[Scan]
initial_time=2016-01-27T21:37:02
final_time=2016-01-27T21:37:26
ip_count=19
run=1025
dataset=4
scan=251
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09627E0
qbias_imon=-1.08842E-4
ql1_vset=
ql1_vmon=-8.17871E-1
ql1_imon=8.6875E-10
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=3.31569E-10
ql3_vset=
ql3_vmon=-9.13095E0
ql3_imon=1.22644E-9
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=5.26285E-10
mult1=-1.01739E-8
mult2=-2.75254E-9
rf_tmon=-5.43169E-3
rf_agc=3.34537E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=3.86035E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68273E0
bslens_imon=2.55742E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19783E1
lens5a_imon=1.99288E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05157E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53766E1
cs_ef1b_imon=2.77295E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02277E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05189E1
cs_ea1_imon=2.58786E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36371E0
lens1_imon=2.79102E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.98919E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03614E1
cs_ea2_imon=1.54373E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=2.89729E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=3.95584E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11171E1
os_restr1_imon=2.87674E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15329E1
os_ea1_imon=1.88104E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63611E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25977E0
cs_ionrep_imon=1.19333E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01623E1
cs_anode1_imon=2.91855E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=7.59184E-10
tplens_vset=1.4E-1
tplens_vmon=1.62846E0
tplens_imon=-5.46679E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26374E1
iondef3_imon=1.48958E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26651E1
iondef2_imon=1.59612E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98448E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=3.64649E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21611E0
ionrepsh_imon=1.7515E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33693E1
lens5b_imon=2.19357E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.13911E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.48086E-1
os_ea2_imon=-5.57264E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00531E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.21083E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61618E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3015E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=2.8735E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.30884E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.23776E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73478E1
iondef1_imon=1.08786E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67836E1
iondef4_imon=1.08089E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=2.02402E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=3.05271E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10672E0
cs_ionaccel_imon=-1.7077E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47457E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.81398E-6
window_vset=0.0E0
window_vmon=2.04128E-1
window_imon=-1.19233E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39243E-4
mask2_vset=0.0E0
mask2_vmon=-1.8674E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.58692E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.87195E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.47012E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.53109E0
defgridb_imon=6.17115E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33915E1
os_fil1_imon=4.74018E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.64138E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62105E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30642E1
cs_fil1_imon=9.9526E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63639E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62484E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.2183E-2
os_fil2_imon=-2.25151E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.77932E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.55276E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.25752E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24434E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21593E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.96533E-1
res40_imon=-2.39606E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.17752E-1	-7.98416E-1	-9.13093E0	-9.14202E0	5.03063E-3	9.37223E-2	2.72823E1	-3.26425E1	-3.26078E1	2.68194E1	1.20158E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.0148E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.17609E-1	-7.98559E-1	-9.13091E0	-9.14223E0	4.72069E-3	9.39846E-2	2.74318E1	-3.26725E1	-3.26517E1	2.6802E1	1.20064E-7	2.51549E-3	2.51549E-3	6.3074E-3	2.99906E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.1749E-1	-7.98941E-1	-9.13084E0	-9.14235E0	4.62532E-3	9.38416E-2	2.7362E1	-3.26619E1	-3.26357E1	2.68043E1	1.19883E-7	2.51498E-3	2.51498E-3	6.33021E-3	3.00794E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.17466E-1	-7.98821E-1	-9.13126E0	-9.14202E0	4.673E-3	9.37223E-2	2.71508E1	-3.26474E1	-3.2634E1	2.67637E1	1.2021E-7	2.51752E-3	2.51752E-3	6.3023E-3	3.00149E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-8.17847E-1	-7.99441E-1	-9.13119E0	-9.14156E0	4.55379E-3	9.34839E-2	2.7383E1	-3.26567E1	-3.26098E1	2.67981E1	1.20244E-7	2.51804E-3	2.51804E-3	6.3074E-3	2.99613E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.17561E-1	-7.99346E-1	-9.13098E0	-9.14176E0	4.57764E-3	9.38177E-2	2.72133E1	-3.26779E1	-3.26102E1	2.68307E1	1.199E-7	2.51754E-3	2.51754E-3	6.30419E-3	3.00075E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.17633E-1	-7.98965E-1	-9.13081E0	-9.14228E0	4.72069E-3	9.37223E-2	2.73664E1	-3.26512E1	-3.26398E1	2.68154E1	1.20172E-7	2.5154E-3	2.5154E-3	6.29895E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.1768E-1	-7.99012E-1	-9.13072E0	-9.14226E0	4.74453E-3	9.34601E-2	2.73529E1	-3.26319E1	-3.25912E1	2.68175E1	1.19809E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.17657E-1	-7.98821E-1	-9.13105E0	-9.1418E0	5.34058E-3	9.36031E-2	2.7082E1	-3.26654E1	-3.25959E1	2.68117E1	1.20568E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.0148E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.17633E-1	-7.98512E-1	-9.13088E0	-9.14166E0	5.19753E-3	9.34601E-2	2.71878E1	-3.26616E1	-3.26142E1	2.68026E1	1.19941E-7	2.52025E-3	2.52025E-3	6.29684E-3	3.01104E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.17728E-1	-7.98798E-1	-9.13093E0	-9.14195E0	5.05447E-3	9.36031E-2	2.73742E1	-3.2644E1	-3.2644E1	2.68298E1	1.20045E-7	2.51611E-3	2.51611E-3	6.33021E-3	3.00794E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.17585E-1	-7.9875E-1	-9.13105E0	-9.14199E0	5.03063E-3	9.39608E-2	2.72962E1	-3.26844E1	-3.26024E1	2.68004E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9952E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.1768E-1	-7.9844E-1	-9.13107E0	-9.14207E0	5.126E-3	9.37223E-2	2.72913E1	-3.26903E1	-3.26104E1	2.67884E1	1.20004E-7	2.52492E-3	2.52492E-3	6.30202E-3	3.00197E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.1768E-1	-7.99012E-1	-9.131E0	-9.14204E0	5.07832E-3	9.34839E-2	2.73777E1	-3.26661E1	-3.26172E1	2.67974E1	1.20017E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.02396E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.17776E-1	-7.98702E-1	-9.13098E0	-9.1419E0	4.76837E-3	9.33886E-2	2.72006E1	-3.26693E1	-3.2608E1	2.68296E1	1.2033E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.03185E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.18086E-1	-7.98798E-1	-9.13103E0	-9.14207E0	4.60148E-3	9.33886E-2	2.73889E1	-3.2675E1	-3.26567E1	2.67926E1	1.2026E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.02511E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.17966E-1	-7.99227E-1	-9.13124E0	-9.14183E0	4.72069E-3	9.37223E-2	2.72132E1	-3.26567E1	-3.26416E1	2.68088E1	1.20226E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09665E0	-8.18014E-1	-7.99084E-1	-9.13105E0	-9.14176E0	4.72069E-3	9.3627E-2	2.73472E1	-3.26633E1	-3.26362E1	2.68148E1	1.20517E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.9841E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.18014E-1	-7.99131E-1	-9.13088E0	-9.14178E0	4.64916E-3	9.38177E-2	2.73265E1	-3.27007E1	-3.26179E1	2.67931E1	1.20017E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09627E0	-8.17871E-1	-7.98678E-1	-9.13095E0	-9.14197E0	4.673E-3	9.377E-2	2.73478E1	-3.26651E1	-3.26374E1	2.67836E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01995E-1