[Scan]
initial_time=2016-01-27T21:41:40
final_time=2016-01-27T21:42:02
ip_count=19
run=1025
dataset=4
scan=260
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08779E-4
ql1_vset=
ql1_vmon=-8.16703E-1
ql1_imon=7.32112E-10
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=3.04854E-10
ql3_vset=
ql3_vmon=-9.13093E0
ql3_imon=8.5789E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=5.14686E-10
mult1=-9.48754E-9
mult2=-2.84476E-9
rf_tmon=-5.02269E-3
rf_agc=3.22532E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=3.81851E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61784E0
bslens_imon=2.56449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19759E1
lens5a_imon=1.97377E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12461E2
lens4a_imon=2.05121E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=2.77944E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02241E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04911E1
cs_ea1_imon=2.58927E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39793E0
lens1_imon=2.74146E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.98018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03861E1
cs_ea2_imon=1.53382E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8461E1
cs_ef1a_imon=2.90918E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=3.93546E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=2.87062E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15075E1
os_ea1_imon=1.88953E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63828E1
os_ef1bup_imon=3.08974E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24207E0
cs_ionrep_imon=1.17599E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93452E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=2.92215E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=7.30848E-10
tplens_vset=1.4E-1
tplens_vmon=1.64615E0
tplens_imon=-2.35178E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26384E1
iondef3_imon=1.49843E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26608E1
iondef2_imon=1.57594E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.98636E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=3.73554E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22614E0
ionrepsh_imon=1.75008E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3374E1
lens5b_imon=2.18614E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.34518E-1
os_ea2_imon=-6.24513E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0607E2
lens4b_imon=2.00506E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.19173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62278E0
os_ef2alow_imon=-2.46093E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.31351E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10925E1
os_restr2_imon=2.86954E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.30495E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.25758E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74083E1
iondef1_imon=1.08113E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68106E1
iondef4_imon=1.08701E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=2.01606E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=2.80643E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-1.78699E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02155E2
cs_ionfocb_imon=1.47295E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56459E1
einzel_imon=7.76713E-6
window_vset=0.0E0
window_vmon=2.34161E-1
window_imon=-9.43659E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.86927E1
mask2_imon=-5.76054E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.79574E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93772E3
defgrida_imon=6.92505E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.31084E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.53404E0
defgridb_imon=6.03665E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33883E1
os_fil1_imon=5.35886E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.10078E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62243E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30597E1
cs_fil1_imon=9.97381E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63555E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62572E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16765E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.00407E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.3933E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.3296E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40651E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21464E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.55087E-1
res40_imon=-2.44651E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.16917E-1	-7.98607E-1	-9.13124E0	-9.14202E0	4.31538E-3	9.36985E-2	2.73283E1	-3.26863E1	-3.26306E1	2.68244E1	1.20106E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.99941E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09379E0	-8.17537E-1	-7.98869E-1	-9.131E0	-9.14223E0	4.673E-3	9.36031E-2	2.72433E1	-3.26695E1	-3.26089E1	2.67908E1	1.198E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.17156E-1	-7.98583E-1	-9.13105E0	-9.14185E0	5.07832E-3	9.3174E-2	2.72692E1	-3.26683E1	-3.26086E1	2.68034E1	1.20137E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.02277E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.17227E-1	-7.98655E-1	-9.13107E0	-9.14199E0	4.88758E-3	9.34362E-2	2.73946E1	-3.26693E1	-3.26458E1	2.67717E1	1.1974E-7	2.51709E-3	2.51709E-3	6.32328E-3	2.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.17275E-1	-7.9875E-1	-9.13088E0	-9.1419E0	4.72069E-3	9.377E-2	2.72065E1	-3.26909E1	-3.26407E1	2.68076E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.98222E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.17323E-1	-7.9906E-1	-9.13138E0	-9.14183E0	4.88758E-3	9.377E-2	2.74192E1	-3.26845E1	-3.26196E1	2.68065E1	1.20084E-7	2.52473E-3	2.52473E-3	6.31299E-3	2.98819E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16989E-1	-7.98821E-1	-9.13131E0	-9.14211E0	4.93526E-3	9.38654E-2	2.74759E1	-3.26425E1	-3.26352E1	2.68106E1	1.19891E-7	2.51919E-3	2.51919E-3	6.32328E-3	2.98092E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.17394E-1	-7.99227E-1	-9.13117E0	-9.1419E0	4.76837E-3	9.35555E-2	2.74573E1	-3.26472E1	-3.26089E1	2.6783E1	1.19913E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.16894E-1	-7.98726E-1	-9.13148E0	-9.14168E0	5.14984E-3	9.37462E-2	2.72331E1	-3.26365E1	-3.26414E1	2.68283E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.1687E-1	-7.98655E-1	-9.13167E0	-9.14187E0	4.76837E-3	9.34601E-2	2.70756E1	-3.26531E1	-3.26425E1	2.68018E1	1.20481E-7	2.51923E-3	2.51923E-3	6.34766E-3	3.00532E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.17227E-1	-7.98631E-1	-9.13146E0	-9.14209E0	4.76837E-3	9.33886E-2	2.72574E1	-3.26536E1	-3.26413E1	2.68058E1	1.2026E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.00966E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.17037E-1	-7.98845E-1	-9.13122E0	-9.14185E0	5.10216E-3	9.3627E-2	2.71564E1	-3.26703E1	-3.25812E1	2.68286E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.16631E-1	-7.98917E-1	-9.13131E0	-9.14209E0	5.05447E-3	9.37462E-2	2.7149E1	-3.26823E1	-3.26352E1	2.67926E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.17084E-1	-7.98869E-1	-9.13119E0	-9.14207E0	4.86374E-3	9.36985E-2	2.72634E1	-3.26498E1	-3.26463E1	2.6814E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09356E0	-8.17084E-1	-7.98821E-1	-9.13136E0	-9.14195E0	4.93526E-3	9.41515E-2	2.72054E1	-3.26494E1	-3.26603E1	2.67684E1	1.20106E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.1718E-1	-7.98178E-1	-9.13112E0	-9.14223E0	4.76837E-3	9.38177E-2	2.71077E1	-3.26794E1	-3.26277E1	2.68065E1	1.20487E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9978E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.1706E-1	-7.98535E-1	-9.13086E0	-9.14178E0	4.8399E-3	9.38892E-2	2.7179E1	-3.26585E1	-3.26193E1	2.6797E1	1.20146E-7	2.51823E-3	2.51823E-3	6.29738E-3	2.99816E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-8.16822E-1	-7.98368E-1	-9.13091E0	-9.14171E0	4.52995E-3	9.39846E-2	2.73496E1	-3.26777E1	-3.2632E1	2.68206E1	1.20137E-7	2.51915E-3	2.51915E-3	6.34099E-3	3.01742E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.17037E-1	-7.98416E-1	-9.13098E0	-9.14183E0	4.45843E-3	9.38416E-2	2.74697E1	-3.26933E1	-3.2614E1	2.67864E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.16703E-1	-7.98559E-1	-9.13093E0	-9.14197E0	4.48227E-3	9.36985E-2	2.74083E1	-3.26608E1	-3.26384E1	2.68106E1	1.19851E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.0148E-1