[Scan]
initial_time=2016-01-27T21:24:26
final_time=2016-01-27T21:24:45
ip_count=19
run=1025
dataset=3
scan=229
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.79238E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.23322E-10
ql2_vset=
ql2_vmon=-1.4782E-3
ql2_imon=4.01175E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.68096E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=8.5808E-10
mult1=-1.55366E-8
mult2=-2.83937E-9
rf_tmon=-4.54719E-3
rf_agc=3.31696E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=4.35925E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68367E0
bslens_imon=2.59376E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19643E1
lens5a_imon=1.99539E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05044E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53499E1
cs_ef1b_imon=2.733E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02396E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05023E1
cs_ea1_imon=2.586E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01917E0
lens1_imon=1.32494E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64388E1
os_ef1alow_imon=2.99642E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03603E1
cs_ea2_imon=1.52193E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84145E1
cs_ef1a_imon=2.8946E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=4.31919E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11332E1
os_restr1_imon=2.91892E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15247E1
os_ea1_imon=1.90466E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63965E1
os_ef1bup_imon=3.10554E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23703E0
cs_ionrep_imon=1.1983E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93375E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01763E1
cs_anode1_imon=2.91788E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=7.91061E-10
tplens_vset=1.4E-1
tplens_vmon=1.63564E0
tplens_imon=-1.87206E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26162E1
iondef3_imon=1.50212E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26689E1
iondef2_imon=1.58103E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98346E-4
ql6_vset=1.0E-1
ql6_vmon=9.41515E-2
ql6_imon=4.69387E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28686E0
ionrepsh_imon=1.73329E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33889E1
lens5b_imon=2.18832E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74634E1
cs_ef2b_imon=3.11944E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.10975E-1
os_ea2_imon=-5.00065E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00647E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71298E1
cs_ef2a_imon=3.18965E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61639E0
os_ef2alow_imon=-2.56763E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.19617E-1
os_ef2bup_imon=-5.23663E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=2.86749E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.3045E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01804E1
cs_anode2_imon=2.23534E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72657E1
iondef1_imon=1.10514E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68099E1
iondef4_imon=1.10727E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.06234E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=3.41272E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10292E0
cs_ionaccel_imon=-1.72315E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02189E2
cs_ionfocb_imon=1.47365E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56689E1
einzel_imon=7.76777E-6
window_vset=0.0E0
window_vmon=2.47225E-1
window_imon=-1.13235E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-7.04896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.64121E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.45582E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.19973E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.4184E0
defgridb_imon=6.26115E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33931E1
os_fil1_imon=5.63667E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.54227E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62062E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30631E1
cs_fil1_imon=9.9726E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62945E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62374E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.32707E-2
os_fil2_imon=-2.39117E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.10325E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.08148E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31649E-1
cs_fil2_imon=-2.62864E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01458E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2163E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32626E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.22919E-1
res40_imon=-2.52593E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.46E3	2.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80018E1	-6.91414E-4	-8.80002E1	2.14577E-4	4.88758E-3	9.38416E-2	2.72538E1	-3.26537E1	-3.26567E1	2.67968E1	1.20042E-7	2.51919E-3	2.51919E-3	6.31798E-3	3.01104E-1
2.0E0	9.574E4	1.06E2	3.16E2	1.6E2	-7.26282E-2	-8.80018E1	-6.91414E-4	-8.8E1	1.90735E-4	4.64916E-3	9.38416E-2	2.70829E1	-3.2667E1	-3.26474E1	2.68088E1	1.20311E-7	2.50989E-3	2.50989E-3	6.31278E-3	3.01738E-1
3.0E0	1.1E1	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80018E1	-8.82149E-4	-8.80002E1	2.86102E-4	4.86374E-3	9.38177E-2	2.7393E1	-3.27092E1	-3.25582E1	2.67824E1	1.20045E-7	2.51271E-3	2.51271E-3	6.33592E-3	3.01065E-1
4.0E0	2.0404E4	1.5E1	6.55E2	3.98E2	-7.27828E-2	-8.80018E1	-1.3113E-3	-8.8E1	5.24521E-4	4.64916E-3	9.41277E-2	2.73516E1	-3.26652E1	-3.26297E1	2.67812E1	1.20311E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.16233E-2	-8.80018E1	-9.77516E-4	-8.79998E1	4.29153E-4	4.76837E-3	9.37939E-2	2.72485E1	-3.26561E1	-3.2626E1	2.68184E1	1.20174E-7	2.51552E-3	2.51552E-3	6.34588E-3	2.9926E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80018E1	-8.82149E-4	-8.80001E1	4.05312E-4	5.126E-3	9.39131E-2	2.72827E1	-3.26732E1	-3.26042E1	2.67984E1	1.20158E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.8002E1	-4.52995E-4	-8.8E1	3.57628E-4	5.03063E-3	9.408E-2	2.72797E1	-3.26537E1	-3.26183E1	2.67553E1	1.20158E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80018E1	-6.19888E-4	-8.79999E1	4.76837E-4	4.79221E-3	9.408E-2	2.74655E1	-3.26542E1	-3.2615E1	2.68172E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.02253E-1
1.2E1	5.2E1	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.8002E1	-7.15256E-4	-8.79998E1	1.90735E-4	4.86374E-3	9.38654E-2	2.74059E1	-3.26538E1	-3.25808E1	2.68215E1	1.19713E-7	2.5147E-3	2.5147E-3	6.32418E-3	3.01475E-1
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80021E1	-7.62939E-4	-8.80001E1	3.8147E-4	5.00679E-3	9.38416E-2	2.75047E1	-3.26211E1	-3.26995E1	2.68082E1	1.19941E-7	2.51919E-3	2.51919E-3	6.29684E-3	2.99845E-1
1.4E1	3.197E3	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80021E1	-6.19888E-4	-8.8E1	4.76837E-4	4.88758E-3	9.40561E-2	2.73442E1	-3.262E1	-3.27011E1	2.68148E1	1.20137E-7	2.51804E-3	2.51804E-3	6.33538E-3	2.98554E-1
1.5E1	3.3E1	0.0E0	6.06E2	4.11E2	-7.36328E-2	-8.80016E1	-9.29832E-4	-8.79999E1	5.00679E-4	4.86374E-3	9.377E-2	2.7183E1	-3.26767E1	-3.26225E1	2.67775E1	1.20017E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.9978E-1
1.6E1	2.56E2	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80018E1	-1.26362E-3	-8.80001E1	5.24521E-4	5.05447E-3	9.36031E-2	2.73461E1	-3.26511E1	-3.26215E1	2.68059E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.0148E-1
1.7E1	2.65E2	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80022E1	-1.0252E-3	-8.79999E1	5.48363E-4	5.126E-3	9.38892E-2	2.74873E1	-3.26416E1	-3.25954E1	2.68094E1	1.20078E-7	2.51886E-3	2.51886E-3	6.31779E-3	3.00247E-1
1.8E1	1.219E3	0.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80021E1	-1.04904E-3	-8.79999E1	6.67572E-4	4.95911E-3	9.41038E-2	2.73806E1	-3.26644E1	-3.25794E1	2.67897E1	1.20208E-7	2.52407E-3	2.52407E-3	6.3245E-3	3.00251E-1
1.9E1	9.98E2	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.8002E1	-9.53674E-4	-8.8E1	7.62939E-4	4.95911E-3	9.38416E-2	2.71248E1	-3.26711E1	-3.26524E1	2.67794E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01347E-1
2.0E1	2.279E4	2.2E1	8.08E2	5.58E2	-7.24736E-2	-8.80019E1	-1.04904E-3	-8.80001E1	2.38419E-4	4.69685E-3	9.41515E-2	2.71519E1	-3.26188E1	-3.2611E1	2.6825E1	1.19851E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00197E-1
2.1E1	5.0E1	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80025E1	-1.19209E-3	-8.79998E1	4.76837E-5	5.22137E-3	9.377E-2	2.72998E1	-3.2659E1	-3.25688E1	2.68094E1	1.2033E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00824E-1
2.2E1	1.604E3	3.0E0	8.89E2	6.17E2	-7.10825E-2	-8.80022E1	-1.09673E-3	-8.79999E1	9.53674E-5	4.8399E-3	9.408E-2	2.71853E1	-3.26514E1	-3.26378E1	2.68105E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.80021E1	-1.4782E-3	-8.8E1	2.86102E-4	4.8399E-3	9.41515E-2	2.72657E1	-3.26689E1	-3.26162E1	2.68099E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32626E-3	3.00966E-1