[Scan]
initial_time=2016-01-27T21:35:58
final_time=2016-01-27T21:36:23
ip_count=19
run=1025
dataset=4
scan=249
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08878E-4
ql1_vset=
ql1_vmon=-8.18086E-1
ql1_imon=9.40907E-10
ql2_vset=
ql2_vmon=-7.99108E-1
ql2_imon=2.92301E-10
ql3_vset=
ql3_vmon=-9.13079E0
ql3_imon=1.43509E-9
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=4.71699E-10
mult1=-9.46389E-9
mult2=-2.86436E-9
rf_tmon=-4.89291E-3
rf_agc=3.33209E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=3.77035E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69435E0
bslens_imon=2.36558E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1996E1
lens5a_imon=1.99557E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.05159E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53601E1
cs_ef1b_imon=2.76115E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02102E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04728E1
cs_ea1_imon=2.58152E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3771E0
lens1_imon=2.75491E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65406E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0371E1
cs_ea2_imon=1.5272E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84502E1
cs_ef1a_imon=2.90427E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=4.11427E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11346E1
os_restr1_imon=2.88927E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15514E1
os_ea1_imon=1.885E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63493E1
os_ef1bup_imon=3.09361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24107E0
cs_ionrep_imon=1.18926E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.93447E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01856E1
cs_anode1_imon=2.90143E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=7.70342E-10
tplens_vset=1.4E-1
tplens_vmon=1.65182E0
tplens_imon=-1.76778E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26325E1
iondef3_imon=1.50073E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2675E1
iondef2_imon=1.59417E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98155E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=3.7595E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.37279E0
ionrepsh_imon=1.7573E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33574E1
lens5b_imon=2.18245E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.11307E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.262E-1
os_ea2_imon=-3.90912E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00658E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71197E1
cs_ef2a_imon=3.20673E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62218E0
os_ef2alow_imon=-2.44831E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.2985E-1
os_ef2bup_imon=-5.2986E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10725E1
os_restr2_imon=2.85886E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.3094E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0191E1
cs_anode2_imon=2.24826E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73016E1
iondef1_imon=1.10516E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68142E1
iondef4_imon=1.06922E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.0306E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=2.61962E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14501E0
cs_ionaccel_imon=-1.80771E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02023E2
cs_ionfocb_imon=1.47287E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56196E1
einzel_imon=7.7446E-6
window_vset=0.0E0
window_vmon=2.05329E-1
window_imon=-1.10629E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82656E2
mask1_imon=2.39137E-4
mask2_vset=0.0E0
mask2_vmon=-1.86824E1
mask2_imon=-4.98119E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92678E3
multa_neg_imon=7.2712E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.41466E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.29456E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.33708E0
defgridb_imon=6.45749E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33934E1
os_fil1_imon=5.15013E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.50172E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62187E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30686E1
cs_fil1_imon=9.95452E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63771E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62384E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.26389E-2
os_fil2_imon=-2.36414E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.6728E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.39103E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30526E-1
cs_fil2_imon=-2.05329E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.65919E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21517E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3445E-3
inlet_lpb_pmon=3.02621E-1
chamber_ion_pmon=1.20192E-7
chamber_cvt_pmon=2.51709E-3
foreline_cvt_pmon=2.51709E-3
chamber_tmon=1.40044E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.53511E-1
res40_imon=-2.62266E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=216
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.18133E-1	-7.98988E-1	-9.13081E0	-9.14221E0	4.93526E-3	9.32932E-2	2.72585E1	-3.26685E1	-3.26372E1	2.68134E1	1.20149E-7	2.51709E-3	2.51709E-3	6.31949E-3	2.98306E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.18229E-1	-7.98988E-1	-9.13081E0	-9.14226E0	4.93526E-3	9.34124E-2	2.73614E1	-3.26572E1	-3.26168E1	2.6792E1	1.20106E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.9892E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.18348E-1	-7.99012E-1	-9.13069E0	-9.14197E0	4.673E-3	9.35793E-2	2.73289E1	-3.26417E1	-3.26417E1	2.68041E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9978E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.18419E-1	-7.99203E-1	-9.13067E0	-9.14204E0	4.76837E-3	9.35078E-2	2.72768E1	-3.26508E1	-3.26142E1	2.68166E1	1.20142E-7	2.52131E-3	2.52131E-3	6.30212E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.18133E-1	-7.99036E-1	-9.13072E0	-9.14187E0	4.76837E-3	9.35555E-2	2.73831E1	-3.26613E1	-3.26357E1	2.67959E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.18276E-1	-7.9875E-1	-9.13057E0	-9.1419E0	4.98295E-3	9.32932E-2	2.72612E1	-3.26686E1	-3.26356E1	2.67816E1	1.20161E-7	2.51549E-3	2.51549E-3	6.33297E-3	3.00392E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.18133E-1	-7.98893E-1	-9.13088E0	-9.14164E0	4.76837E-3	9.34601E-2	2.73418E1	-3.26689E1	-3.26132E1	2.67992E1	1.20019E-7	2.51793E-3	2.51793E-3	6.3074E-3	2.99916E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.17919E-1	-7.99274E-1	-9.13086E0	-9.1419E0	4.8399E-3	9.34601E-2	2.72498E1	-3.26494E1	-3.26458E1	2.67932E1	1.20017E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.18181E-1	-7.99513E-1	-9.13076E0	-9.1418E0	4.74453E-3	9.36031E-2	2.733E1	-3.26671E1	-3.26081E1	2.67956E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.1811E-1	-7.9937E-1	-9.13088E0	-9.14218E0	4.79221E-3	9.35316E-2	2.73213E1	-3.26657E1	-3.26098E1	2.67908E1	1.20055E-7	2.51847E-3	2.51847E-3	6.29128E-3	3.01995E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.18229E-1	-7.99727E-1	-9.13074E0	-9.14199E0	4.88758E-3	9.35316E-2	2.72444E1	-3.26723E1	-3.26272E1	2.67986E1	1.20311E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.18086E-1	-7.99537E-1	-9.13074E0	-9.14195E0	4.88758E-3	9.39369E-2	2.73259E1	-3.26572E1	-3.26346E1	2.67878E1	1.19861E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.18276E-1	-7.99108E-1	-9.13072E0	-9.14207E0	4.95911E-3	9.33647E-2	2.73724E1	-3.26765E1	-3.26152E1	2.67806E1	1.20191E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.00942E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.18157E-1	-7.99131E-1	-9.13084E0	-9.1419E0	5.53131E-3	9.37223E-2	2.72178E1	-3.26425E1	-3.26231E1	2.68178E1	1.20084E-7	2.52473E-3	2.52473E-3	6.29624E-3	3.0041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.18348E-1	-7.98988E-1	-9.13084E0	-9.14202E0	5.19753E-3	9.38416E-2	2.74153E1	-3.26731E1	-3.26303E1	2.67884E1	1.20158E-7	2.51632E-3	2.51632E-3	6.33977E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.17847E-1	-7.98965E-1	-9.13067E0	-9.14211E0	5.14984E-3	9.35078E-2	2.72668E1	-3.26679E1	-3.26461E1	2.6825E1	1.19913E-7	2.51116E-3	2.51116E-3	6.33486E-3	2.99E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.17871E-1	-7.99346E-1	-9.13079E0	-9.1419E0	5.00679E-3	9.35078E-2	2.72823E1	-3.26891E1	-3.26038E1	2.681E1	1.20226E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.1799E-1	-7.99179E-1	-9.13088E0	-9.14216E0	5.10216E-3	9.38892E-2	2.73682E1	-3.26711E1	-3.26657E1	2.68058E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.02922E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.18133E-1	-7.98655E-1	-9.13088E0	-9.14223E0	4.91142E-3	9.34124E-2	2.72703E1	-3.26614E1	-3.26136E1	2.68215E1	1.20278E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.18086E-1	-7.99108E-1	-9.13079E0	-9.14187E0	4.57764E-3	9.33647E-2	2.73016E1	-3.2675E1	-3.26325E1	2.68142E1	1.20192E-7	2.51709E-3	2.51709E-3	6.3445E-3	3.02621E-1