[Scan]
initial_time=2016-01-27T21:22:13
final_time=2016-01-27T21:22:32
ip_count=19
run=1025
dataset=3
scan=224
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.79743E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.30856E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=4.13787E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.70251E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=8.57818E-10
mult1=-1.9465E-8
mult2=-2.77225E-9
rf_tmon=-3.50074E-3
rf_agc=3.34271E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=4.35889E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66614E0
bslens_imon=2.58462E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20199E1
lens5a_imon=1.98812E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.05212E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=2.76214E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02308E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04934E1
cs_ea1_imon=2.58762E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02513E0
lens1_imon=1.56441E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64584E1
os_ef1alow_imon=2.98522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0378E1
cs_ea2_imon=1.53606E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84484E1
cs_ef1a_imon=2.90413E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=4.21941E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=2.86918E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15276E1
os_ea1_imon=1.88574E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63461E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24068E0
cs_ionrep_imon=1.17268E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93611E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01581E1
cs_anode1_imon=2.91891E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=8.07381E-10
tplens_vset=1.4E-1
tplens_vmon=1.62161E0
tplens_imon=-1.73173E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26349E1
iondef3_imon=1.50614E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26691E1
iondef2_imon=1.60203E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.98367E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=4.13322E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24669E0
ionrepsh_imon=1.74731E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33736E1
lens5b_imon=2.18315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.13046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.34299E-1
os_ea2_imon=-5.04828E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00533E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.19461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6336E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4817E-1
os_ef2bup_imon=-5.27923E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=2.87422E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.31154E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.25218E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7301E1
iondef1_imon=1.09733E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68012E1
iondef4_imon=1.07512E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.08025E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=3.84295E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10611E0
cs_ionaccel_imon=-1.72212E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02053E2
cs_ionfocb_imon=1.47194E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.80677E-6
window_vset=0.0E0
window_vmon=1.71092E-1
window_imon=-1.06619E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39336E-4
mask2_vset=0.0E0
mask2_vmon=-1.86855E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92681E3
multa_neg_imon=7.12325E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.52123E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=7.39362E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.46448E0
defgridb_imon=6.03095E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33904E1
os_fil1_imon=4.90236E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.59332E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62111E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30644E1
cs_fil1_imon=9.95513E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63243E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62485E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.19579E-2
os_fil2_imon=-2.40168E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.41892E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.57746E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04612E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21573E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31009E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.2003E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.54487E-1
res40_imon=-2.36723E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.404E3	0.0E0	1.47E2	4.1E1	-7.286E-2	-8.80018E1	-9.29832E-4	-8.79997E1	3.09944E-4	4.62532E-3	9.36985E-2	2.73039E1	-3.2666E1	-3.26614E1	2.67902E1	1.20278E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9926E-1
2.0E0	9.5385E4	9.4E1	3.16E2	1.6E2	-7.22418E-2	-8.80018E1	-1.07288E-3	-8.79999E1	2.6226E-4	4.41074E-3	9.36747E-2	2.73126E1	-3.26803E1	-3.2606E1	2.68088E1	1.19953E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.9892E-1
3.0E0	1.5E1	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80018E1	-4.52995E-4	-8.80001E1	2.38419E-5	4.62532E-3	9.36747E-2	2.73524E1	-3.26772E1	-3.26288E1	2.68055E1	1.19991E-7	2.51725E-3	2.51725E-3	6.33021E-3	3.00522E-1
4.0E0	2.0254E4	9.0E0	6.55E2	3.98E2	-7.14689E-2	-8.80021E1	-6.67572E-4	-8.80002E1	-2.38419E-5	4.60148E-3	9.34362E-2	2.73778E1	-3.26474E1	-3.26442E1	2.68134E1	1.20338E-7	2.52224E-3	2.52224E-3	6.31744E-3	3.0101E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.16233E-2	-8.80018E1	-6.91414E-4	-8.80002E1	5.24521E-4	4.86374E-3	9.3317E-2	2.73086E1	-3.26496E1	-3.24862E1	2.67872E1	1.2006E-7	2.51758E-3	2.51758E-3	6.3016E-3	2.98985E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.8002E1	-6.67572E-4	-8.8E1	2.6226E-4	4.673E-3	9.35555E-2	2.7236E1	-3.26567E1	-3.26098E1	2.67878E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.8002E1	-6.19888E-4	-8.80002E1	3.57628E-4	4.72069E-3	9.33647E-2	2.74461E1	-3.2659E1	-3.25912E1	2.68186E1	1.20226E-7	2.52647E-3	2.52647E-3	6.3074E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17007E-2	-8.80021E1	-7.62939E-4	-8.80003E1	4.29153E-4	4.52995E-3	9.3627E-2	2.72603E1	-3.26396E1	-3.26201E1	2.681E1	1.20158E-7	2.52169E-3	2.52169E-3	6.28592E-3	3.03027E-1
1.2E1	4.7E1	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80021E1	-9.05991E-4	-8.8E1	3.57628E-4	4.50611E-3	9.34839E-2	2.73327E1	-3.26404E1	-3.25918E1	2.68262E1	1.19953E-7	2.51632E-3	2.51632E-3	6.28592E-3	2.99175E-1
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.8002E1	-9.05991E-4	-8.80003E1	1.19209E-4	4.86374E-3	9.36747E-2	2.72437E1	-3.26697E1	-3.26337E1	2.68215E1	1.20158E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99941E-1
1.4E1	2.99E3	1.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80021E1	-1.00136E-3	-8.79998E1	3.09944E-4	4.76837E-3	9.37939E-2	2.74583E1	-3.25954E1	-3.26386E1	2.68088E1	1.20226E-7	2.52647E-3	2.52647E-3	6.31288E-3	2.98481E-1
1.5E1	4.4E1	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80018E1	-9.29832E-4	-8.79997E1	-2.38419E-5	4.57764E-3	9.34124E-2	2.72222E1	-3.26116E1	-3.2641E1	2.68244E1	1.19861E-7	2.52428E-3	2.52428E-3	6.32936E-3	2.99E-1
1.6E1	2.23E2	0.0E0	6.47E2	4.41E2	-7.40967E-2	-8.80021E1	-1.12057E-3	-8.80003E1	2.14577E-4	4.48227E-3	9.35078E-2	2.7367E1	-3.26765E1	-3.2608E1	2.68244E1	1.19913E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00824E-1
1.7E1	2.87E2	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80025E1	-6.19888E-4	-8.80003E1	4.05312E-4	4.86374E-3	9.36985E-2	2.7254E1	-3.26567E1	-3.26206E1	2.68082E1	1.19749E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99175E-1
1.8E1	1.161E3	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80025E1	-3.8147E-4	-8.79999E1	5.96046E-4	4.673E-3	9.39131E-2	2.74437E1	-3.26455E1	-3.26396E1	2.68022E1	1.19861E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.01609E-1
1.9E1	1.007E3	1.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80023E1	-4.05312E-4	-8.8E1	1.19209E-4	4.95911E-3	9.40084E-2	2.72456E1	-3.26657E1	-3.26128E1	2.67793E1	1.20122E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.02133E-1
2.0E1	2.2421E4	1.2E1	8.08E2	5.58E2	-7.32464E-2	-8.80022E1	-7.39098E-4	-8.79998E1	2.86102E-4	5.05447E-3	9.377E-2	2.72532E1	-3.26655E1	-3.26337E1	2.68017E1	1.20106E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.00966E-1
2.1E1	4.6E1	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.8002E1	-6.91414E-4	-8.80001E1	3.09944E-4	5.05447E-3	9.3627E-2	2.74077E1	-3.26838E1	-3.26124E1	2.68815E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.01223E-1
2.2E1	1.588E3	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80022E1	-5.96046E-4	-8.80002E1	3.09944E-4	4.98295E-3	9.35793E-2	2.73778E1	-3.26579E1	-3.2629E1	2.68761E1	1.20278E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80021E1	-7.62939E-4	-8.80002E1	3.57628E-4	4.79221E-3	9.36508E-2	2.7301E1	-3.26691E1	-3.26349E1	2.68012E1	1.2003E-7	2.51525E-3	2.51525E-3	6.31009E-3	3.00197E-1