[Scan]
initial_time=2016-01-27T21:44:08
final_time=2016-01-27T21:44:29
ip_count=19
run=1025
dataset=4
scan=265
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08794E-4
ql1_vset=
ql1_vmon=-8.16989E-1
ql1_imon=7.57194E-10
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=3.05283E-10
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=8.04663E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=5.44858E-10
mult1=-1.00414E-8
mult2=-2.6747E-9
rf_tmon=-3.78543E-3
rf_agc=3.32134E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=3.84223E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65678E0
bslens_imon=2.51848E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19795E1
lens5a_imon=1.98616E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12457E2
lens4a_imon=2.05061E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53569E1
cs_ef1b_imon=2.76705E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04587E2
lens23_imon=1.02422E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=2.5914E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36312E0
lens1_imon=2.50079E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64788E1
os_ef1alow_imon=2.986E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03932E1
cs_ea2_imon=1.53807E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84446E1
cs_ef1a_imon=2.90016E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=3.93844E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11152E1
os_restr1_imon=2.87757E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15748E1
os_ea1_imon=1.88776E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63769E1
os_ef1bup_imon=3.09616E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24738E0
cs_ionrep_imon=1.19652E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93555E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=2.90537E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=7.43818E-10
tplens_vset=1.4E-1
tplens_vmon=1.63258E0
tplens_imon=-1.96244E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26416E1
iondef3_imon=1.49206E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2641E1
iondef2_imon=1.58302E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02908E2
lens6_imon=2.98512E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=3.55339E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26095E0
ionrepsh_imon=1.75893E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34012E1
lens5b_imon=2.19251E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7471E1
cs_ef2b_imon=3.13057E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.39237E-1
os_ea2_imon=-6.17434E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00577E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71107E1
cs_ef2a_imon=3.19416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6384E0
os_ef2alow_imon=-2.54678E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.51473E-1
os_ef2bup_imon=-5.24705E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10764E1
os_restr2_imon=2.86714E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.31202E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01804E1
cs_anode2_imon=2.23221E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72582E1
iondef1_imon=1.10166E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68007E1
iondef4_imon=1.09233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.00427E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=2.84529E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11798E0
cs_ionaccel_imon=-1.7718E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47264E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56139E1
einzel_imon=7.84075E-6
window_vset=0.0E0
window_vmon=2.20003E-1
window_imon=-9.41213E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39112E-4
mask2_vset=0.0E0
mask2_vmon=-1.86802E1
mask2_imon=-7.04896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.29668E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93752E3
defgrida_imon=6.741E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.11263E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.71712E0
defgridb_imon=6.06143E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33903E1
os_fil1_imon=5.3181E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.80291E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62483E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30574E1
cs_fil1_imon=9.973E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63924E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62484E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16765E-2
os_fil2_imon=-2.49542E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.33493E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.24777E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.309E-1
cs_fil2_imon=-2.33904E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02617E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21364E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.97704E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.1481E-1
res40_imon=-2.33131E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-8.16727E-1	-7.98941E-1	-9.13131E0	-9.14183E0	4.36306E-3	9.3627E-2	2.73165E1	-3.26536E1	-3.26735E1	2.67872E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.97647E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.17037E-1	-7.98726E-1	-9.13105E0	-9.14207E0	4.26769E-3	9.36747E-2	2.7203E1	-3.26567E1	-3.25918E1	2.67956E1	1.20174E-7	2.52099E-3	2.52099E-3	6.31014E-3	2.98481E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.16941E-1	-7.98535E-1	-9.13107E0	-9.14214E0	4.79221E-3	9.3627E-2	2.737E1	-3.26648E1	-3.26637E1	2.68094E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.16822E-1	-7.98655E-1	-9.1311E0	-9.14185E0	4.76837E-3	9.36508E-2	2.73183E1	-3.26428E1	-3.26098E1	2.67944E1	1.20078E-7	2.52301E-3	2.52301E-3	6.31779E-3	3.00741E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.17156E-1	-7.98607E-1	-9.13138E0	-9.14195E0	4.86374E-3	9.36031E-2	2.72084E1	-3.26585E1	-3.26152E1	2.681E1	1.20017E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.16941E-1	-7.98869E-1	-9.13105E0	-9.14195E0	5.14984E-3	9.37462E-2	2.73934E1	-3.26585E1	-3.2632E1	2.68046E1	1.20278E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09379E0	-8.16727E-1	-7.98321E-1	-9.13117E0	-9.1418E0	4.72069E-3	9.36747E-2	2.7251E1	-3.26849E1	-3.26236E1	2.68268E1	1.20174E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.16846E-1	-7.98464E-1	-9.13126E0	-9.14223E0	4.8399E-3	9.36747E-2	2.72742E1	-3.26558E1	-3.25888E1	2.68017E1	1.20174E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.16822E-1	-7.98512E-1	-9.13107E0	-9.14228E0	4.86374E-3	9.40084E-2	2.73084E1	-3.26721E1	-3.26439E1	2.67994E1	1.20132E-7	2.514E-3	2.514E-3	6.32716E-3	3.00197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.16703E-1	-7.98774E-1	-9.13105E0	-9.14204E0	4.88758E-3	9.40084E-2	2.73751E1	-3.26473E1	-3.26138E1	2.67829E1	1.20011E-7	2.51793E-3	2.51793E-3	6.31586E-3	3.006E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.16369E-1	-7.98893E-1	-9.13115E0	-9.14221E0	4.72069E-3	9.35078E-2	2.72318E1	-3.26506E1	-3.2635E1	2.68196E1	1.20014E-7	2.51736E-3	2.51736E-3	6.27883E-3	3.00016E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.16655E-1	-7.98941E-1	-9.13098E0	-9.14192E0	4.57764E-3	9.36031E-2	2.73417E1	-3.26338E1	-3.26506E1	2.67896E1	1.2026E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99175E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09371E0	-8.16822E-1	-7.98631E-1	-9.13107E0	-9.14233E0	5.03063E-3	9.37223E-2	2.72733E1	-3.26699E1	-3.25972E1	2.68052E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9874E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.16846E-1	-7.98678E-1	-9.13093E0	-9.14197E0	4.62532E-3	9.36508E-2	2.73452E1	-3.26655E1	-3.26408E1	2.68151E1	1.20278E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.16989E-1	-7.98583E-1	-9.13119E0	-9.14199E0	4.79221E-3	9.33886E-2	2.73339E1	-3.26842E1	-3.26578E1	2.68163E1	1.20106E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.99941E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.1718E-1	-7.9875E-1	-9.13117E0	-9.14235E0	5.126E-3	9.35316E-2	2.72874E1	-3.26732E1	-3.25959E1	2.68169E1	1.20137E-7	2.5147E-3	2.5147E-3	6.32978E-3	3.00144E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.16894E-1	-7.9875E-1	-9.13119E0	-9.14214E0	4.60148E-3	9.34124E-2	2.71363E1	-3.26711E1	-3.26813E1	2.68118E1	1.20209E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.16584E-1	-7.98845E-1	-9.13117E0	-9.1423E0	4.60148E-3	9.377E-2	2.737E1	-3.26915E1	-3.26402E1	2.68292E1	1.20122E-7	2.51552E-3	2.51552E-3	6.28552E-3	3.02659E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.16417E-1	-7.98726E-1	-9.13117E0	-9.14211E0	4.76837E-3	9.34601E-2	2.73635E1	-3.26732E1	-3.25723E1	2.67998E1	1.20004E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16989E-1	-7.98678E-1	-9.13117E0	-9.14197E0	4.81606E-3	9.34601E-2	2.72582E1	-3.2641E1	-3.26416E1	2.68007E1	1.19965E-7	2.52428E-3	2.52428E-3	6.30192E-3	2.97704E-1