[Scan]
initial_time=2016-01-27T21:25:46
final_time=2016-01-27T21:26:05
ip_count=19
run=1025
dataset=3
scan=232
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.80663E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-6.31285E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=4.28402E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.71849E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=8.75521E-10
mult1=-1.87181E-8
mult2=-2.76207E-9
rf_tmon=-5.25971E-3
rf_agc=3.30781E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=4.27341E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66794E0
bslens_imon=2.57741E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19833E1
lens5a_imon=1.98523E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53712E1
cs_ef1b_imon=2.76322E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02276E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04952E1
cs_ea1_imon=2.57717E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01853E0
lens1_imon=1.44545E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.99423E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04135E1
cs_ea2_imon=1.53966E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=2.89945E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=4.14562E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=2.87746E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15119E1
os_ea1_imon=1.89151E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24309E0
cs_ionrep_imon=1.20332E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93316E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01605E1
cs_anode1_imon=2.89008E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=7.91085E-10
tplens_vset=1.4E-1
tplens_vmon=1.67448E0
tplens_imon=-1.40728E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26228E1
iondef3_imon=1.50073E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26457E1
iondef2_imon=1.57319E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.98443E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=4.57394E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25811E0
ionrepsh_imon=1.74478E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33513E1
lens5b_imon=2.18819E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.11713E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.0546E-1
os_ea2_imon=-6.27397E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00551E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71324E1
cs_ef2a_imon=3.1975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.642E0
os_ef2alow_imon=-2.51499E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.42764E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=2.87458E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.30793E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.24965E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73934E1
iondef1_imon=1.08652E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67995E1
iondef4_imon=1.10792E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.07089E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=3.43645E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11512E0
cs_ionaccel_imon=-1.79059E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47367E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.63018E-6
window_vset=0.0E0
window_vmon=2.16141E-1
window_imon=-8.85996E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39041E-4
mask2_vset=0.0E0
mask2_vmon=-1.86734E1
mask2_imon=-4.5352E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.45491E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.69787E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.45851E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.42238E0
defgridb_imon=5.9949E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33903E1
os_fil1_imon=4.86031E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.17286E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6209E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30652E1
cs_fil1_imon=9.98258E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64084E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62184E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.20869E-2
os_fil2_imon=-2.44372E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.47899E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.53493E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.52782E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04011E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21595E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.03027E-1
chamber_ion_pmon=1.20311E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40102E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.22361E-1
res40_imon=-2.45012E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=216
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.412E3	0.0E0	1.47E2	4.1E1	-7.22418E-2	-8.8002E1	-6.19888E-4	-8.80001E1	2.38419E-5	5.07832E-3	9.37939E-2	2.73364E1	-3.26413E1	-3.25977E1	2.68028E1					
2.0E0	9.5079E4	9.4E1	3.16E2	1.6E2	-7.18554E-2	-8.80021E1	-7.15256E-4	-8.80001E1	-1.43051E-4	5.05447E-3	9.34839E-2	2.73435E1	-3.26484E1	-3.26272E1	2.68201E1	1.19953E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.99686E-1
3.0E0	1.5E1	1.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80021E1	-8.82149E-4	-8.79997E1	2.38419E-5	4.79221E-3	9.38892E-2	2.73275E1	-3.26644E1	-3.26679E1	2.68147E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31471E-3	3.01696E-1
4.0E0	2.0451E4	7.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80025E1	-8.10623E-4	-8.79999E1	-2.38419E-5	4.95911E-3	9.377E-2	2.72931E1	-3.26603E1	-3.2605E1	2.67862E1	1.20158E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80025E1	-8.82149E-4	-8.80002E1	9.53674E-5	4.88758E-3	9.35555E-2	2.72209E1	-3.26607E1	-3.26243E1	2.68026E1	1.19861E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80023E1	-9.05991E-4	-8.79999E1	-1.43051E-4	4.57764E-3	9.38892E-2	2.73407E1	-3.26703E1	-3.25929E1	2.68319E1	1.1993E-7	2.51886E-3	2.51886E-3	6.3074E-3	3.00741E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80023E1	-7.15256E-4	-8.79998E1	-4.76837E-5	4.48227E-3	9.36747E-2	2.73556E1	-3.26573E1	-3.26074E1	2.68214E1	1.19991E-7	2.51384E-3	2.51384E-3	6.30171E-3	2.9944E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37874E-2	-8.80019E1	-4.29153E-4	-8.79996E1	-1.66893E-4	4.88758E-3	9.37223E-2	2.73099E1	-3.26266E1	-3.25996E1	2.68058E1	1.20174E-7	2.51771E-3	2.51771E-3	6.34037E-3	2.9978E-1
1.2E1	5.6E1	0.0E0	4.85E2	3.23E2	-7.39421E-2	-8.80021E1	-7.15256E-4	-8.79999E1	-2.38419E-5	4.81606E-3	9.35793E-2	2.72883E1	-3.26404E1	-3.26026E1	2.6825E1	1.2033E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9978E-1
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80022E1	-7.39098E-4	-8.79996E1	2.6226E-4	5.00679E-3	9.35555E-2	2.73063E1	-3.26783E1	-3.26092E1	2.68166E1	1.20435E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.00041E-1
1.4E1	3.075E3	2.0E0	5.66E2	3.82E2	-7.37874E-2	-8.80021E1	-6.4373E-4	-8.79999E1	2.6226E-4	5.14984E-3	9.34362E-2	2.72865E1	-3.26585E1	-3.26434E1	2.68058E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
1.5E1	3.2E1	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80019E1	-9.53674E-4	-8.79998E1	-7.15256E-5	4.91142E-3	9.35555E-2	2.73181E1	-3.26903E1	-3.2626E1	2.6816E1	1.20278E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.9926E-1
1.6E1	2.87E2	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80018E1	-7.15256E-4	-8.80002E1	-1.90735E-4	4.45843E-3	9.38177E-2	2.73243E1	-3.26627E1	-3.26482E1	2.67631E1	1.2026E-7	2.51417E-3	2.51417E-3	6.29665E-3	2.99686E-1
1.7E1	2.51E2	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.8002E1	-7.39098E-4	-8.80003E1	0.0E0	4.88758E-3	9.38416E-2	2.73117E1	-3.26585E1	-3.26116E1	2.67827E1	1.19757E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9978E-1
1.8E1	1.222E3	0.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80023E1	-6.19888E-4	-8.79998E1	4.76837E-5	4.64916E-3	9.37223E-2	2.73611E1	-3.26567E1	-3.26443E1	2.67872E1	1.19953E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.0071E-1
1.9E1	9.32E2	1.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80022E1	-6.91414E-4	-8.79999E1	-1.19209E-4	4.88758E-3	9.36985E-2	2.7236E1	-3.26585E1	-3.2632E1	2.67854E1	1.19861E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.01085E-1
2.0E1	2.2737E4	9.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80021E1	-8.82149E-4	-8.80003E1	1.43051E-4	5.00679E-3	9.35555E-2	2.72895E1	-3.26627E1	-3.2602E1	2.67956E1	1.20017E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.02396E-1
2.1E1	4.6E1	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80019E1	-8.58307E-4	-8.80006E1	9.53674E-5	4.76837E-3	9.39608E-2	2.7285E1	-3.26638E1	-3.26496E1	2.67776E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.02133E-1
2.2E1	1.572E3	0.0E0	8.89E2	6.17E2	-7.38649E-2	-8.8002E1	-8.82149E-4	-8.80003E1	2.38419E-4	5.00679E-3	9.36508E-2	2.72835E1	-3.26681E1	-3.26248E1	2.68094E1	1.20209E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.03027E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80019E1	-4.76837E-4	-8.80002E1	1.19209E-4	4.79221E-3	9.38416E-2	2.73934E1	-3.26457E1	-3.26228E1	2.67995E1	1.20311E-7	2.5131E-3	2.5131E-3	6.29665E-3	3.03027E-1