[Scan]
initial_time=2016-01-27T21:22:39
final_time=2016-01-27T21:22:59
ip_count=19
run=1025
dataset=3
scan=225
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.77522E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.29044E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=3.98505E-10
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-1.58467E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=8.59535E-10
mult1=-1.65313E-8
mult2=-2.69266E-9
rf_tmon=-3.89357E-3
rf_agc=3.47335E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=4.10724E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62921E0
bslens_imon=2.52423E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19764E1
lens5a_imon=1.97975E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.05229E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5332E1
cs_ef1b_imon=2.75906E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02138E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04994E1
cs_ea1_imon=2.57383E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03018E0
lens1_imon=1.49875E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65564E1
os_ef1alow_imon=2.99399E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04003E1
cs_ea2_imon=1.54592E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83189E1
cs_ef1a_imon=2.90016E-5
olens2_vset=9.7E-1
olens2_vmon=9.70602E-1
olens2_imon=4.00674E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.12004E1
os_restr1_imon=2.87653E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15178E1
os_ea1_imon=1.89354E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63305E1
os_ef1bup_imon=3.08713E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23182E0
cs_ionrep_imon=1.18474E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91885E2
cs_nozzle_imon=1.9349E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02649E1
cs_anode1_imon=2.90016E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=7.75659E-10
tplens_vset=1.4E-1
tplens_vmon=1.63042E0
tplens_imon=-3.01921E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26122E1
iondef3_imon=1.5049E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26512E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02902E2
lens6_imon=2.98395E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=4.32813E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30076E0
ionrepsh_imon=1.74823E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33455E1
lens5b_imon=2.17824E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74055E1
cs_ef2b_imon=3.12466E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.17927E-1
os_ea2_imon=-5.80017E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00386E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71119E1
cs_ef2a_imon=3.18826E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63087E0
os_ef2alow_imon=-2.4877E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.44523E-1
os_ef2bup_imon=-5.20535E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10701E1
os_restr2_imon=2.84699E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.32431E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01711E1
cs_anode2_imon=2.2475E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74018E1
iondef1_imon=1.10653E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6789E1
iondef4_imon=1.09059E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.03726E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=3.22211E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11914E0
cs_ionaccel_imon=-1.88996E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02141E2
cs_ionfocb_imon=1.4748E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56133E1
einzel_imon=7.41329E-6
window_vset=0.0E0
window_vmon=2.24636E-1
window_imon=-6.04114E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.38806E-4
mask2_vset=0.0E0
mask2_vmon=-1.86639E1
mask2_imon=7.53064E-9
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92587E3
multa_neg_imon=7.66902E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.41411E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.42221E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.60981E0
defgridb_imon=6.15339E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33901E1
os_fil1_imon=3.97434E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.00563E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62129E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30699E1
cs_fil1_imon=9.99304E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63223E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62341E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.22757E-2
os_fil2_imon=-2.51859E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.4082E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.48544E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30276E-1
cs_fil2_imon=-2.39117E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=-1.95964E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21134E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.20278E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.14231E-1
res40_imon=-2.05677E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.367E3	1.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80021E1	-8.10623E-4	-8.79999E1	4.29153E-4	4.69685E-3	9.34839E-2	2.73859E1	-3.26884E1	-3.26242E1	2.68143E1	1.20568E-7	2.52492E-3	2.52492E-3	6.30202E-3	2.99175E-1
2.0E0	9.5464E4	8.6E1	3.16E2	1.6E2	-7.32464E-2	-8.80023E1	-6.91414E-4	-8.80001E1	2.6226E-4	4.64916E-3	9.38416E-2	2.71502E1	-3.26438E1	-3.26413E1	2.68106E1	1.20278E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.98481E-1
3.0E0	1.2E1	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80019E1	-8.58307E-4	-8.80001E1	2.86102E-4	4.74453E-3	9.35793E-2	2.72738E1	-3.26648E1	-3.26104E1	2.67873E1	1.20191E-7	2.51581E-3	2.51581E-3	6.31858E-3	2.98819E-1
4.0E0	2.0267E4	1.1E1	6.55E2	3.98E2	-7.27053E-2	-8.80018E1	-8.10623E-4	-8.80002E1	2.14577E-4	4.43459E-3	9.35793E-2	2.73135E1	-3.26392E1	-3.26561E1	2.67794E1	1.20106E-7	2.51847E-3	2.51847E-3	6.29128E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17007E-2	-8.8002E1	-7.15256E-4	-8.79998E1	9.53674E-5	4.79221E-3	9.3627E-2	2.7373E1	-3.26512E1	-3.26326E1	2.6801E1	1.20517E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80017E1	-7.15256E-4	-8.80001E1	1.66893E-4	4.8399E-3	9.35793E-2	2.73417E1	-3.26807E1	-3.262E1	2.6813E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02922E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.13915E-2	-8.80017E1	-7.39098E-4	-8.79998E1	-2.38419E-5	4.69685E-3	9.377E-2	2.72721E1	-3.26897E1	-3.26218E1	2.6798E1	1.20084E-7	2.52139E-3	2.52139E-3	6.31299E-3	3.02545E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17007E-2	-8.8002E1	-6.19888E-4	-8.8E1	1.90735E-4	4.52995E-3	9.35078E-2	2.72432E1	-3.26554E1	-3.26248E1	2.67698E1	1.20106E-7	2.52599E-3	2.52599E-3	6.31278E-3	3.01223E-1
1.2E1	4.8E1	0.0E0	4.85E2	3.23E2	-7.13915E-2	-8.80022E1	-6.91414E-4	-8.79997E1	2.38419E-5	4.69685E-3	9.37223E-2	2.73535E1	-3.26714E1	-3.26077E1	2.6816E1	1.19549E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.99E-1
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.17007E-2	-8.80023E1	-5.72205E-4	-8.79998E1	2.38419E-4	4.69685E-3	9.36985E-2	2.72288E1	-3.26795E1	-3.26392E1	2.67872E1	1.20174E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00041E-1
1.4E1	3.105E3	0.0E0	5.66E2	3.82E2	-7.13915E-2	-8.80022E1	-4.29153E-4	-8.79999E1	4.05312E-4	4.62532E-3	9.37939E-2	2.72312E1	-3.26843E1	-3.25942E1	2.67836E1	1.20209E-7	2.51847E-3	2.51847E-3	6.28592E-3	2.9943E-1
1.5E1	3.5E1	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.80022E1	-7.86781E-4	-8.8E1	3.33786E-4	4.88758E-3	9.39131E-2	2.72684E1	-3.26567E1	-3.26158E1	2.67876E1	1.20069E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.01347E-1
1.6E1	2.46E2	0.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80025E1	-7.62939E-4	-8.79998E1	4.76837E-4	4.43459E-3	9.3627E-2	2.74655E1	-3.26675E1	-3.26164E1	2.68023E1	1.20017E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00563E-1
1.7E1	2.8E2	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80021E1	-6.4373E-4	-8.79999E1	5.72205E-4	4.64916E-3	9.36031E-2	2.72143E1	-3.2652E1	-3.26425E1	2.67956E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
1.8E1	1.145E3	0.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80021E1	-6.91414E-4	-8.79998E1	6.19888E-4	4.64916E-3	9.36747E-2	2.74193E1	-3.26506E1	-3.26158E1	2.68046E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.01995E-1
1.9E1	1.057E3	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80022E1	-7.86781E-4	-8.79997E1	4.29153E-4	4.52995E-3	9.36031E-2	2.73546E1	-3.26514E1	-3.26579E1	2.67782E1	1.20122E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.01609E-1
2.0E1	2.2552E4	1.0E1	8.08E2	5.58E2	-7.24736E-2	-8.80022E1	-7.62939E-4	-8.79997E1	3.57628E-4	5.00679E-3	9.38416E-2	2.71845E1	-3.26548E1	-3.2626E1	2.67583E1	1.19913E-7	2.50898E-3	2.50898E-3	6.31288E-3	3.02922E-1
2.1E1	4.6E1	1.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80023E1	-5.24521E-4	-8.79998E1	2.6226E-4	4.79221E-3	9.41038E-2	2.7383E1	-3.26903E1	-3.25877E1	2.68466E1	1.20174E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01609E-1
2.2E1	1.593E3	1.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80022E1	-7.39098E-4	-8.79998E1	4.76837E-4	5.00679E-3	9.39369E-2	2.71482E1	-3.26649E1	-3.26909E1	2.67868E1	1.20311E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.99175E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80021E1	-5.72205E-4	-8.79998E1	3.09944E-4	4.72069E-3	9.39131E-2	2.74018E1	-3.26512E1	-3.26122E1	2.6789E1	1.20278E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1