[Scan]
initial_time=2016-01-27T21:40:41
final_time=2016-01-27T21:41:03
ip_count=19
run=1025
dataset=4
scan=258
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08808E-4
ql1_vset=
ql1_vmon=-8.17585E-1
ql1_imon=7.66337E-10
ql2_vset=
ql2_vmon=-7.99131E-1
ql2_imon=3.09265E-10
ql3_vset=
ql3_vmon=-9.13105E0
ql3_imon=9.72486E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=5.52785E-10
mult1=-9.921E-9
mult2=-2.76452E-9
rf_tmon=-5.46774E-3
rf_agc=3.218E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=3.54397E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68209E0
bslens_imon=2.53514E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19801E1
lens5a_imon=1.99545E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.0513E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54011E1
cs_ef1b_imon=2.77532E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0496E1
cs_ea1_imon=2.57006E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39214E0
lens1_imon=2.56535E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64351E1
os_ef1alow_imon=2.98973E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03461E1
cs_ea2_imon=1.54503E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84858E1
cs_ef1a_imon=2.90014E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=3.80373E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11095E1
os_restr1_imon=2.87364E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15523E1
os_ea1_imon=1.91725E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63736E1
os_ef1bup_imon=3.10281E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24483E0
cs_ionrep_imon=1.17986E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.934E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01513E1
cs_anode1_imon=2.91927E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=7.15578E-10
tplens_vset=1.4E-1
tplens_vmon=1.62465E0
tplens_imon=-3.91583E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.52154E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26362E1
iondef2_imon=1.56249E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98561E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=3.64733E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29181E0
ionrepsh_imon=1.74641E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33987E1
lens5b_imon=2.19717E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74803E1
cs_ef2b_imon=3.14241E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.40163E-1
os_ea2_imon=-5.29193E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00643E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71073E1
cs_ef2a_imon=3.18166E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63616E0
os_ef2alow_imon=-2.50927E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70767E-1
os_ef2bup_imon=-5.30098E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10849E1
os_restr2_imon=2.88135E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.31774E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01843E1
cs_anode2_imon=2.24114E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73153E1
iondef1_imon=1.07884E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68166E1
iondef4_imon=1.08218E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.94062E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=2.90751E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10162E0
cs_ionaccel_imon=-1.68384E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47152E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56098E1
einzel_imon=7.84554E-6
window_vset=0.0E0
window_vmon=2.32546E-1
window_imon=-1.16375E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39363E-4
mask2_vset=0.0E0
mask2_vmon=-1.8664E1
mask2_imon=-7.00702E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.55286E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.56274E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.2038E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.3195E0
defgridb_imon=6.44527E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33891E1
os_fil1_imon=5.01172E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.43321E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62472E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3068E1
cs_fil1_imon=9.959E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63507E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62683E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.25716E-2
os_fil2_imon=-2.42612E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.57261E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.23175E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30616E-1
cs_fil2_imon=-2.10176E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.98066E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21564E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.50775E-3
foreline_cvt_pmon=2.50775E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.18861E-1
res40_imon=-2.56296E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.17013E-1	-7.98631E-1	-9.13117E0	-9.1418E0	5.17368E-3	9.36747E-2	2.72883E1	-3.26735E1	-3.25779E1	2.6774E1	1.1993E-7	2.52093E-3	2.52093E-3	6.3282E-3	3.01981E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.17108E-1	-7.98655E-1	-9.13103E0	-9.14192E0	5.07832E-3	9.38892E-2	2.72512E1	-3.2645E1	-3.26407E1	2.67908E1	1.20069E-7	2.5188E-3	2.5188E-3	6.3514E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.16798E-1	-7.98631E-1	-9.13086E0	-9.14178E0	5.43594E-3	9.35793E-2	2.74302E1	-3.26469E1	-3.26335E1	2.68298E1	1.20174E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.9952E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.1706E-1	-7.98583E-1	-9.13095E0	-9.14204E0	4.79221E-3	9.35316E-2	2.73963E1	-3.26658E1	-3.26015E1	2.68274E1	1.2026E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.9714E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.16822E-1	-7.98631E-1	-9.13084E0	-9.14202E0	5.126E-3	9.33647E-2	2.73493E1	-3.26472E1	-3.2649E1	2.67782E1	1.19965E-7	2.50898E-3	2.50898E-3	6.3074E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16989E-1	-7.9844E-1	-9.13103E0	-9.1419E0	4.86374E-3	9.36031E-2	2.75022E1	-3.26585E1	-3.2638E1	2.68012E1	1.20278E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.17084E-1	-7.98345E-1	-9.1311E0	-9.1418E0	5.24521E-3	9.36031E-2	2.73928E1	-3.26651E1	-3.26086E1	2.67914E1	1.19913E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.03976E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.17323E-1	-7.98631E-1	-9.13103E0	-9.14226E0	5.4121E-3	9.3627E-2	2.71705E1	-3.26561E1	-3.26086E1	2.68154E1	1.20069E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02659E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.17108E-1	-7.98655E-1	-9.13103E0	-9.14226E0	4.93526E-3	9.33886E-2	2.74853E1	-3.26434E1	-3.26801E1	2.67686E1	1.20414E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.01223E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.17609E-1	-7.98655E-1	-9.13093E0	-9.14218E0	5.19753E-3	9.32455E-2	2.74142E1	-3.2672E1	-3.26408E1	2.67637E1	1.20174E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.9978E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.17347E-1	-7.98798E-1	-9.13105E0	-9.14178E0	4.86374E-3	9.3317E-2	2.71555E1	-3.26669E1	-3.26134E1	2.67956E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.17466E-1	-7.98726E-1	-9.13081E0	-9.14207E0	4.673E-3	9.34601E-2	2.72528E1	-3.26807E1	-3.26368E1	2.67944E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9926E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.16989E-1	-7.98726E-1	-9.13105E0	-9.14199E0	4.64916E-3	9.33409E-2	2.73802E1	-3.26873E1	-3.2638E1	2.68028E1	1.20017E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.17084E-1	-7.9875E-1	-9.13117E0	-9.14221E0	4.93526E-3	9.36747E-2	2.71741E1	-3.26657E1	-3.26308E1	2.68202E1	1.20363E-7	2.51739E-3	2.51739E-3	6.29128E-3	3.00197E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.17251E-1	-7.98655E-1	-9.13122E0	-9.14218E0	4.673E-3	9.37223E-2	2.73677E1	-3.26654E1	-3.26671E1	2.68302E1	1.20137E-7	2.5147E-3	2.5147E-3	6.32418E-3	3.00942E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.17132E-1	-7.98821E-1	-9.13086E0	-9.14221E0	4.64916E-3	9.37939E-2	2.72046E1	-3.26759E1	-3.26191E1	2.67814E1	1.20142E-7	2.51603E-3	2.51603E-3	6.32328E-3	3.00852E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.16965E-1	-7.98583E-1	-9.131E0	-9.1423E0	5.07832E-3	9.33647E-2	2.74302E1	-3.26608E1	-3.26366E1	2.6795E1	1.20045E-7	2.51838E-3	2.51838E-3	6.3245E-3	3.01881E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.17275E-1	-7.98798E-1	-9.13105E0	-9.14216E0	5.19753E-3	9.36985E-2	2.74541E1	-3.26717E1	-3.26212E1	2.68169E1	1.20055E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.01738E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.17323E-1	-7.99108E-1	-9.13095E0	-9.14202E0	4.79221E-3	9.33409E-2	2.74219E1	-3.26644E1	-3.26472E1	2.6843E1	1.19861E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.9926E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.17585E-1	-7.99131E-1	-9.13105E0	-9.14195E0	4.86374E-3	9.34601E-2	2.73153E1	-3.26362E1	-3.26248E1	2.68166E1	1.20106E-7	2.50775E-3	2.50775E-3	6.33436E-3	3.00453E-1