3	0.0E0	8.89E2	6.17E2	-7.10825E-2	-8.80019E1	-8.82149E-4	-8.80004E1	2.38419E-4	4.8399E-3	9.36747E-2	2.72534E1	-3.26536E1	-3.26699E1	2.67932E1	1.19851E-7	2.51557E-3	2.51557E-3	6.31925E-3	3.01892E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80021E1	-7.15256E-4	-8.80003E1	2.38419E-4	4.69685E-3	9.36985E-2	2.73466E1	-3.26386E1	-3.26296E1	2.67806E1	1.20414E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.9943E-1