[Scan]
initial_time=2016-01-27T21:39:40
final_time=2016-01-27T21:40:03
ip_count=19
run=1025
dataset=4
scan=256
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08785E-4
ql1_vset=
ql1_vmon=-8.17227E-1
ql1_imon=7.79355E-10
ql2_vset=
ql2_vmon=-7.9906E-1
ql2_imon=3.0508E-10
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=1.02659E-9
ql4_vset=
ql4_vmon=-9.14233E0
ql4_imon=4.88341E-10
mult1=-1.01255E-8
mult2=-2.81141E-9
rf_tmon=-5.40924E-3
rf_agc=3.27652E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=3.63243E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64299E0
bslens_imon=2.3978E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19745E1
lens5a_imon=1.98339E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12518E2
lens4a_imon=2.05127E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5345E1
cs_ef1b_imon=2.77484E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04588E2
lens23_imon=1.02251E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05007E1
cs_ea1_imon=2.58533E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34393E0
lens1_imon=2.67262E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64624E1
os_ef1alow_imon=2.9912E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03964E1
cs_ea2_imon=1.53527E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83456E1
cs_ef1a_imon=2.89313E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=4.04942E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11435E1
os_restr1_imon=2.86642E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15121E1
os_ea1_imon=1.8788E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63403E1
os_ef1bup_imon=3.08775E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24319E0
cs_ionrep_imon=1.20319E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.9339E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01771E1
cs_anode1_imon=2.91526E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=7.52068E-10
tplens_vset=1.4E-1
tplens_vmon=1.62171E0
tplens_imon=-8.70778E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.51504E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2656E1
iondef2_imon=1.57535E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02895E2
lens6_imon=2.98422E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=3.71325E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27691E0
ionrepsh_imon=1.75093E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33531E1
lens5b_imon=2.18836E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7452E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.30412E-1
os_ea2_imon=-5.52753E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00562E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71296E1
cs_ef2a_imon=3.18505E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.633E0
os_ef2alow_imon=-2.47407E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.32552E-1
os_ef2bup_imon=-5.18341E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11073E1
os_restr2_imon=2.8668E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.30081E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01802E1
cs_anode2_imon=2.25167E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73326E1
iondef1_imon=1.10204E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68184E1
iondef4_imon=1.09505E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.98946E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=2.78902E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11551E0
cs_ionaccel_imon=-1.85207E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02121E2
cs_ionfocb_imon=1.47268E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56195E1
einzel_imon=7.71074E-6
window_vset=0.0E0
window_vmon=2.08827E-1
window_imon=-9.43871E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39412E-4
mask2_vset=0.0E0
mask2_vmon=-1.86999E1
mask2_imon=-7.03465E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92603E3
multa_neg_imon=7.36372E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93761E3
defgrida_imon=6.9324E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.65763E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.50057E0
defgridb_imon=5.90944E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33902E1
os_fil1_imon=4.9967E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.2036E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62273E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30641E1
cs_fil1_imon=9.96721E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64636E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6264E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.15027E-2
os_fil2_imon=-2.41899E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.94538E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.35849E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31091E-1
cs_fil2_imon=-2.03103E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.57505E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21527E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.4006E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.7423E-1
res40_imon=-2.41302E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.17466E-1	-7.99036E-1	-9.13088E0	-9.14192E0	4.72069E-3	9.36508E-2	2.72324E1	-3.26891E1	-3.2617E1	2.67962E1	1.20281E-7	2.51642E-3	2.51642E-3	6.31902E-3	3.0147E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.1737E-1	-7.99084E-1	-9.13098E0	-9.14209E0	4.8399E-3	9.37223E-2	2.74157E1	-3.26633E1	-3.26314E1	2.6789E1	1.20122E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.1737E-1	-7.99394E-1	-9.13095E0	-9.14192E0	5.24521E-3	9.38416E-2	2.72379E1	-3.2698E1	-3.26148E1	2.67775E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01609E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.17299E-1	-7.9875E-1	-9.13115E0	-9.14192E0	4.72069E-3	9.36747E-2	2.72875E1	-3.26676E1	-3.25987E1	2.68024E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09356E0	-8.17204E-1	-7.98297E-1	-9.13098E0	-9.14183E0	4.88758E-3	9.35793E-2	2.73884E1	-3.26247E1	-3.26527E1	2.68182E1	1.20383E-7	2.52373E-3	2.52373E-3	6.30466E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09333E0	-8.17108E-1	-7.98845E-1	-9.13088E0	-9.14176E0	5.05447E-3	9.37223E-2	2.73131E1	-3.26689E1	-3.26021E1	2.6802E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.16989E-1	-7.98988E-1	-9.13105E0	-9.14171E0	4.673E-3	9.33647E-2	2.72889E1	-3.26524E1	-3.26152E1	2.67794E1	1.19925E-7	2.51359E-3	2.51359E-3	6.29067E-3	3.0041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09387E0	-8.1737E-1	-7.98869E-1	-9.13072E0	-9.14204E0	4.673E-3	9.35793E-2	2.73015E1	-3.26422E1	-3.25948E1	2.68466E1	1.19965E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09364E0	-8.1718E-1	-7.98464E-1	-9.13115E0	-9.14204E0	4.79221E-3	9.36985E-2	2.73411E1	-3.26378E1	-3.26331E1	2.68012E1	1.20106E-7	2.51096E-3	2.51096E-3	6.3074E-3	3.00197E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.17275E-1	-7.98941E-1	-9.13131E0	-9.14211E0	5.07832E-3	9.37223E-2	2.7266E1	-3.26657E1	-3.26645E1	2.67848E1	1.20017E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.17347E-1	-7.98988E-1	-9.13129E0	-9.14204E0	4.93526E-3	9.377E-2	2.73514E1	-3.26603E1	-3.26512E1	2.68022E1	1.20278E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09364E0	-8.1718E-1	-7.99346E-1	-9.13138E0	-9.14207E0	5.45979E-3	9.35316E-2	2.7361E1	-3.26753E1	-3.25978E1	2.68136E1	1.20174E-7	2.51662E-3	2.51662E-3	6.29098E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09387E0	-8.17108E-1	-7.99155E-1	-9.13119E0	-9.14195E0	4.60148E-3	9.32455E-2	2.72744E1	-3.26732E1	-3.26042E1	2.68022E1	1.20414E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.01223E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-8.17156E-1	-7.99608E-1	-9.13124E0	-9.14202E0	4.93526E-3	9.39369E-2	2.73629E1	-3.26791E1	-3.26455E1	2.68024E1	1.2033E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.17204E-1	-7.99036E-1	-9.13124E0	-9.14223E0	4.64916E-3	9.36747E-2	2.72302E1	-3.26773E1	-3.2662E1	2.67758E1	1.19991E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.01356E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.17466E-1	-7.99227E-1	-9.13134E0	-9.14204E0	4.95911E-3	9.38416E-2	2.72641E1	-3.26652E1	-3.25844E1	2.68172E1	1.20383E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00563E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.17227E-1	-7.98821E-1	-9.13124E0	-9.14192E0	4.45843E-3	9.34839E-2	2.72373E1	-3.26968E1	-3.25965E1	2.68106E1	1.19925E-7	2.51248E-3	2.51248E-3	6.31299E-3	3.01209E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.16846E-1	-7.99203E-1	-9.13107E0	-9.14195E0	4.673E-3	9.34839E-2	2.72997E1	-3.27017E1	-3.26302E1	2.67896E1	1.20036E-7	2.51755E-3	2.51755E-3	6.33188E-3	3.00896E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.1718E-1	-7.99131E-1	-9.13098E0	-9.14207E0	4.74453E-3	9.36031E-2	2.73257E1	-3.26478E1	-3.2685E1	2.68334E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.17227E-1	-7.9906E-1	-9.1311E0	-9.14233E0	4.41074E-3	9.32455E-2	2.73326E1	-3.2656E1	-3.26266E1	2.68184E1	1.20106E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.98665E-1