[Scan]
initial_time=2016-01-27T21:42:10
final_time=2016-01-27T21:42:31
ip_count=19
run=1025
dataset=4
scan=261
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08837E-4
ql1_vset=
ql1_vmon=-8.1706E-1
ql1_imon=6.7755E-10
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=3.18813E-10
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=7.75659E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=5.25284E-10
mult1=-9.98405E-9
mult2=-2.79577E-9
rf_tmon=-3.87828E-3
rf_agc=3.31557E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=3.79336E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64203E0
bslens_imon=2.56095E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19712E1
lens5a_imon=1.99218E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.05203E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5382E1
cs_ef1b_imon=2.76971E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02425E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04911E1
cs_ea1_imon=2.57724E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3702E0
lens1_imon=2.75916E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=3.00072E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03867E1
cs_ea2_imon=1.51294E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.847E1
cs_ef1a_imon=2.90233E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=4.13442E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11147E1
os_restr1_imon=2.8872E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15241E1
os_ea1_imon=1.8867E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21729E0
cs_ionrep_imon=1.20253E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93583E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=2.90377E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=7.16484E-10
tplens_vset=1.4E-1
tplens_vmon=1.65854E0
tplens_imon=-1.89165E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26189E1
iondef3_imon=1.48285E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26679E1
iondef2_imon=1.57523E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98463E-4
ql6_vset=1.0E-1
ql6_vmon=9.39608E-2
ql6_imon=4.09007E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26213E0
ionrepsh_imon=1.74866E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33787E1
lens5b_imon=2.17622E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74459E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.42187E-1
os_ea2_imon=-4.47542E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00725E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71102E1
cs_ef2a_imon=3.20362E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63059E0
os_ef2alow_imon=-2.5222E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.26546E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10835E1
os_restr2_imon=2.86918E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.30176E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.24677E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71069E1
iondef1_imon=1.0921E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68166E1
iondef4_imon=1.08125E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.03291E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=2.75338E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11512E0
cs_ionaccel_imon=-1.72572E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47352E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.52181E-1
window_imon=-8.93203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86801E1
mask2_imon=-5.58035E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.63647E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.47908E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.325E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.56947E0
defgridb_imon=6.04019E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33877E1
os_fil1_imon=4.22962E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.64738E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6208E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30633E1
cs_fil1_imon=9.97987E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63561E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62392E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06635E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.81826E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.30092E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.19745E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19028E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21527E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.96243E-1
res40_imon=-2.48976E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=224
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16917E-1	-7.9844E-1	-9.13103E0	-9.14178E0	5.07832E-3	9.38416E-2	2.74679E1	-3.26602E1	-3.26408E1	2.68157E1	1.20158E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00197E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09627E0	-8.16774E-1	-7.98917E-1	-9.13098E0	-9.1418E0	4.69685E-3	9.39131E-2	2.72537E1	-3.26303E1	-3.26278E1	2.68214E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16917E-1	-7.98631E-1	-9.13105E0	-9.14185E0	5.17368E-3	9.36747E-2	2.71092E1	-3.26627E1	-3.26344E1	2.68034E1	1.19713E-7	2.51915E-3	2.51915E-3	6.27954E-3	3.02813E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.1718E-1	-7.98702E-1	-9.13136E0	-9.1418E0	4.8399E-3	9.35316E-2	2.71044E1	-3.26362E1	-3.26116E1	2.68352E1	1.19953E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.16822E-1	-7.9875E-1	-9.13129E0	-9.14187E0	4.45843E-3	9.37939E-2	2.71765E1	-3.26673E1	-3.2649E1	2.68118E1	1.20069E-7	2.51007E-3	2.51007E-3	6.33486E-3	2.9952E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.16989E-1	-7.98392E-1	-9.13103E0	-9.14187E0	4.86374E-3	9.38416E-2	2.73381E1	-3.26669E1	-3.262E1	2.68106E1	1.20122E-7	2.52428E-3	2.52428E-3	6.32386E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.17013E-1	-7.9875E-1	-9.13115E0	-9.14168E0	4.91142E-3	9.35316E-2	2.74902E1	-3.26693E1	-3.26266E1	2.68094E1	1.19965E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.16607E-1	-7.98798E-1	-9.131E0	-9.1418E0	4.62532E-3	9.39846E-2	2.74787E1	-3.26681E1	-3.25876E1	2.68016E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16655E-1	-7.9875E-1	-9.13084E0	-9.1419E0	4.60148E-3	9.38416E-2	2.72237E1	-3.26328E1	-3.26123E1	2.68496E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.02659E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09642E0	-8.16751E-1	-7.99036E-1	-9.13081E0	-9.14197E0	4.72069E-3	9.36508E-2	2.72851E1	-3.26366E1	-3.26491E1	2.68157E1	1.1993E-7	2.52509E-3	2.52509E-3	6.3074E-3	3.00494E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.17108E-1	-7.9875E-1	-9.13093E0	-9.14197E0	4.76837E-3	9.35555E-2	2.72426E1	-3.26591E1	-3.26026E1	2.68172E1	1.20005E-7	2.51874E-3	2.51874E-3	6.31902E-3	2.99535E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.17132E-1	-7.98583E-1	-9.13091E0	-9.14195E0	4.91142E-3	9.36508E-2	2.74193E1	-3.26831E1	-3.2629E1	2.68298E1	1.20017E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.17275E-1	-7.98821E-1	-9.13093E0	-9.1419E0	4.98295E-3	9.37462E-2	2.73345E1	-3.27017E1	-3.26675E1	2.6816E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.16631E-1	-7.98798E-1	-9.13081E0	-9.14192E0	4.57764E-3	9.35793E-2	2.72793E1	-3.26705E1	-3.2623E1	2.67944E1	1.19809E-7	2.51007E-3	2.51007E-3	6.29098E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.16989E-1	-7.98726E-1	-9.13091E0	-9.14202E0	5.03063E-3	9.36747E-2	2.72473E1	-3.26797E1	-3.26419E1	2.68034E1	1.20209E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.99175E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16917E-1	-7.98965E-1	-9.13074E0	-9.14195E0	4.69685E-3	9.36031E-2	2.7357E1	-3.26644E1	-3.26543E1	2.6819E1	1.20174E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00563E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.17299E-1	-7.98845E-1	-9.13091E0	-9.14171E0	4.86374E-3	9.3627E-2	2.72282E1	-3.26524E1	-3.26404E1	2.67836E1	1.20158E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.99941E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.17204E-1	-7.98917E-1	-9.13115E0	-9.14185E0	4.81606E-3	9.38416E-2	2.74257E1	-3.26701E1	-3.26125E1	2.6801E1	1.20278E-7	2.52977E-3	2.52977E-3	6.30192E-3	3.02922E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.16894E-1	-7.98869E-1	-9.1311E0	-9.14199E0	4.95911E-3	9.36747E-2	2.72632E1	-3.26248E1	-3.26296E1	2.68041E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.03185E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.1706E-1	-7.98631E-1	-9.1315E0	-9.14199E0	4.81606E-3	9.39608E-2	2.71069E1	-3.26679E1	-3.26189E1	2.68166E1	1.20158E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.02253E-1