[Scan]
initial_time=2016-01-27T21:25:19
final_time=2016-01-27T21:25:39
ip_count=19
run=1025
dataset=3
scan=231
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.73342E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.55909E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=4.27401E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.76466E-9
ql4_vset=
ql4_vmon=-2.6226E-4
ql4_imon=8.10587E-10
mult1=-2.25757E-8
mult2=-2.65074E-9
rf_tmon=-4.48238E-3
rf_agc=3.37061E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=4.35066E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67875E0
bslens_imon=2.76486E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19911E1
lens5a_imon=1.98019E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.0537E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5373E1
cs_ef1b_imon=2.7632E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02034E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05048E1
cs_ea1_imon=2.56527E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02874E0
lens1_imon=1.46708E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6444E1
os_ef1alow_imon=2.97316E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03846E1
cs_ea2_imon=1.54579E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84082E1
cs_ef1a_imon=2.88783E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=4.40061E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11148E1
os_restr1_imon=2.88634E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15336E1
os_ea1_imon=1.88862E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63461E1
os_ef1bup_imon=3.09779E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23107E0
cs_ionrep_imon=1.19287E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93604E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01871E1
cs_anode1_imon=2.91777E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=8.05247E-10
tplens_vset=1.4E-1
tplens_vmon=1.68169E0
tplens_imon=-3.20976E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2614E1
iondef3_imon=1.50722E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26621E1
iondef2_imon=1.58184E-5
lens6_vset=-6.0E2
lens6_vmon=-6.029E2
lens6_imon=2.98393E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.03714E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29235E0
ionrepsh_imon=1.75992E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33381E1
lens5b_imon=2.18855E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74744E1
cs_ef2b_imon=3.13597E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.84168E-1
os_ea2_imon=-4.47149E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71357E1
cs_ef2a_imon=3.19847E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62156E0
os_ef2alow_imon=-2.54437E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.62701E-1
os_ef2bup_imon=-5.24652E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10768E1
os_restr2_imon=2.865E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.30289E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01915E1
cs_anode2_imon=2.24111E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74283E1
iondef1_imon=1.10599E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.09851E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.0467E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=3.39234E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1002E0
cs_ionaccel_imon=-1.66487E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02031E2
cs_ionfocb_imon=1.47129E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56312E1
einzel_imon=7.71029E-6
window_vset=0.0E0
window_vmon=1.69567E-1
window_imon=-1.08103E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39122E-4
mask2_vset=0.0E0
mask2_vmon=-1.86743E1
mask2_imon=-5.75777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9267E3
multa_neg_imon=8.2516E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.67263E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=6.97545E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.57877E0
defgridb_imon=6.08503E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33895E1
os_fil1_imon=4.66048E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.26157E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62301E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30637E1
cs_fil1_imon=9.95714E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63869E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62228E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.19579E-2
os_fil2_imon=-2.41923E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.02394E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.56586E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29114E-1
cs_fil2_imon=-2.40676E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22354E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21467E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20414E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.72483E-1
res40_imon=-2.37596E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.418E3	1.0E0	1.47E2	4.1E1	-7.10825E-2	-8.80018E1	-6.67572E-4	-8.79999E1	4.05312E-4	4.93526E-3	9.37223E-2	2.73832E1	-3.26579E1	-3.26669E1	2.68166E1	1.19809E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.01085E-1
2.0E0	9.5643E4	8.6E1	3.16E2	1.6E2	-7.08504E-2	-8.8002E1	-8.82149E-4	-8.8E1	3.09944E-4	4.98295E-3	9.35078E-2	2.72065E1	-3.26756E1	-3.2634E1	2.67908E1	1.19913E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00041E-1
3.0E0	1.0E1	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80019E1	-9.29832E-4	-8.8E1	2.86102E-4	5.05447E-3	9.3627E-2	2.73231E1	-3.26984E1	-3.2637E1	2.67781E1	1.20137E-7	2.51581E-3	2.51581E-3	6.29624E-3	2.99879E-1
4.0E0	2.0387E4	1.6E1	6.55E2	3.98E2	-7.201E-2	-8.8002E1	-7.15256E-4	-8.80003E1	1.90735E-4	5.05447E-3	9.33886E-2	2.73028E1	-3.26312E1	-3.26845E1	2.68076E1	1.19891E-7	2.52342E-3	2.52342E-3	6.32328E-3	3.00852E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80023E1	-9.53674E-4	-8.80001E1	0.0E0	4.91142E-3	9.36985E-2	2.73026E1	-3.26765E1	-3.26479E1	2.68001E1	1.20293E-7	2.52131E-3	2.52131E-3	6.31798E-3	3.02368E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80022E1	-7.39098E-4	-8.79998E1	5.00679E-4	4.95911E-3	9.35078E-2	2.73493E1	-3.26319E1	-3.2613E1	2.68196E1	1.20208E-7	2.51952E-3	2.51952E-3	6.33592E-3	3.03246E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.8002E1	-8.10623E-4	-8.79998E1	3.33786E-4	5.07832E-3	9.3627E-2	2.72594E1	-3.26386E1	-3.26152E1	2.67541E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.01738E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80023E1	-9.05991E-4	-8.8E1	2.6226E-4	4.98295E-3	9.36031E-2	2.72437E1	-3.26372E1	-3.26207E1	2.68296E1	1.19965E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.01347E-1
1.2E1	4.1E1	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80023E1	-8.82149E-4	-8.79998E1	1.90735E-4	5.48363E-3	9.38654E-2	2.73532E1	-3.26356E1	-3.2626E1	2.68112E1	1.20106E-7	2.52384E-3	2.52384E-3	6.29665E-3	3.01738E-1
1.3E1	2.0E0	1.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80019E1	-5.48363E-4	-8.79999E1	2.86102E-4	5.03063E-3	9.377E-2	2.73192E1	-3.26493E1	-3.26395E1	2.68052E1	1.19965E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.02396E-1
1.4E1	3.212E3	1.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80021E1	-5.96046E-4	-8.79997E1	7.15256E-5	5.31673E-3	9.37223E-2	2.72349E1	-3.26608E1	-3.26113E1	2.68034E1	1.20226E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9978E-1
1.5E1	5.1E1	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.8002E1	-5.96046E-4	-8.79996E1	2.86102E-4	5.36442E-3	9.35316E-2	2.73754E1	-3.26897E1	-3.25942E1	2.68262E1	1.19965E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.00824E-1
1.6E1	2.73E2	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80023E1	-5.96046E-4	-8.79997E1	1.90735E-4	4.74453E-3	9.35555E-2	2.72001E1	-3.26803E1	-3.26472E1	2.67944E1	1.19965E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00824E-1
1.7E1	2.75E2	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80019E1	-4.29153E-4	-8.79999E1	1.19209E-4	4.64916E-3	9.34601E-2	2.73375E1	-3.26645E1	-3.26248E1	2.6763E1	1.20158E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.03027E-1
1.8E1	1.197E3	1.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80023E1	-4.05312E-4	-8.80002E1	1.90735E-4	5.05447E-3	9.34362E-2	2.74862E1	-3.26649E1	-3.26331E1	2.68076E1	1.20106E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.02253E-1
1.9E1	9.28E2	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80019E1	-7.39098E-4	-8.80001E1	-1.43051E-4	5.00679E-3	9.3627E-2	2.72192E1	-3.26627E1	-3.26218E1	2.67992E1	1.19913E-7	2.52977E-3	2.52977E-3	6.28006E-3	3.02396E-1
2.0E1	2.2715E4	1.2E1	8.08E2	5.58E2	-7.36328E-2	-8.80022E1	-8.10623E-4	-8.80001E1	1.90735E-4	4.86374E-3	9.3627E-2	2.74541E1	-3.26867E1	-3.26296E1	2.67728E1	1.19965E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.02659E-1
2.1E1	5.7E1	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.80023E1	-6.19888E-4	-8.80002E1	4.76837E-5	4.64916E-3	9.34601E-2	2.73159E1	-3.26741E1	-3.26446E1	2.68106E1	1.20174E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00563E-1
2.2E1	1.523E3	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80023E1	-1.07288E-3	-8.80001E1	-2.38419E-5	4.74453E-3	9.34601E-2	2.72048E1	-3.27003E1	-3.2577E1	2.67704E1	1.19601E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.9926E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80022E1	-6.67572E-4	-8.80001E1	-2.6226E-4	4.8399E-3	9.34124E-2	2.74283E1	-3.26621E1	-3.2614E1	2.67974E1	1.20414E-7	2.52492E-3	2.52492E-3	6.33436E-3	3.01223E-1