[Scan]
initial_time=2016-01-27T21:28:26
final_time=2016-01-27T21:28:50
ip_count=19
run=1025
dataset=3
scan=238
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.82165E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.26361E-10
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=4.52459E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.71653E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=8.58891E-10
mult1=-1.57572E-8
mult2=-2.76046E-9
rf_tmon=-3.8925E-3
rf_agc=3.39054E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=4.2069E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65472E0
bslens_imon=2.48368E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19923E1
lens5a_imon=1.99172E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.04992E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53724E1
cs_ef1b_imon=2.77403E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02182E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04946E1
cs_ea1_imon=2.56671E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01071E0
lens1_imon=1.58244E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65059E1
os_ef1alow_imon=2.99027E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03714E1
cs_ea2_imon=1.52452E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=2.91495E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=4.03583E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11244E1
os_restr1_imon=2.88143E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15366E1
os_ea1_imon=1.89727E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63761E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24609E0
cs_ionrep_imon=1.17736E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93507E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02194E1
cs_anode1_imon=2.91278E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=8.21662E-10
tplens_vset=1.4E-1
tplens_vmon=1.64023E0
tplens_imon=-3.10161E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25988E1
iondef3_imon=1.52236E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2648E1
iondef2_imon=1.58472E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98476E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=3.92747E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.34823E0
ionrepsh_imon=1.74803E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33598E1
lens5b_imon=2.19685E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.13299E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.28291E-1
os_ea2_imon=-4.25519E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.00471E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.19461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62639E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.37358E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10985E1
os_restr2_imon=2.87206E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.30361E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01695E1
cs_anode2_imon=2.24569E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73827E1
iondef1_imon=1.09842E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.05894E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=3.57628E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12173E0
cs_ionaccel_imon=-1.84465E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56279E1
einzel_imon=7.63018E-6
window_vset=0.0E0
window_vmon=2.36564E-1
window_imon=-1.00853E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39286E-4
mask2_vset=0.0E0
mask2_vmon=-1.86783E1
mask2_imon=-5.29203E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.57387E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.42029E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.23501E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.58178E0
defgridb_imon=6.07421E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33931E1
os_fil1_imon=5.08256E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.23293E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62291E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30665E1
cs_fil1_imon=9.95975E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63471E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62482E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.23448E-2
os_fil2_imon=-2.40168E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.35886E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.62773E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31853E-1
cs_fil2_imon=-2.0593E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10618E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21579E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=5.11259E-1
res40_imon=-2.41768E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.368E3	1.0E0	1.47E2	4.1E1	-7.286E-2	-8.80017E1	-6.91414E-4	-8.80003E1	1.90735E-4	4.79221E-3	9.35793E-2	2.73063E1	-3.2682E1	-3.26396E1	2.68154E1	1.20017E-7	2.51116E-3	2.51116E-3	6.32386E-3	2.97963E-1
2.0E0	9.5452E4	7.6E1	3.16E2	1.6E2	-7.22418E-2	-8.80016E1	-6.91414E-4	-8.80001E1	9.53674E-5	5.07832E-3	9.35078E-2	2.73014E1	-3.2656E1	-3.25911E1	2.67839E1	1.20311E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.99941E-1
3.0E0	1.1E1	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80015E1	-7.39098E-4	-8.80003E1	2.6226E-4	4.88758E-3	9.35793E-2	2.73445E1	-3.2695E1	-3.26121E1	2.6865E1	1.19925E-7	2.5147E-3	2.5147E-3	6.29624E-3	3.01209E-1
4.0E0	2.0553E4	1.4E1	6.55E2	3.98E2	-7.32464E-2	-8.80013E1	-1.23978E-3	-8.80001E1	4.05312E-4	5.05447E-3	9.36508E-2	2.73207E1	-3.26873E1	-3.26386E1	2.6803E1	1.20158E-7	2.50882E-3	2.50882E-3	6.31278E-3	3.02511E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80014E1	-1.09673E-3	-8.80002E1	5.00679E-4	4.76837E-3	9.35078E-2	2.72774E1	-3.26496E1	-3.26089E1	2.67926E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80013E1	-7.86781E-4	-8.79998E1	5.48363E-4	4.91142E-3	9.35555E-2	2.72692E1	-3.26681E1	-3.25947E1	2.68221E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.98481E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80013E1	-9.05991E-4	-8.79999E1	3.09944E-4	5.22137E-3	9.36031E-2	2.73518E1	-3.26487E1	-3.26091E1	2.6816E1	1.19831E-7	2.50852E-3	2.50852E-3	6.3074E-3	3.00247E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80015E1	-9.05991E-4	-8.80003E1	-9.53674E-5	5.24521E-3	9.35793E-2	2.71813E1	-3.265E1	-3.26224E1	2.68007E1	1.20005E-7	2.52106E-3	2.52106E-3	6.3074E-3	2.9926E-1
1.2E1	5.1E1	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80016E1	-1.12057E-3	-8.80003E1	3.33786E-4	5.36442E-3	9.37223E-2	2.73871E1	-3.26844E1	-3.26195E1	2.6813E1	1.20017E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.00563E-1
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80016E1	-9.29832E-4	-8.80002E1	-9.53674E-5	5.55515E-3	9.37462E-2	2.72467E1	-3.26738E1	-3.26124E1	2.681E1	1.20069E-7	2.52428E-3	2.52428E-3	6.32386E-3	2.9952E-1
1.4E1	3.143E3	1.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80017E1	-9.05991E-4	-8.8E1	4.76837E-5	5.29289E-3	9.35793E-2	2.72781E1	-3.26506E1	-3.26212E1	2.6795E1	1.20004E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.00966E-1
1.5E1	5.2E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80016E1	-5.24521E-4	-8.8E1	2.86102E-4	5.00679E-3	9.377E-2	2.73428E1	-3.26874E1	-3.26225E1	2.68343E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00966E-1
1.6E1	2.69E2	1.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80016E1	-7.39098E-4	-8.80001E1	1.90735E-4	5.03063E-3	9.36031E-2	2.73898E1	-3.26819E1	-3.26278E1	2.6807E1	1.20311E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.00966E-1
1.7E1	2.6E2	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80014E1	-8.58307E-4	-8.80002E1	2.6226E-4	4.88758E-3	9.36985E-2	2.73087E1	-3.2644E1	-3.26338E1	2.6786E1	1.19925E-7	2.5147E-3	2.5147E-3	6.31858E-3	2.97236E-1
1.8E1	1.184E3	0.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80013E1	-7.86781E-4	-8.80002E1	4.05312E-4	5.14984E-3	9.39131E-2	2.70846E1	-3.26651E1	-3.26386E1	2.6783E1	1.20106E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.9714E-1
1.9E1	1.012E3	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80015E1	-8.10623E-4	-8.80003E1	4.76837E-4	5.05447E-3	9.39131E-2	2.73924E1	-3.26679E1	-3.26065E1	2.68268E1	1.20017E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.97963E-1
2.0E1	2.2802E4	1.6E1	8.08E2	5.58E2	-7.40192E-2	-8.80016E1	-5.00679E-4	-8.8E1	3.09944E-4	5.03063E-3	9.3627E-2	2.72617E1	-3.26502E1	-3.26266E1	2.67941E1	1.2026E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.98665E-1
2.1E1	5.2E1	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80018E1	-6.4373E-4	-8.80001E1	4.52995E-4	4.57764E-3	9.377E-2	2.73329E1	-3.26657E1	-3.26022E1	2.68062E1	1.20003E-7	2.52224E-3	2.52224E-3	6.3074E-3	3.0101E-1
2.2E1	1.66E3	1.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80017E1	-4.05312E-4	-8.80003E1	4.05312E-4	5.24521E-3	9.37939E-2	2.73123E1	-3.26518E1	-3.26591E1	2.68012E1	1.20344E-7	2.51867E-3	2.51867E-3	6.32592E-3	3.01904E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80018E1	-2.86102E-4	-8.80002E1	4.29153E-4	4.76837E-3	9.34601E-2	2.73827E1	-3.2648E1	-3.25988E1	2.67926E1	1.19851E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.01223E-1