[Scan]
initial_time=2016-01-27T21:21:19
final_time=2016-01-27T21:21:39
ip_count=19
run=1025
dataset=3
scan=222
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.8804E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.12938E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=4.08435E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.70588E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=8.55803E-10
mult1=-2.36834E-8
mult2=-2.68069E-9
rf_tmon=-4.90296E-3
rf_agc=3.34537E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=4.05443E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66494E0
bslens_imon=2.53415E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20109E1
lens5a_imon=1.99821E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.05086E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54013E1
cs_ef1b_imon=2.74484E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02294E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=2.57645E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99269E0
lens1_imon=1.4815E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.98919E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03828E1
cs_ea2_imon=1.51118E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84478E1
cs_ef1a_imon=2.91206E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=3.99137E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11195E1
os_restr1_imon=2.88251E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=1.89295E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63305E1
os_ef1bup_imon=3.0746E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2545E0
cs_ionrep_imon=1.1871E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93344E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01683E1
cs_anode1_imon=2.8771E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=7.58827E-10
tplens_vset=1.4E-1
tplens_vmon=1.63783E0
tplens_imon=-1.22703E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26068E1
iondef3_imon=1.51587E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26807E1
iondef2_imon=1.56201E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02897E2
lens6_imon=2.98234E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=4.19843E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27313E0
ionrepsh_imon=1.73541E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3358E1
lens5b_imon=2.1954E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.13551E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.26489E-1
os_ea2_imon=-4.57964E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00601E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.18452E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62278E0
os_ef2alow_imon=-1.93475E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6679E-1
os_ef2bup_imon=-5.17471E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11045E1
os_restr2_imon=2.83746E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01521E1
cs_anode2_imon=2.24569E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7257E1
iondef1_imon=1.10202E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.11621E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=2.01035E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=3.25119E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12353E0
cs_ionaccel_imon=-2.18703E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02016E2
cs_ionfocb_imon=1.4705E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.6518E-6
window_vset=0.0E0
window_vmon=2.3296E-1
window_imon=-1.15269E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82601E2
mask1_imon=2.39398E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-4.89559E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=7.47654E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.67624E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50173E3
multb_neg_imon=7.61713E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.42538E0
defgridb_imon=6.16073E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3389E1
os_fil1_imon=4.00137E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.13682E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61981E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30637E1
cs_fil1_imon=9.97747E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64072E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62122E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16999E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.35886E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.07992E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28487E-1
cs_fil2_imon=-2.38366E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34044E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21576E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.20311E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40083E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.27167E-1
res40_imon=-2.39606E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.348E3	4.0E0	1.47E2	4.1E1	-7.37103E-2	-8.80023E1	-4.29153E-4	-8.8E1	4.76837E-5	4.52995E-3	9.37223E-2	2.73532E1	-3.26567E1	-3.26301E1	2.67972E1					
2.0E0	9.4792E4	9.1E1	3.16E2	1.6E2	-7.37103E-2	-8.80021E1	-4.29153E-4	-8.80001E1	3.09944E-4	4.48227E-3	9.377E-2	2.72446E1	-3.26491E1	-3.26454E1	2.67726E1	1.20042E-7	2.51919E-3	2.51919E-3	6.3074E-3	3.01609E-1
3.0E0	1.5E1	1.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80022E1	-5.96046E-4	-8.80003E1	3.33786E-4	4.55379E-3	9.38892E-2	2.73611E1	-3.26608E1	-3.26402E1	2.67862E1	1.201E-7	2.51838E-3	2.51838E-3	6.30171E-3	2.9863E-1
4.0E0	2.0642E4	9.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80018E1	-8.58307E-4	-8.80002E1	1.43051E-4	4.45843E-3	9.38177E-2	2.73611E1	-3.26337E1	-3.26585E1	2.68214E1	1.19891E-7	2.52236E-3	2.52236E-3	6.3074E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40967E-2	-8.80024E1	-8.82149E-4	-8.80004E1	0.0E0	4.43459E-3	9.408E-2	2.73045E1	-3.26502E1	-3.26189E1	2.68018E1	1.198E-7	2.52061E-3	2.52061E-3	6.29665E-3	2.9841E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40967E-2	-8.8002E1	-4.52995E-4	-8.80002E1	-4.76837E-5	4.48227E-3	9.39608E-2	2.72895E1	-3.26603E1	-3.25882E1	2.6795E1	1.20122E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.80022E1	-6.91414E-4	-8.8E1	0.0E0	4.60148E-3	9.38177E-2	2.72823E1	-3.26585E1	-3.26026E1	2.68052E1	1.20209E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.0071E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.41738E-2	-8.80021E1	-8.34465E-4	-8.8E1	1.43051E-4	4.48227E-3	9.36747E-2	2.74002E1	-3.26647E1	-3.26192E1	2.68053E1	1.20383E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02659E-1
1.2E1	4.0E1	0.0E0	4.85E2	3.23E2	-7.36328E-2	-8.80021E1	-4.05312E-4	-8.79999E1	1.90735E-4	4.74453E-3	9.38416E-2	2.71909E1	-3.26435E1	-3.26166E1	2.68094E1	1.20243E-7	2.51077E-3	2.51077E-3	6.30212E-3	3.02115E-1
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80021E1	-3.09944E-4	-8.80004E1	7.15256E-5	4.93526E-3	9.33886E-2	2.7385E1	-3.26927E1	-3.26422E1	2.68148E1	1.19991E-7	2.51725E-3	2.51725E-3	6.31879E-3	3.00522E-1
1.4E1	3.189E3	3.0E0	5.66E2	3.82E2	-7.17779E-2	-8.80023E1	-3.33786E-4	-8.80003E1	2.38419E-5	4.64916E-3	9.38416E-2	2.7114E1	-3.26392E1	-3.2587E1	2.68064E1	1.19913E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00824E-1
1.5E1	3.2E1	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80021E1	-3.09944E-4	-8.79999E1	1.66893E-4	4.43459E-3	9.35316E-2	2.70521E1	-3.26428E1	-3.2599E1	2.68118E1	1.20174E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01347E-1
1.6E1	2.66E2	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80023E1	-1.19209E-4	-8.80002E1	1.66893E-4	4.69685E-3	9.35555E-2	2.71196E1	-3.26719E1	-3.25856E1	2.68106E1	1.20069E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9874E-1
1.7E1	2.59E2	1.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80021E1	-5.72205E-4	-8.80004E1	7.15256E-5	4.88758E-3	9.377E-2	2.73952E1	-3.26663E1	-3.26524E1	2.67818E1	1.20122E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.98222E-1
1.8E1	1.17E3	0.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80023E1	-5.72205E-4	-8.80003E1	2.38419E-5	4.74453E-3	9.36747E-2	2.73231E1	-3.26561E1	-3.26092E1	2.6807E1	1.19925E-7	2.5147E-3	2.5147E-3	6.31299E-3	3.01742E-1
1.9E1	9.61E2	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80018E1	-8.82149E-4	-8.80003E1	7.15256E-5	4.64916E-3	9.35793E-2	2.7203E1	-3.26224E1	-3.26512E1	2.68046E1	1.20122E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00041E-1
2.0E1	2.2598E4	1.1E1	8.08E2	5.58E2	-7.22418E-2	-8.8002E1	-5.96046E-4	-8.79999E1	2.38419E-4	4.81606E-3	9.34601E-2	2.71275E1	-3.26773E1	-3.26095E1	2.68058E1	1.20055E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.03286E-1
2.1E1	4.7E1	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80022E1	-6.4373E-4	-8.79999E1	-2.38419E-5	4.41074E-3	9.36747E-2	2.7308E1	-3.26797E1	-3.26254E1	2.68319E1	1.20069E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00563E-1
2.2E1	1.625E3	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.8002E1	-4.29153E-4	-8.8E1	3.8147E-4	4.55379E-3	9.37223E-2	2.72803E1	-3.26242E1	-3.26325E1	2.68076E1	1.20466E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.9892E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80021E1	-5.72205E-4	-8.80001E1	7.15256E-5	4.72069E-3	9.34601E-2	2.7257E1	-3.26807E1	-3.26068E1	2.67926E1	1.20311E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.98665E-1