[Scan]
initial_time=2016-01-27T21:23:06
final_time=2016-01-27T21:23:25
ip_count=19
run=1025
dataset=3
scan=226
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.77391E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.89371E-10
ql2_vset=
ql2_vmon=-1.04904E-3
ql2_imon=4.16768E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.712E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=8.25739E-10
mult1=-1.88653E-8
mult2=-2.71086E-9
rf_tmon=-3.84482E-3
rf_agc=3.45209E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=4.23431E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64911E0
bslens_imon=2.5114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19925E1
lens5a_imon=1.99501E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05164E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53731E1
cs_ef1b_imon=2.75698E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02386E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04917E1
cs_ea1_imon=2.57582E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01885E0
lens1_imon=1.40357E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64944E1
os_ef1alow_imon=3.00024E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03796E1
cs_ea2_imon=1.53524E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84093E1
cs_ef1a_imon=2.89633E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=4.11475E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11147E1
os_restr1_imon=2.86992E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15429E1
os_ea1_imon=1.89484E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63595E1
os_ef1bup_imon=3.07253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24738E0
cs_ionrep_imon=1.18802E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01873E1
cs_anode1_imon=2.90467E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=8.01575E-10
tplens_vset=1.4E-1
tplens_vmon=1.65087E0
tplens_imon=-3.73215E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26285E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26822E1
iondef2_imon=1.58267E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98441E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=4.18103E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27687E0
ionrepsh_imon=1.75327E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33599E1
lens5b_imon=2.19286E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74611E1
cs_ef2b_imon=3.15246E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.55165E-1
os_ea2_imon=-3.97991E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00764E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71327E1
cs_ef2a_imon=3.2244E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63551E0
os_ef2alow_imon=-2.27919E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52053E-1
os_ef2bup_imon=-5.23663E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10816E1
os_restr2_imon=2.86401E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.30813E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01688E1
cs_anode2_imon=2.24438E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71198E1
iondef1_imon=1.08113E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67911E1
iondef4_imon=1.06349E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.08989E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=3.18134E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12261E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47112E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56098E1
einzel_imon=7.80947E-6
window_vset=0.0E0
window_vmon=2.69235E-1
window_imon=-8.68233E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39247E-4
mask2_vset=0.0E0
mask2_vmon=-1.86697E1
mask2_imon=-6.00639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.7108E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.30211E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.36747E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.47498E0
defgridb_imon=5.99772E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33895E1
os_fil1_imon=5.92048E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.55964E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62055E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30702E1
cs_fil1_imon=9.97399E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62754E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62359E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.05368E-2
os_fil2_imon=-2.31008E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.33493E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.31358E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28903E-1
cs_fil2_imon=-2.57651E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.27523E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21629E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32858E-3
inlet_lpb_pmon=3.01104E-1
chamber_ion_pmon=1.19941E-7
chamber_cvt_pmon=2.51287E-3
foreline_cvt_pmon=2.51287E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.25612E-1
res40_imon=-2.36259E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=184
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.326E3	3.0E0	1.47E2	4.1E1	-7.25507E-2	-8.8002E1	-1.0252E-3	-8.79998E1	2.38419E-4	4.3869E-3	9.38416E-2	2.7361E1	-3.26645E1	-3.26428E1	2.68202E1	1.1979E-7	2.51709E-3	2.51709E-3	6.30212E-3	3.02115E-1
2.0E0	9.593E4	6.8E1	3.16E2	1.6E2	-7.24736E-2	-8.80021E1	-8.34465E-4	-8.79998E1	2.86102E-4	4.52995E-3	9.377E-2	2.74216E1	-3.2666E1	-3.26277E1	2.67943E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.03185E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80023E1	-5.24521E-4	-8.79999E1	9.53674E-5	4.72069E-3	9.37939E-2	2.73841E1	-3.26419E1	-3.2639E1	2.6807E1	1.19991E-7	2.51814E-3	2.51814E-3	6.31269E-3	3.02115E-1
4.0E0	2.0505E4	8.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80023E1	-7.39098E-4	-8.8E1	2.38419E-4	4.8399E-3	9.38416E-2	2.7119E1	-3.26725E1	-3.26364E1	2.6801E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80019E1	-7.86781E-4	-8.80002E1	2.38419E-5	4.88758E-3	9.37939E-2	2.72886E1	-3.26549E1	-3.26708E1	2.67896E1	1.20137E-7	2.52139E-3	2.52139E-3	6.32418E-3	2.99083E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80021E1	-7.86781E-4	-8.80001E1	1.66893E-4	4.86374E-3	9.34124E-2	2.7224E1	-3.26987E1	-3.25978E1	2.6792E1	1.19913E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.98222E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.8002E1	-9.05991E-4	-8.80001E1	3.09944E-4	4.57764E-3	9.38654E-2	2.74408E1	-3.26555E1	-3.26366E1	2.67787E1	1.20055E-7	2.52384E-3	2.52384E-3	6.3074E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.8002E1	-9.05991E-4	-8.8E1	5.00679E-4	4.81606E-3	9.40323E-2	2.74679E1	-3.26669E1	-3.26194E1	2.67716E1	1.20174E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.02133E-1
1.2E1	4.4E1	0.0E0	4.85E2	3.23E2	-7.40967E-2	-8.80017E1	-1.00136E-3	-8.8E1	1.66893E-4	4.3869E-3	9.38177E-2	2.73936E1	-3.26767E1	-3.26006E1	2.6828E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.99941E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.8002E1	-8.82149E-4	-8.8E1	1.43051E-4	4.91142E-3	9.38416E-2	2.72261E1	-3.26615E1	-3.26107E1	2.68238E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99686E-1
1.4E1	3.114E3	1.0E0	5.66E2	3.82E2	-7.22418E-2	-8.8002E1	-9.05991E-4	-8.80002E1	1.43051E-4	4.74453E-3	9.40084E-2	2.74526E1	-3.26502E1	-3.26325E1	2.68148E1	1.19713E-7	2.51359E-3	2.51359E-3	6.29624E-3	2.98026E-1
1.5E1	3.6E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80018E1	-1.33514E-3	-8.80001E1	1.90735E-4	5.00679E-3	9.38177E-2	2.72877E1	-3.26705E1	-3.26074E1	2.68112E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01609E-1
1.6E1	2.44E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.8002E1	-1.14441E-3	-8.79999E1	4.52995E-4	4.88758E-3	9.37462E-2	2.73033E1	-3.26567E1	-3.26476E1	2.67926E1	1.20383E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00824E-1
1.7E1	3.1E2	1.0E0	6.87E2	4.7E2	-7.20871E-2	-8.8002E1	-5.96046E-4	-8.8E1	2.86102E-4	4.64916E-3	9.37939E-2	2.71228E1	-3.26478E1	-3.26413E1	2.68012E1	1.20158E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.99686E-1
1.8E1	1.192E3	1.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80023E1	-7.62939E-4	-8.79997E1	3.09944E-4	4.98295E-3	9.36747E-2	2.7233E1	-3.26705E1	-3.26116E1	2.6822E1	1.19965E-7	2.51552E-3	2.51552E-3	6.28552E-3	3.00563E-1
1.9E1	1.019E3	0.0E0	7.68E2	5.29E2	-7.17779E-2	-8.80021E1	-1.00136E-3	-8.79997E1	0.0E0	4.91142E-3	9.377E-2	2.74042E1	-3.26711E1	-3.26338E1	2.6795E1	1.19953E-7	2.51632E-3	2.51632E-3	6.28592E-3	2.9892E-1
2.0E1	2.2489E4	6.0E0	8.08E2	5.58E2	-7.13143E-2	-8.80019E1	-7.39098E-4	-8.8E1	1.90735E-4	5.126E-3	9.35078E-2	2.71483E1	-3.26627E1	-3.26362E1	2.67764E1	1.19757E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9978E-1
2.1E1	4.2E1	0.0E0	8.49E2	5.88E2	-7.08504E-2	-8.8002E1	-8.10623E-4	-8.8E1	1.90735E-4	5.07832E-3	9.37462E-2	2.72992E1	-3.26626E1	-3.2567E1	2.6798E1	1.2033E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
2.2E1	1.603E3	1.0E0	8.89E2	6.17E2	-7.12368E-2	-8.8002E1	-1.0252E-3	-8.80001E1	2.38419E-4	4.76837E-3	9.36508E-2	2.73677E1	-3.2666E1	-3.25988E1	2.68012E1	1.20106E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80018E1	-1.04904E-3	-8.80002E1	7.15256E-5	4.86374E-3	9.3627E-2	2.71198E1	-3.26822E1	-3.26285E1	2.67911E1	1.19941E-7	2.51287E-3	2.51287E-3	6.32858E-3	3.01104E-1