[Scan]
initial_time=2016-01-27T21:23:59
final_time=2016-01-27T21:24:19
ip_count=19
run=1025
dataset=3
scan=228
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.75213E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.39522E-10
ql2_vset=
ql2_vmon=-1.66893E-4
ql2_imon=4.41849E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.71485E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=8.59726E-10
mult1=-1.83133E-8
mult2=-3.032E-9
rf_tmon=-4.80082E-3
rf_agc=3.37722E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=3.83472E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66031E0
bslens_imon=2.43708E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=1.99041E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.05143E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=2.75281E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04579E2
lens23_imon=1.02209E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04964E1
cs_ea1_imon=2.57158E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0218E0
lens1_imon=1.36464E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64921E1
os_ef1alow_imon=3.0211E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04026E1
cs_ea2_imon=1.52887E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84516E1
cs_ef1a_imon=2.88973E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=4.25804E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11291E1
os_restr1_imon=2.87548E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15459E1
os_ea1_imon=1.8867E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63398E1
os_ef1bup_imon=3.06836E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22968E0
cs_ionrep_imon=1.19368E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93388E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01717E1
cs_anode1_imon=2.92379E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=7.70211E-10
tplens_vset=1.4E-1
tplens_vmon=1.64969E0
tplens_imon=-3.94451E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25978E1
iondef3_imon=1.50621E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26687E1
iondef2_imon=1.59753E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98268E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=4.11034E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28336E0
ionrepsh_imon=1.7522E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33876E1
lens5b_imon=2.1964E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74536E1
cs_ef2b_imon=3.09964E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.00894E-1
os_ea2_imon=-6.28052E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00531E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71159E1
cs_ef2a_imon=3.23969E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6552E0
os_ef2alow_imon=-2.34869E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.20196E-1
os_ef2bup_imon=-5.18102E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11019E1
os_restr2_imon=2.86992E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.31273E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01775E1
cs_anode2_imon=2.25862E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71465E1
iondef1_imon=1.09352E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68046E1
iondef4_imon=1.07322E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.04105E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=3.09193E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13535E0
cs_ionaccel_imon=-1.71619E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56127E1
einzel_imon=7.67741E-6
window_vset=0.0E0
window_vmon=2.68077E-1
window_imon=-9.62065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82653E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86703E1
mask2_imon=-4.79005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.43472E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.3552E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=6.92151E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.53109E0
defgridb_imon=6.24548E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33902E1
os_fil1_imon=6.39543E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.54806E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62089E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3067E1
cs_fil1_imon=9.96275E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64324E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62326E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10433E-2
os_fil2_imon=-2.5881E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.50869E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.50341E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29402E-1
cs_fil2_imon=-2.76186E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26943E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21659E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=2.76379E-1
res40_imon=-2.35217E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=221
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.346E3	4.0E0	1.47E2	4.1E1	-7.18554E-2	-8.80019E1	-9.05991E-4	-8.8E1	1.19209E-4	4.88758E-3	9.37939E-2	2.73357E1	-3.26717E1	-3.26218E1	2.67866E1	1.2026E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.9943E-1
2.0E0	9.5018E4	8.7E1	3.16E2	1.6E2	-7.15461E-2	-8.80018E1	-1.07288E-3	-8.80003E1	4.76837E-5	4.81606E-3	9.38177E-2	2.74018E1	-3.26719E1	-3.26511E1	2.68082E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00824E-1
3.0E0	1.3E1	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.8002E1	-7.39098E-4	-8.79998E1	-4.76837E-5	5.00679E-3	9.36508E-2	2.73317E1	-3.26503E1	-3.26156E1	2.67817E1	1.19872E-7	2.52139E-3	2.52139E-3	6.30182E-3	3.00144E-1
4.0E0	2.0409E4	8.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80022E1	-9.53674E-4	-8.8E1	1.19209E-4	4.86374E-3	9.35316E-2	2.7206E1	-3.26785E1	-3.26225E1	2.68035E1	1.20192E-7	2.51498E-3	2.51498E-3	6.31269E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80023E1	-6.91414E-4	-8.79999E1	2.38419E-4	4.74453E-3	9.34601E-2	2.73429E1	-3.26645E1	-3.26374E1	2.67986E1	1.19953E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.03027E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80019E1	-9.05991E-4	-8.80002E1	7.15256E-5	5.05447E-3	9.35316E-2	2.73538E1	-3.26392E1	-3.26404E1	2.68238E1	1.20031E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.03081E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80021E1	-5.48363E-4	-8.79996E1	2.14577E-4	4.52995E-3	9.36985E-2	2.71825E1	-3.26831E1	-3.26254E1	2.6804E1	1.2026E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.03027E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80019E1	-6.19888E-4	-8.8E1	9.53674E-5	5.00679E-3	9.36031E-2	2.74625E1	-3.26627E1	-3.26392E1	2.68202E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.02922E-1
1.2E1	3.2E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80017E1	-1.04904E-3	-8.80001E1	1.43051E-4	4.86374E-3	9.37223E-2	2.73122E1	-3.26667E1	-3.26006E1	2.67878E1	1.20278E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.02396E-1
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80018E1	-7.15256E-4	-8.79999E1	2.14577E-4	4.81606E-3	9.38892E-2	2.72354E1	-3.26759E1	-3.26446E1	2.67902E1	1.19851E-7	2.52384E-3	2.52384E-3	6.33436E-3	3.0071E-1
1.4E1	3.206E3	7.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80019E1	-6.67572E-4	-8.80003E1	3.57628E-4	5.10216E-3	9.3627E-2	2.72799E1	-3.26344E1	-3.26332E1	2.68166E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01085E-1
1.5E1	3.4E1	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80021E1	-1.09673E-3	-8.8E1	3.8147E-4	4.8399E-3	9.36031E-2	2.74252E1	-3.26818E1	-3.26334E1	2.6802E1	1.20069E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.00302E-1
1.6E1	2.95E2	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80019E1	-1.12057E-3	-8.80004E1	1.90735E-4	4.60148E-3	9.37223E-2	2.71823E1	-3.26686E1	-3.26508E1	2.68069E1	1.20078E-7	2.5199E-3	2.5199E-3	6.323E-3	3.00741E-1
1.7E1	3.1E2	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80021E1	-1.07288E-3	-8.80004E1	1.43051E-4	4.52995E-3	9.37939E-2	2.74281E1	-3.26719E1	-3.26278E1	2.67968E1	1.19785E-7	2.51758E-3	2.51758E-3	6.32483E-3	3.00087E-1
1.8E1	1.171E3	0.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80023E1	-9.05991E-4	-8.80004E1	1.66893E-4	4.72069E-3	9.36747E-2	2.73552E1	-3.26795E1	-3.26072E1	2.68209E1	1.19978E-7	2.51915E-3	2.51915E-3	6.31858E-3	2.99879E-1
1.9E1	9.68E2	0.0E0	7.68E2	5.29E2	-7.40192E-2	-8.80023E1	-9.53674E-4	-8.8E1	4.52995E-4	4.64916E-3	9.37223E-2	2.71511E1	-3.26368E1	-3.25948E1	2.67839E1	1.20028E-7	2.51162E-3	2.51162E-3	6.29703E-3	3.01485E-1
2.0E1	2.2677E4	1.3E1	8.08E2	5.58E2	-7.30918E-2	-8.8002E1	-1.21593E-3	-8.80002E1	3.33786E-4	4.93526E-3	9.33886E-2	2.72727E1	-3.26813E1	-3.2611E1	2.68178E1	1.20503E-7	2.51758E-3	2.51758E-3	6.3016E-3	3.00363E-1
2.1E1	4.1E1	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80019E1	-9.77516E-4	-8.8E1	4.76837E-4	4.43459E-3	9.36747E-2	2.75204E1	-3.26484E1	-3.26296E1	2.68196E1	1.19861E-7	2.52428E-3	2.52428E-3	6.29645E-3	2.99E-1
2.2E1	1.523E3	1.0E0	8.89E2	6.17E2	-7.13915E-2	-8.80022E1	-6.67572E-4	-8.80001E1	2.6226E-4	4.79221E-3	9.38416E-2	2.72485E1	-3.26691E1	-3.26065E1	2.67873E1	1.20055E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.80018E1	-1.66893E-4	-8.80002E1	2.38419E-5	4.673E-3	9.39131E-2	2.71465E1	-3.26687E1	-3.25978E1	2.68046E1	1.20158E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.0071E-1