[Scan]
initial_time=2016-01-27T21:43:09
final_time=2016-01-27T21:43:30
ip_count=19
run=1025
dataset=4
scan=263
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08844E-4
ql1_vset=
ql1_vmon=-8.1687E-1
ql1_imon=7.5289E-10
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=3.08609E-10
ql3_vset=
ql3_vmon=-9.13093E0
ql3_imon=8.68881E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=5.62835E-10
mult1=-9.77126E-9
mult2=-2.84084E-9
rf_tmon=-5.5772E-3
rf_agc=3.23063E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=3.82221E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64734E0
bslens_imon=2.43708E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19571E1
lens5a_imon=1.9766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05231E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53784E1
cs_ef1b_imon=2.77908E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02234E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04858E1
cs_ea1_imon=2.5783E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38731E0
lens1_imon=2.84765E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.99748E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03909E1
cs_ea2_imon=1.54798E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84785E1
cs_ef1a_imon=2.90053E-5
olens2_vset=9.7E-1
olens2_vmon=9.7065E-1
olens2_imon=4.00889E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=2.88647E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15282E1
os_ea1_imon=1.87113E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63503E1
os_ef1bup_imon=3.09082E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23145E0
cs_ionrep_imon=1.18024E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01701E1
cs_anode1_imon=2.91495E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=6.95932E-10
tplens_vset=1.4E-1
tplens_vmon=1.64202E0
tplens_imon=-1.50232E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26219E1
iondef3_imon=1.49878E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26667E1
iondef2_imon=1.60178E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98445E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=4.2032E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25505E0
ionrepsh_imon=1.75327E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33504E1
lens5b_imon=2.1787E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.13695E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.33928E-1
os_ea2_imon=-5.04173E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.20002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62819E0
os_ef2alow_imon=-2.49336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.21741E-1
os_ef2bup_imon=-5.20355E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10757E1
os_restr2_imon=2.86629E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23027E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.2374E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7429E1
iondef1_imon=1.09989E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67943E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=2.03067E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=2.65849E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11212E0
cs_ionaccel_imon=-1.85546E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56189E1
einzel_imon=7.82839E-6
window_vset=0.0E0
window_vmon=2.32359E-1
window_imon=-1.01934E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.86764E1
mask2_imon=-5.76054E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.26483E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.37998E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.48073E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.68168E0
defgridb_imon=6.20301E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33886E1
os_fil1_imon=5.06454E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.3891E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62301E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30633E1
cs_fil1_imon=9.9538E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63357E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62652E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09167E-2
os_fil2_imon=-2.37765E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.89945E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.44772E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.38966E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11219E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21594E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00916E-1
chamber_ion_pmon=1.1995E-7
chamber_cvt_pmon=2.51527E-3
foreline_cvt_pmon=2.51527E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.51193E-1
res40_imon=-2.4393E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=198
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16965E-1	-7.98893E-1	-9.13124E0	-9.14185E0	4.48227E-3	9.40323E-2	2.72514E1	-3.26915E1	-3.26136E1	2.68124E1	1.20414E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.00197E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.16941E-1	-7.98869E-1	-9.13122E0	-9.1419E0	4.64916E-3	9.39369E-2	2.73248E1	-3.26938E1	-3.26422E1	2.67953E1	1.20226E-7	2.51225E-3	2.51225E-3	6.29098E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.16727E-1	-7.98345E-1	-9.13134E0	-9.14199E0	4.76837E-3	9.36985E-2	2.72095E1	-3.2636E1	-3.2629E1	2.67932E1	1.20276E-7	2.52717E-3	2.52717E-3	6.33341E-3	3.01485E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.16798E-1	-7.98869E-1	-9.13122E0	-9.14168E0	4.57764E-3	9.36747E-2	2.73535E1	-3.26493E1	-3.25997E1	2.68016E1	1.20174E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00302E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.16965E-1	-7.98678E-1	-9.13124E0	-9.14197E0	4.64916E-3	9.3627E-2	2.75092E1	-3.26549E1	-3.26083E1	2.68034E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.1706E-1	-7.99155E-1	-9.13124E0	-9.1418E0	4.45843E-3	9.40561E-2	2.74349E1	-3.26425E1	-3.26058E1	2.68262E1	1.20278E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.16751E-1	-7.98988E-1	-9.13112E0	-9.1419E0	4.50611E-3	9.39608E-2	2.73039E1	-3.26518E1	-3.26524E1	2.68244E1	1.20122E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.1687E-1	-7.99084E-1	-9.13117E0	-9.14197E0	4.52995E-3	9.36985E-2	2.73193E1	-3.26437E1	-3.2613E1	2.68028E1	1.20174E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.16464E-1	-7.99322E-1	-9.13129E0	-9.14197E0	4.93526E-3	9.3627E-2	2.72943E1	-3.26248E1	-3.26164E1	2.67962E1	1.20174E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.1687E-1	-7.98965E-1	-9.13124E0	-9.14209E0	4.88758E-3	9.377E-2	2.73237E1	-3.26789E1	-3.2623E1	2.67776E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00453E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.17204E-1	-7.99203E-1	-9.13103E0	-9.14199E0	4.76837E-3	9.40084E-2	2.72498E1	-3.26687E1	-3.26122E1	2.67944E1	1.19925E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.00676E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.16965E-1	-7.99084E-1	-9.1311E0	-9.14202E0	4.79221E-3	9.37223E-2	2.73081E1	-3.26867E1	-3.25972E1	2.67824E1	1.20311E-7	2.51203E-3	2.51203E-3	6.32356E-3	2.9841E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-8.16822E-1	-7.99084E-1	-9.13105E0	-9.14209E0	4.86374E-3	9.35078E-2	2.72588E1	-3.26194E1	-3.27077E1	2.68028E1	1.20174E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.9874E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.1687E-1	-7.99227E-1	-9.131E0	-9.14207E0	4.8399E-3	9.3317E-2	2.7311E1	-3.26596E1	-3.26242E1	2.67469E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9874E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.16917E-1	-7.99274E-1	-9.13103E0	-9.14199E0	4.88758E-3	9.34839E-2	2.73375E1	-3.26482E1	-3.26422E1	2.68124E1	1.20383E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.98481E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.17204E-1	-7.98583E-1	-9.13105E0	-9.14166E0	5.126E-3	9.3627E-2	2.71771E1	-3.26464E1	-3.25852E1	2.68088E1	1.20069E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00041E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.16965E-1	-7.98821E-1	-9.13098E0	-9.14195E0	4.98295E-3	9.3627E-2	2.74093E1	-3.26607E1	-3.26573E1	2.68233E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99175E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16989E-1	-7.98845E-1	-9.13098E0	-9.1419E0	5.126E-3	9.35793E-2	2.72613E1	-3.26408E1	-3.2597E1	2.67914E1	1.20293E-7	2.51814E-3	2.51814E-3	6.29157E-3	2.98842E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-8.16965E-1	-7.98941E-1	-9.131E0	-9.14204E0	4.93526E-3	9.34124E-2	2.72421E1	-3.26368E1	-3.26394E1	2.67995E1	1.20226E-7	2.51369E-3	2.51369E-3	6.3126E-3	3.00247E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.1687E-1	-7.98392E-1	-9.13093E0	-9.14185E0	4.98295E-3	9.36031E-2	2.7429E1	-3.26667E1	-3.26219E1	2.67943E1	1.1995E-7	2.51527E-3	2.51527E-3	6.3074E-3	3.00916E-1