[Scan]
initial_time=2016-01-27T21:39:09
final_time=2016-01-27T21:39:32
ip_count=19
run=1025
dataset=4
scan=255
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.0882E-4
ql1_vset=
ql1_vmon=-8.17609E-1
ql1_imon=8.16774E-10
ql2_vset=
ql2_vmon=-7.98368E-1
ql2_imon=3.1991E-10
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=1.03331E-9
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=5.3885E-10
mult1=-9.92494E-9
mult2=-2.8722E-9
rf_tmon=-5.01679E-3
rf_agc=3.32265E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=3.685E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64144E0
bslens_imon=2.70607E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20155E1
lens5a_imon=1.99819E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12433E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53544E1
cs_ef1b_imon=2.77908E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02287E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04929E1
cs_ea1_imon=2.57335E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40205E0
lens1_imon=2.73793E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64662E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03578E1
cs_ea2_imon=1.52922E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84592E1
cs_ef1a_imon=2.9099E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=3.91436E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=2.86341E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15152E1
os_ea1_imon=1.90581E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63527E1
os_ef1bup_imon=3.09514E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25682E0
cs_ionrep_imon=1.19935E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93604E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=2.90449E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=7.03549E-10
tplens_vset=1.4E-1
tplens_vmon=1.65087E0
tplens_imon=-1.18377E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26219E1
iondef3_imon=1.51648E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26632E1
iondef2_imon=1.57559E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0291E2
lens6_imon=2.98208E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=3.33273E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29044E0
ionrepsh_imon=1.77132E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33687E1
lens5b_imon=2.16525E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.13983E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.45726E-1
os_ea2_imon=-4.26306E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00425E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70993E1
cs_ef2a_imon=3.19389E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.66243E0
os_ef2alow_imon=-2.46814E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.46968E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=2.8598E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.33609E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01611E1
cs_anode2_imon=2.23163E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74962E1
iondef1_imon=1.10874E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6825E1
iondef4_imon=1.09134E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.01086E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=3.22247E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10011E0
cs_ionaccel_imon=-1.58517E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02047E2
cs_ionfocb_imon=1.47169E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55955E1
einzel_imon=7.78875E-6
window_vset=0.0E0
window_vmon=2.52782E-1
window_imon=-9.97719E-7
mask1_vset=-4.8E2
mask1_vmon=-4.826E2
mask1_imon=2.39318E-4
mask2_vset=0.0E0
mask2_vmon=-1.87023E1
mask2_imon=-7.34629E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=7.82406E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.54987E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.17988E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.52518E0
defgridb_imon=6.2384E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33884E1
os_fil1_imon=3.97134E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.17286E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62372E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30575E1
cs_fil1_imon=9.9693E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64498E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62507E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16765E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.69813E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.31737E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-1.51871E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.74038E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21465E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32858E-3
inlet_lpb_pmon=3.006E-1
chamber_ion_pmon=1.19941E-7
chamber_cvt_pmon=2.51603E-3
foreline_cvt_pmon=2.51603E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.45186E-1
res40_imon=-2.30956E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.1768E-1	-7.98988E-1	-9.13115E0	-9.1424E0	4.69685E-3	9.35793E-2	2.72414E1	-3.26732E1	-3.26514E1	2.68052E1	1.20106E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.99941E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.17847E-1	-7.99036E-1	-9.13088E0	-9.1419E0	4.74453E-3	9.39131E-2	2.73375E1	-3.26909E1	-3.26374E1	2.67932E1	1.20311E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.17275E-1	-7.98869E-1	-9.13093E0	-9.14211E0	4.81606E-3	9.38177E-2	2.73243E1	-3.26765E1	-3.26152E1	2.67804E1	1.19965E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00563E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.17466E-1	-7.99227E-1	-9.13084E0	-9.14199E0	4.8399E-3	9.34124E-2	2.73204E1	-3.2688E1	-3.26095E1	2.6818E1	1.20226E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.03449E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.1768E-1	-7.99036E-1	-9.1311E0	-9.14192E0	4.8399E-3	9.3627E-2	2.72246E1	-3.2632E1	-3.26146E1	2.68135E1	1.20158E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.17513E-1	-7.98941E-1	-9.1311E0	-9.14207E0	4.72069E-3	9.35316E-2	2.72426E1	-3.26398E1	-3.26206E1	2.68202E1	1.19965E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.1718E-1	-7.98988E-1	-9.13138E0	-9.14216E0	4.8399E-3	9.36508E-2	2.73352E1	-3.2652E1	-3.25995E1	2.67986E1	1.2033E-7	2.5199E-3	2.5199E-3	6.3514E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.17347E-1	-7.98702E-1	-9.13126E0	-9.14209E0	5.29289E-3	9.39369E-2	2.73198E1	-3.26383E1	-3.26285E1	2.68154E1	1.20055E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.99686E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.17156E-1	-7.98845E-1	-9.13138E0	-9.1419E0	4.88758E-3	9.37223E-2	2.73327E1	-3.26146E1	-3.26681E1	2.68208E1	1.20084E-7	2.5225E-3	2.5225E-3	6.3074E-3	3.01475E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.17037E-1	-7.9875E-1	-9.13115E0	-9.1418E0	4.69685E-3	9.35793E-2	2.72402E1	-3.26698E1	-3.25907E1	2.6796E1	1.20122E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.17299E-1	-7.99108E-1	-9.13098E0	-9.1418E0	4.673E-3	9.33886E-2	2.72676E1	-3.26616E1	-3.26336E1	2.67951E1	1.20092E-7	2.51814E-3	2.51814E-3	6.30212E-3	3.02115E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.17323E-1	-7.98583E-1	-9.131E0	-9.14176E0	4.673E-3	9.3627E-2	2.74409E1	-3.26705E1	-3.2626E1	2.68088E1	1.20045E-7	2.52635E-3	2.52635E-3	6.3074E-3	2.9971E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.1706E-1	-7.99084E-1	-9.13067E0	-9.14192E0	4.76837E-3	9.35555E-2	2.72252E1	-3.2632E1	-3.26452E1	2.68142E1	1.19705E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.02133E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.17418E-1	-7.98774E-1	-9.13084E0	-9.14178E0	4.81606E-3	9.34839E-2	2.71281E1	-3.26505E1	-3.26476E1	2.68429E1	1.20122E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.01085E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.1749E-1	-7.98607E-1	-9.131E0	-9.14209E0	4.69685E-3	9.35793E-2	2.7209E1	-3.26861E1	-3.2596E1	2.68118E1	1.20177E-7	2.51679E-3	2.51679E-3	6.3074E-3	2.99753E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.17537E-1	-7.98941E-1	-9.13076E0	-9.14183E0	4.91142E-3	9.35555E-2	2.73826E1	-3.2632E1	-3.26561E1	2.67944E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01085E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.1737E-1	-7.99441E-1	-9.13072E0	-9.14185E0	5.00679E-3	9.34839E-2	2.7429E1	-3.26585E1	-3.26018E1	2.68046E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09627E0	-8.17323E-1	-7.98702E-1	-9.13091E0	-9.14171E0	4.76837E-3	9.35555E-2	2.72329E1	-3.26634E1	-3.26866E1	2.6774E1	1.20363E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.17347E-1	-7.99036E-1	-9.13086E0	-9.14176E0	4.95911E-3	9.35078E-2	2.74859E1	-3.26614E1	-3.26364E1	2.68198E1	1.1966E-7	2.51693E-3	2.51693E-3	6.34099E-3	3.0041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.17609E-1	-7.98368E-1	-9.13112E0	-9.14176E0	5.03063E-3	9.34839E-2	2.74962E1	-3.26632E1	-3.26219E1	2.6825E1	1.19941E-7	2.51603E-3	2.51603E-3	6.32858E-3	3.006E-1