[Scan]
initial_time=2016-01-27T21:23:33
final_time=2016-01-27T21:23:52
ip_count=19
run=1025
dataset=3
scan=227
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.12368E-2
qbias_imon=-3.7869E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.10602E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=4.33517E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.7379E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=8.44824E-10
mult1=-1.91931E-8
mult2=-2.79969E-9
rf_tmon=-4.92241E-3
rf_agc=3.30024E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=4.07517E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65818E0
bslens_imon=2.61462E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19938E1
lens5a_imon=1.98427E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53673E1
cs_ef1b_imon=2.76462E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04872E1
cs_ea1_imon=2.58183E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00295E0
lens1_imon=1.53004E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64776E1
os_ef1alow_imon=3.00997E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03899E1
cs_ea2_imon=1.54661E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=2.8873E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=4.00352E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1139E1
os_restr1_imon=2.88521E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15219E1
os_ea1_imon=1.90953E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.05029E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23472E0
cs_ionrep_imon=1.19065E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93462E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01688E1
cs_anode1_imon=2.91788E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=7.89523E-10
tplens_vset=1.4E-1
tplens_vmon=1.62405E0
tplens_imon=-2.46302E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26549E1
iondef3_imon=1.5188E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.57512E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98405E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=4.27437E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28049E0
ionrepsh_imon=1.75067E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33727E1
lens5b_imon=2.19632E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74553E1
cs_ef2b_imon=3.11319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.22562E-1
os_ea2_imon=-5.76541E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00543E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71014E1
cs_ef2a_imon=3.25255E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63608E0
os_ef2alow_imon=-2.39734E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.47419E-1
os_ef2bup_imon=-5.15322E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11262E1
os_restr2_imon=2.86645E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.30936E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01607E1
cs_anode2_imon=2.25028E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72125E1
iondef1_imon=1.07176E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67908E1
iondef4_imon=1.05341E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=2.04324E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=3.69072E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10871E0
cs_ionaccel_imon=-1.86563E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02045E2
cs_ionfocb_imon=1.4724E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56029E1
einzel_imon=7.76777E-6
window_vset=0.0E0
window_vmon=2.40275E-1
window_imon=-9.44689E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39307E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-5.93688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.71768E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.67135E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.15802E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.59531E0
defgridb_imon=6.13601E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33914E1
os_fil1_imon=6.96306E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.33954E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61936E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30701E1
cs_fil1_imon=9.96344E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62841E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62269E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.21514E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.87156E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.61843E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.26406E-1
cs_fil2_imon=-2.78503E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26943E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2159E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28552E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=2.93756E-1
res40_imon=-2.42167E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.462E3	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80017E1	-7.39098E-4	-8.80001E1	2.38419E-5	4.88758E-3	9.33647E-2	2.72721E1	-3.26526E1	-3.26048E1	2.68052E1	1.19991E-7	2.52236E-3	2.52236E-3	6.33388E-3	2.99343E-1
2.0E0	9.5188E4	9.5E1	3.16E2	1.6E2	-7.32464E-2	-8.80017E1	-1.0252E-3	-8.80002E1	3.57628E-4	4.64916E-3	9.38416E-2	2.74208E1	-3.26578E1	-3.26505E1	2.67998E1	1.19902E-7	2.51632E-3	2.51632E-3	6.33977E-3	3.0071E-1
3.0E0	2.6E1	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80017E1	-1.07288E-3	-8.80003E1	4.29153E-4	4.43459E-3	9.39131E-2	2.72886E1	-3.26829E1	-3.25919E1	2.68186E1	1.19978E-7	2.52139E-3	2.52139E-3	6.33538E-3	3.02277E-1
4.0E0	2.0323E4	1.6E1	6.55E2	3.98E2	-7.23189E-2	-8.80018E1	-8.34465E-4	-8.79998E1	5.00679E-4	4.8399E-3	9.36508E-2	2.72048E1	-3.26579E1	-3.26482E1	2.68172E1	1.20142E-7	2.50867E-3	2.50867E-3	6.32328E-3	3.00852E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.8002E1	-8.10623E-4	-8.79999E1	3.09944E-4	4.76837E-3	9.37223E-2	2.73773E1	-3.26756E1	-3.26315E1	2.67896E1	1.20106E-7	2.50989E-3	2.50989E-3	6.32356E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80018E1	-9.77516E-4	-8.80001E1	7.15256E-5	4.48227E-3	9.35555E-2	2.73936E1	-3.26673E1	-3.26325E1	2.67722E1	1.20031E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.0041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.8002E1	-9.77516E-4	-8.79997E1	3.33786E-4	4.74453E-3	9.377E-2	2.71718E1	-3.25995E1	-3.26679E1	2.68111E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01995E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.12368E-2	-8.8002E1	-1.0252E-3	-8.79998E1	2.38419E-4	4.62532E-3	9.38892E-2	2.71393E1	-3.26681E1	-3.26326E1	2.68106E1	1.20174E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.00563E-1
1.2E1	4.8E1	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.8002E1	-1.00136E-3	-8.8E1	0.0E0	4.673E-3	9.38416E-2	2.7349E1	-3.26585E1	-3.26092E1	2.67932E1	1.19953E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.99941E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.8002E1	-8.34465E-4	-8.8E1	2.38419E-4	4.55379E-3	9.377E-2	2.75157E1	-3.26065E1	-3.28124E1	2.67896E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9926E-1
1.4E1	3.079E3	1.0E0	5.66E2	3.82E2	-7.201E-2	-8.80019E1	-9.05991E-4	-8.79998E1	2.6226E-4	4.45843E-3	9.36985E-2	2.74385E1	-3.26524E1	-3.26224E1	2.68695E1	1.19902E-7	2.51525E-3	2.51525E-3	6.29128E-3	2.9714E-1
1.5E1	4.0E1	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80021E1	-7.39098E-4	-8.79996E1	-2.38419E-5	4.93526E-3	9.3627E-2	2.74479E1	-3.26714E1	-3.26077E1	2.68128E1	1.19913E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.02133E-1
1.6E1	2.66E2	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.80023E1	-7.15256E-4	-8.79999E1	9.53674E-5	4.79221E-3	9.37223E-2	2.73236E1	-3.26388E1	-3.2666E1	2.67868E1	1.19851E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.01738E-1
1.7E1	2.93E2	0.0E0	6.87E2	4.7E2	-7.201E-2	-8.80023E1	-1.16825E-3	-8.79999E1	9.53674E-5	4.62532E-3	9.37223E-2	2.72053E1	-3.26653E1	-3.2626E1	2.67695E1	1.19841E-7	2.51814E-3	2.51814E-3	6.32858E-3	3.006E-1
1.8E1	1.192E3	0.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80023E1	-1.04904E-3	-8.79998E1	2.6226E-4	4.86374E-3	9.34124E-2	2.70978E1	-3.2647E1	-3.26104E1	2.68112E1	1.19883E-7	2.51271E-3	2.51271E-3	6.29035E-3	2.99981E-1
1.9E1	1.023E3	2.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80023E1	-1.28746E-3	-8.79999E1	1.90735E-4	5.00679E-3	9.36747E-2	2.70864E1	-3.26615E1	-3.26603E1	2.6825E1	1.20017E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9952E-1
2.0E1	2.2544E4	5.0E0	8.08E2	5.58E2	-7.17779E-2	-8.80024E1	-1.09673E-3	-8.79999E1	1.66893E-4	4.88758E-3	9.38416E-2	2.73233E1	-3.26414E1	-3.26197E1	2.68256E1	1.20017E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
2.1E1	5.0E1	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80023E1	-1.14441E-3	-8.79999E1	1.43051E-4	4.88758E-3	9.38654E-2	2.74686E1	-3.26609E1	-3.26335E1	2.67982E1	1.19831E-7	2.51886E-3	2.51886E-3	6.29703E-3	3.01981E-1
2.2E1	1.667E3	1.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80021E1	-6.67572E-4	-8.79998E1	1.19209E-4	4.72069E-3	9.36031E-2	2.72805E1	-3.26458E1	-3.26464E1	2.68671E1	1.19937E-7	2.51725E-3	2.51725E-3	6.3245E-3	3.03246E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.12368E-2	-8.80021E1	-6.19888E-4	-8.79999E1	2.38419E-4	4.93526E-3	9.35555E-2	2.72125E1	-3.26567E1	-3.26549E1	2.67908E1	1.19965E-7	2.51662E-3	2.51662E-3	6.28552E-3	2.9926E-1