[Scan]
initial_time=2016-01-27T21:32:38
final_time=2016-01-27T21:33:07
ip_count=19
run=1025
dataset=4
scan=244
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08882E-4
ql1_vset=
ql1_vmon=-8.18729E-1
ql1_imon=1.26842E-9
ql2_vset=
ql2_vmon=-7.98869E-1
ql2_imon=2.68626E-10
ql3_vset=
ql3_vmon=-9.13081E0
ql3_imon=2.63321E-9
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=3.75724E-10
mult1=-9.82467E-9
mult2=-2.89826E-9
rf_tmon=-5.79218E-3
rf_agc=3.29731E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=3.45457E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6734E0
bslens_imon=2.6863E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19817E1
lens5a_imon=1.99823E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.05181E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53718E1
cs_ef1b_imon=2.76971E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02216E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04872E1
cs_ea1_imon=2.58628E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35909E0
lens1_imon=2.55408E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64524E1
os_ef1alow_imon=2.99243E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03905E1
cs_ea2_imon=1.53066E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84208E1
cs_ef1a_imon=2.89404E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=3.71909E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11081E1
os_restr1_imon=2.87782E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15257E1
os_ea1_imon=1.9009E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63857E1
os_ef1bup_imon=3.09731E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23373E0
cs_ionrep_imon=1.17145E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=2.91747E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=7.12562E-10
tplens_vset=1.4E-1
tplens_vmon=1.6298E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2638E1
iondef3_imon=1.48953E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27173E1
iondef2_imon=1.56739E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98434E-4
ql6_vset=1.0E-1
ql6_vmon=9.38892E-2
ql6_imon=3.68249E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24843E0
ionrepsh_imon=1.74957E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33517E1
lens5b_imon=2.18849E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74862E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.32848E-1
os_ea2_imon=-4.61433E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00509E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.19714E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62759E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.43364E-1
os_ef2bup_imon=-5.13147E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10901E1
os_restr2_imon=2.87098E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.2901E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01695E1
cs_anode2_imon=2.24425E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72715E1
iondef1_imon=1.09505E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.09026E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.97806E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=2.12848E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12233E0
cs_ionaccel_imon=-1.60318E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02022E2
cs_ionfocb_imon=1.47197E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56537E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.40768E-1
window_imon=-9.90511E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39196E-4
mask2_vset=0.0E0
mask2_vmon=-1.86728E1
mask2_imon=-6.91381E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.77337E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.396E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.12693E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.54245E0
defgridb_imon=5.97361E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33896E1
os_fil1_imon=4.08546E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.99266E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62127E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30676E1
cs_fil1_imon=9.97363E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64498E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62452E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.13301E-2
os_fil2_imon=-2.40768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.65919E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.31943E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.13739E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37047E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21504E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.02659E-1
chamber_ion_pmon=1.20383E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.45787E-1
res40_imon=-2.3456E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0965E0	-8.19278E-1	-7.99012E-1	-9.13072E0	-9.14214E0	4.79221E-3	9.38892E-2	2.72811E1	-3.26753E1	-3.2596E1	2.68046E1	1.20191E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.00942E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0965E0	-8.19278E-1	-7.98965E-1	-9.13055E0	-9.14216E0	4.64916E-3	9.377E-2	2.72907E1	-3.26549E1	-3.2617E1	2.67992E1	1.20106E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0965E0	-8.1892E-1	-7.99179E-1	-9.1305E0	-9.14223E0	4.64916E-3	9.37939E-2	2.73654E1	-3.26689E1	-3.26162E1	2.68123E1	1.20457E-7	2.5225E-3	2.5225E-3	6.32418E-3	3.00676E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09657E0	-8.19445E-1	-7.99131E-1	-9.13053E0	-9.1424E0	4.72069E-3	9.37223E-2	2.73482E1	-3.26549E1	-3.26354E1	2.6804E1	1.19891E-7	2.51498E-3	2.51498E-3	6.31798E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.19039E-1	-7.98869E-1	-9.13074E0	-9.14228E0	4.36306E-3	9.36747E-2	2.73111E1	-3.26494E1	-3.26693E1	2.67878E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.19039E-1	-7.99131E-1	-9.13074E0	-9.14233E0	4.50611E-3	9.35555E-2	2.72763E1	-3.2637E1	-3.26358E1	2.67607E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.18706E-1	-7.98821E-1	-9.13036E0	-9.14228E0	4.60148E-3	9.36985E-2	2.72961E1	-3.26482E1	-3.2614E1	2.68382E1	1.20031E-7	2.51581E-3	2.51581E-3	6.32978E-3	3.01209E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09657E0	-8.18777E-1	-7.98893E-1	-9.13076E0	-9.14247E0	4.79221E-3	9.37939E-2	2.72977E1	-3.26641E1	-3.26044E1	2.68296E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.19063E-1	-7.98726E-1	-9.13081E0	-9.14211E0	4.26769E-3	9.38177E-2	2.72784E1	-3.26559E1	-3.26222E1	2.67963E1	1.20127E-7	2.51058E-3	2.51058E-3	6.3126E-3	2.99014E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09627E0	-8.19039E-1	-7.99417E-1	-9.13062E0	-9.14218E0	4.17233E-3	9.37939E-2	2.73308E1	-3.26205E1	-3.26315E1	2.67926E1	1.1995E-7	2.51758E-3	2.51758E-3	6.3074E-3	3.00916E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09627E0	-8.18849E-1	-7.99203E-1	-9.13043E0	-9.14211E0	4.41074E-3	9.36508E-2	2.73062E1	-3.26079E1	-3.26453E1	2.68132E1	1.19925E-7	2.52362E-3	2.52362E-3	6.32418E-3	3.03081E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.1892E-1	-7.99203E-1	-9.13055E0	-9.1418E0	4.3869E-3	9.38416E-2	2.73783E1	-3.27106E1	-3.25948E1	2.68186E1	1.20099E-7	2.51423E-3	2.51423E-3	6.3074E-3	3.01729E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.1892E-1	-7.9937E-1	-9.13045E0	-9.14183E0	4.79221E-3	9.39369E-2	2.73186E1	-3.26468E1	-3.26536E1	2.6777E1	1.20392E-7	2.51527E-3	2.51527E-3	6.3074E-3	2.9871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.1892E-1	-7.98988E-1	-9.13084E0	-9.14204E0	4.62532E-3	9.377E-2	2.73075E1	-3.26476E1	-3.26176E1	2.68004E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.98481E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.19182E-1	-7.99322E-1	-9.13064E0	-9.14171E0	4.8399E-3	9.38177E-2	2.72898E1	-3.2685E1	-3.26349E1	2.68036E1	1.20278E-7	2.51334E-3	2.51334E-3	6.29645E-3	2.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.19087E-1	-7.9906E-1	-9.13084E0	-9.14214E0	4.72069E-3	9.36031E-2	2.72591E1	-3.26573E1	-3.26496E1	2.67842E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00041E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.19039E-1	-7.98893E-1	-9.13074E0	-9.14202E0	4.91142E-3	9.36031E-2	2.72641E1	-3.26634E1	-3.26389E1	2.68136E1	1.20004E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.00453E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.19016E-1	-7.98941E-1	-9.13072E0	-9.14183E0	4.8399E-3	9.36985E-2	2.73758E1	-3.26614E1	-3.26028E1	2.67806E1	1.19978E-7	2.52139E-3	2.52139E-3	6.31858E-3	2.99083E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.19087E-1	-7.99155E-1	-9.1306E0	-9.14197E0	4.74453E-3	9.36508E-2	2.73039E1	-3.26344E1	-3.26056E1	2.67992E1	1.20042E-7	2.51393E-3	2.51393E-3	6.32328E-3	3.01356E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.18729E-1	-7.98869E-1	-9.13081E0	-9.14216E0	5.03063E-3	9.38892E-2	2.72715E1	-3.27173E1	-3.2638E1	2.68178E1	1.20383E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.02659E-1