[Scan]
initial_time=2016-01-27T21:30:38
final_time=2016-01-27T21:31:07
ip_count=19
run=1025
dataset=4
scan=241
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.0878E-4
ql1_vset=
ql1_vmon=-8.20112E-1
ql1_imon=3.20845E-9
ql2_vset=
ql2_vmon=-7.99203E-1
ql2_imon=1.63066E-10
ql3_vset=
ql3_vmon=-9.13076E0
ql3_imon=7.65113E-9
ql4_vset=
ql4_vmon=-9.14233E0
ql4_imon=-4.20094E-11
mult1=-1.04096E-8
mult2=-2.77617E-9
rf_tmon=-4.23222E-3
rf_agc=3.34271E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=2.04039E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6415E0
bslens_imon=2.54496E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19791E1
lens5a_imon=1.97406E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.05273E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53911E1
cs_ef1b_imon=2.77259E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.01998E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04802E1
cs_ea1_imon=2.61214E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37256E0
lens1_imon=2.76126E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64801E1
os_ef1alow_imon=2.98919E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03871E1
cs_ea2_imon=1.56598E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=2.89765E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=3.68047E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=2.87134E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15738E1
os_ea1_imon=1.87204E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2527E0
cs_ionrep_imon=1.19251E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93485E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01557E1
cs_anode1_imon=2.90558E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=5.46157E-10
tplens_vset=1.4E-1
tplens_vmon=1.64744E0
tplens_imon=-1.91197E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26732E1
iondef3_imon=1.50902E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26638E1
iondef2_imon=1.58508E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98584E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=2.74587E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23588E0
ionrepsh_imon=1.73721E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33435E1
lens5b_imon=2.17882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.12069E-1
os_ea2_imon=-5.91347E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06041E2
lens4b_imon=2.00608E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.20795E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62399E0
os_ef2alow_imon=-2.6195E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6679E-1
os_ef2bup_imon=-5.13868E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11502E1
os_restr2_imon=2.88539E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23104E2
cs_ionfoca_imon=6.30541E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.24136E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73381E1
iondef1_imon=1.0995E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68036E1
iondef4_imon=1.09566E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=1.61589E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.93815E-11
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-1.50227E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02045E2
cs_ionfocb_imon=1.46999E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.6518E-6
window_vset=0.0E0
window_vmon=2.24551E-1
window_imon=-1.11305E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39203E-4
mask2_vset=0.0E0
mask2_vmon=-1.86849E1
mask2_imon=-5.58035E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.8118E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.51402E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.14128E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.66298E0
defgridb_imon=6.16434E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33928E1
os_fil1_imon=5.56909E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.24494E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62144E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30614E1
cs_fil1_imon=9.98228E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63615E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62562E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.28607E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.11859E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.36092E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-1.98722E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38849E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21696E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.99536E-1
res40_imon=-2.4393E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.21114E-1	-7.98869E-1	-9.13205E0	-9.14145E0	5.05447E-3	9.35793E-2	2.73228E1	-3.26649E1	-3.26472E1	2.68005E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.99E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.21137E-1	-7.98941E-1	-9.13203E0	-9.14192E0	5.126E-3	9.40084E-2	2.71588E1	-3.26903E1	-3.2613E1	2.68088E1	1.20069E-7	2.51935E-3	2.51935E-3	6.31837E-3	2.9978E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.20684E-1	-7.98988E-1	-9.13212E0	-9.14183E0	4.76837E-3	9.39131E-2	2.73647E1	-3.26331E1	-3.2649E1	2.67878E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.20398E-1	-7.98702E-1	-9.13208E0	-9.14187E0	4.79221E-3	9.35793E-2	2.72696E1	-3.26434E1	-3.26182E1	2.68064E1	1.20028E-7	2.51886E-3	2.51886E-3	6.3126E-3	3.01485E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.20065E-1	-7.99203E-1	-9.13222E0	-9.14185E0	4.8399E-3	9.35316E-2	2.72721E1	-3.26561E1	-3.2633E1	2.67909E1	1.19978E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.00942E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.20017E-1	-7.99179E-1	-9.13229E0	-9.14209E0	4.76837E-3	9.35316E-2	2.72936E1	-3.26884E1	-3.26604E1	2.67725E1	1.20325E-7	2.51783E-3	2.51783E-3	6.323E-3	3.00247E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.20088E-1	-7.99227E-1	-9.13186E0	-9.1423E0	4.98295E-3	9.36747E-2	2.73452E1	-3.25765E1	-3.26608E1	2.67944E1	1.20116E-7	2.52222E-3	2.52222E-3	6.31902E-3	3.0147E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.20041E-1	-7.99179E-1	-9.13188E0	-9.14199E0	4.74453E-3	9.39369E-2	2.72895E1	-3.26416E1	-3.2626E1	2.68065E1	1.2026E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00453E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.19993E-1	-7.98559E-1	-9.13165E0	-9.14211E0	4.3869E-3	9.37223E-2	2.72895E1	-3.26446E1	-3.26104E1	2.68138E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.20088E-1	-7.99108E-1	-9.13131E0	-9.14192E0	4.24385E-3	9.37223E-2	2.73177E1	-3.26723E1	-3.26176E1	2.67872E1	1.20383E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.20041E-1	-7.99251E-1	-9.13167E0	-9.14195E0	4.29153E-3	9.38416E-2	2.7266E1	-3.26561E1	-3.26326E1	2.68157E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.20303E-1	-7.99298E-1	-9.13169E0	-9.14173E0	4.26769E-3	9.38177E-2	2.73057E1	-3.26809E1	-3.26272E1	2.68196E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.2016E-1	-7.98917E-1	-9.13153E0	-9.14183E0	4.43459E-3	9.36747E-2	2.73225E1	-3.26777E1	-3.26597E1	2.6807E1	1.20209E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00197E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.19921E-1	-7.99036E-1	-9.13162E0	-9.14207E0	4.24385E-3	9.35555E-2	2.72609E1	-3.2659E1	-3.26006E1	2.6816E1	1.20174E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00824E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.20398E-1	-7.98798E-1	-9.13146E0	-9.14221E0	4.62532E-3	9.38416E-2	2.72979E1	-3.26518E1	-3.26482E1	2.68244E1	1.20004E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.20208E-1	-7.99227E-1	-9.13153E0	-9.14216E0	4.64916E-3	9.38177E-2	2.72949E1	-3.26314E1	-3.26362E1	2.68166E1	1.20122E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.02659E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.20303E-1	-7.9937E-1	-9.13141E0	-9.14192E0	4.31538E-3	9.36747E-2	2.73057E1	-3.26452E1	-3.26254E1	2.68117E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.02396E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.20208E-1	-7.98893E-1	-9.1311E0	-9.14195E0	4.86374E-3	9.38892E-2	2.72892E1	-3.26467E1	-3.26307E1	2.68106E1	1.20383E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.02922E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.20422E-1	-7.99036E-1	-9.13086E0	-9.14221E0	4.64916E-3	9.36985E-2	2.73181E1	-3.26266E1	-3.26266E1	2.6786E1	1.20055E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.02769E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.20112E-1	-7.99203E-1	-9.13076E0	-9.14233E0	4.76837E-3	9.37462E-2	2.73381E1	-3.26638E1	-3.26732E1	2.68036E1	1.20209E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.01738E-1