[Scan]
initial_time=2016-01-27T21:38:37
final_time=2016-01-27T21:39:00
ip_count=19
run=1025
dataset=4
scan=254
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08794E-4
ql1_vset=
ql1_vmon=-8.17323E-1
ql1_imon=8.11172E-10
ql2_vset=
ql2_vmon=-7.99084E-1
ql2_imon=3.0266E-10
ql3_vset=
ql3_vmon=-9.13088E0
ql3_imon=1.17934E-9
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=5.19049E-10
mult1=-9.99587E-9
mult2=-2.60175E-9
rf_tmon=-3.97856E-3
rf_agc=3.37515E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=3.83294E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66693E0
bslens_imon=2.62541E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20014E1
lens5a_imon=2.00396E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.0508E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5372E1
cs_ef1b_imon=2.77024E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02227E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04971E1
cs_ea1_imon=2.56064E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35093E0
lens1_imon=2.59467E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6485E1
os_ef1alow_imon=2.98363E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.53369E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=2.91364E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=3.93319E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11175E1
os_restr1_imon=2.88598E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15482E1
os_ea1_imon=1.88375E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63405E1
os_ef1bup_imon=3.09801E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2447E0
cs_ionrep_imon=1.1949E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93393E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01741E1
cs_anode1_imon=2.89486E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=7.53283E-10
tplens_vset=1.4E-1
tplens_vmon=1.63916E0
tplens_imon=-3.11679E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26762E1
iondef3_imon=1.4886E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26478E1
iondef2_imon=1.57706E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02903E2
lens6_imon=2.98462E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=3.69763E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23104E0
ionrepsh_imon=1.76046E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.338E1
lens5b_imon=2.17882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.14103E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.14441E-1
os_ea2_imon=-3.39E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00425E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71081E1
cs_ef2a_imon=3.18063E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61535E0
os_ef2alow_imon=-2.41844E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.41657E-1
os_ef2bup_imon=-5.23522E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10782E1
os_restr2_imon=2.87847E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.28972E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.25092E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74697E1
iondef1_imon=1.09073E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68111E1
iondef4_imon=1.08939E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.99196E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=2.68114E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13583E0
cs_ionaccel_imon=-1.73217E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02135E2
cs_ionfocb_imon=1.47359E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56251E1
einzel_imon=7.85514E-6
window_vset=0.0E0
window_vmon=2.28945E-1
window_imon=-1.06638E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.3934E-4
mask2_vset=0.0E0
mask2_vmon=-1.86924E1
mask2_imon=-6.53255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.72433E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.27969E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.19839E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.53761E0
defgridb_imon=6.36849E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33919E1
os_fil1_imon=4.53343E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.70871E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62307E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30627E1
cs_fil1_imon=9.98164E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63908E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62526E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07768E-2
os_fil2_imon=-2.39757E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.94788E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.28616E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.18702E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25003E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21642E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.03976E-1
chamber_ion_pmon=1.19757E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.81795E-1
res40_imon=-2.43551E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.17728E-1	-7.98702E-1	-9.13095E0	-9.14197E0	4.98295E-3	9.38892E-2	2.73145E1	-3.26561E1	-3.26667E1	2.68105E1	1.20243E-7	2.52025E-3	2.52025E-3	6.32858E-3	3.01862E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.17657E-1	-7.98464E-1	-9.13091E0	-9.14204E0	5.05447E-3	9.33886E-2	2.72534E1	-3.26849E1	-3.26194E1	2.68142E1	1.20042E-7	2.51603E-3	2.51603E-3	6.31269E-3	2.99093E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.17299E-1	-7.9906E-1	-9.13088E0	-9.14204E0	4.86374E-3	9.33886E-2	2.7321E1	-3.26785E1	-3.26113E1	2.68118E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9874E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.17251E-1	-7.98821E-1	-9.13086E0	-9.14187E0	4.93526E-3	9.34601E-2	2.74178E1	-3.2636E1	-3.26915E1	2.67908E1	1.19851E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.98156E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.17299E-1	-7.99346E-1	-9.131E0	-9.14195E0	5.14984E-3	9.33409E-2	2.73207E1	-3.26645E1	-3.26308E1	2.68034E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.1718E-1	-7.98988E-1	-9.13107E0	-9.14199E0	5.4121E-3	9.34601E-2	2.71661E1	-3.26713E1	-3.26621E1	2.68058E1	1.20311E-7	2.52599E-3	2.52599E-3	6.33436E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.17251E-1	-7.99322E-1	-9.13088E0	-9.14204E0	4.57764E-3	9.36031E-2	2.73814E1	-3.26326E1	-3.26849E1	2.68022E1	1.20137E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.01209E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0965E0	-8.17132E-1	-7.99203E-1	-9.13107E0	-9.14195E0	4.55379E-3	9.37223E-2	2.74384E1	-3.26803E1	-3.25865E1	2.68325E1	1.2033E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.98222E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.17347E-1	-7.98893E-1	-9.13122E0	-9.14209E0	4.98295E-3	9.36508E-2	2.72457E1	-3.26572E1	-3.26199E1	2.68363E1	1.20414E-7	2.52276E-3	2.52276E-3	6.33436E-3	2.97901E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.17323E-1	-7.9875E-1	-9.13112E0	-9.14209E0	4.72069E-3	9.34601E-2	2.7385E1	-3.26609E1	-3.26446E1	2.67812E1	1.20084E-7	2.51915E-3	2.51915E-3	6.29067E-3	2.99613E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.17347E-1	-7.99131E-1	-9.13098E0	-9.1419E0	4.50611E-3	9.36747E-2	2.74265E1	-3.26524E1	-3.26248E1	2.68034E1	1.20383E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.17394E-1	-7.99155E-1	-9.13124E0	-9.14176E0	4.52995E-3	9.36747E-2	2.74463E1	-3.26236E1	-3.26116E1	2.68112E1	1.20435E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.17299E-1	-7.98893E-1	-9.13091E0	-9.14168E0	4.8399E-3	9.37223E-2	2.74283E1	-3.26224E1	-3.26741E1	2.68226E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.17442E-1	-7.98941E-1	-9.13126E0	-9.14176E0	4.673E-3	9.34124E-2	2.74933E1	-3.26697E1	-3.26543E1	2.67955E1	1.20122E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.17394E-1	-7.98917E-1	-9.13138E0	-9.14187E0	4.48227E-3	9.35555E-2	2.74737E1	-3.26729E1	-3.26457E1	2.68128E1	1.20311E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.02511E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.17037E-1	-7.99012E-1	-9.13095E0	-9.14168E0	4.48227E-3	9.3627E-2	2.73956E1	-3.26622E1	-3.26229E1	2.67803E1	1.19891E-7	2.52025E-3	2.52025E-3	6.31798E-3	2.99845E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.17394E-1	-7.99084E-1	-9.13091E0	-9.14187E0	4.79221E-3	9.35555E-2	2.74797E1	-3.26962E1	-3.2636E1	2.67758E1	1.20156E-7	2.5234E-3	2.5234E-3	6.31847E-3	3.01675E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.17466E-1	-7.99108E-1	-9.13093E0	-9.14192E0	4.95911E-3	9.36747E-2	2.7531E1	-3.26691E1	-3.26219E1	2.6807E1	1.20106E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.02511E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.17275E-1	-7.98917E-1	-9.13117E0	-9.14183E0	4.79221E-3	9.36985E-2	2.74289E1	-3.26368E1	-3.26128E1	2.68052E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.17323E-1	-7.99084E-1	-9.13088E0	-9.14197E0	4.62532E-3	9.38177E-2	2.74697E1	-3.26478E1	-3.26762E1	2.68111E1	1.19757E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.03976E-1