[Scan]
initial_time=2016-01-27T21:45:07
final_time=2016-01-27T21:45:28
ip_count=19
run=1025
dataset=4
scan=267
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.0882E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=6.4311E-10
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=3.07858E-10
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=7.54619E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=5.42629E-10
mult1=-9.58211E-9
mult2=-2.80165E-9
rf_tmon=-4.50358E-3
rf_agc=3.30495E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=3.78311E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6786E0
bslens_imon=2.66006E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19948E1
lens5a_imon=1.9943E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=2.75889E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02234E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04764E1
cs_ea1_imon=2.57724E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37433E0
lens1_imon=2.50079E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=3.00396E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03879E1
cs_ea2_imon=1.54019E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83739E1
cs_ef1a_imon=2.89693E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=3.90005E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1122E1
os_restr1_imon=2.88395E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15193E1
os_ea1_imon=1.87573E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63918E1
os_ef1bup_imon=3.09046E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27097E0
cs_ionrep_imon=1.17599E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.9348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01659E1
cs_anode1_imon=2.92071E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=7.72321E-10
tplens_vset=1.4E-1
tplens_vmon=1.60722E0
tplens_imon=-2.31638E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26183E1
iondef3_imon=1.50197E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26213E1
iondef2_imon=1.58019E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98282E-4
ql6_vset=1.0E-1
ql6_vmon=9.40084E-2
ql6_imon=3.77297E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25623E0
ionrepsh_imon=1.74725E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33587E1
lens5b_imon=2.17552E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.2331E-1
os_ea2_imon=-5.00633E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00499E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.19497E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61858E0
os_ef2alow_imon=-2.50418E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40361E-1
os_ef2bup_imon=-5.18913E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=2.86521E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.31273E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.24172E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73718E1
iondef1_imon=1.09741E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6792E1
iondef4_imon=1.09422E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.0038E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=2.84982E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12353E0
cs_ionaccel_imon=-1.52029E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56387E1
einzel_imon=7.832E-6
window_vset=0.0E0
window_vmon=2.29356E-1
window_imon=-1.11305E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39286E-4
mask2_vset=0.0E0
mask2_vmon=-1.86626E1
mask2_imon=-6.58946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.35685E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.33396E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.53029E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.60491E0
defgridb_imon=6.17469E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3387E1
os_fil1_imon=3.95332E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.69543E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62239E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3062E1
cs_fil1_imon=9.96029E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63507E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62456E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16765E-2
os_fil2_imon=-2.36564E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.0341E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.25409E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28357E-1
cs_fil2_imon=-2.08933E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55668E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21498E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32328E-3
inlet_lpb_pmon=3.006E-1
chamber_ion_pmon=1.20092E-7
chamber_cvt_pmon=2.51393E-3
foreline_cvt_pmon=2.51393E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.7582E-1
res40_imon=-2.41768E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.15988E-1	-7.98488E-1	-9.131E0	-9.14214E0	5.14984E-3	9.35555E-2	2.72656E1	-3.26213E1	-3.26166E1	2.67955E1	1.19953E-7	2.51632E-3	2.51632E-3	6.33977E-3	3.0148E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.16488E-1	-7.98798E-1	-9.13126E0	-9.14173E0	4.81606E-3	9.37939E-2	2.72254E1	-3.26624E1	-3.26556E1	2.67752E1	1.20106E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.16393E-1	-7.98559E-1	-9.13122E0	-9.14185E0	5.07832E-3	9.35793E-2	2.73916E1	-3.2689E1	-3.26082E1	2.683E1	1.20177E-7	2.5199E-3	2.5199E-3	6.30221E-3	3.00741E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.16321E-1	-7.98345E-1	-9.13084E0	-9.14183E0	4.93526E-3	9.35316E-2	2.73493E1	-3.26767E1	-3.26313E1	2.6825E1	1.2006E-7	2.51527E-3	2.51527E-3	6.29581E-3	3.0147E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.1656E-1	-7.98368E-1	-9.13084E0	-9.14185E0	4.60148E-3	9.33647E-2	2.72859E1	-3.26717E1	-3.26506E1	2.67914E1	1.19953E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16107E-1	-7.98774E-1	-9.13069E0	-9.14195E0	4.79221E-3	9.36031E-2	2.72803E1	-3.26691E1	-3.2603E1	2.6785E1	1.20174E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16274E-1	-7.98583E-1	-9.13084E0	-9.14221E0	4.81606E-3	9.34362E-2	2.72329E1	-3.26597E1	-3.26548E1	2.67914E1	1.19851E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16751E-1	-7.98488E-1	-9.13105E0	-9.14185E0	5.00679E-3	9.34124E-2	2.71653E1	-3.26655E1	-3.26142E1	2.68265E1	1.20244E-7	2.5147E-3	2.5147E-3	6.32978E-3	3.00676E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.16464E-1	-7.99227E-1	-9.1311E0	-9.14202E0	5.05447E-3	9.35555E-2	2.71369E1	-3.26494E1	-3.26543E1	2.6771E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.02769E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-8.16488E-1	-7.98965E-1	-9.13103E0	-9.14168E0	4.76837E-3	9.35793E-2	2.7093E1	-3.26777E1	-3.26104E1	2.68238E1	1.20069E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.16417E-1	-7.9875E-1	-9.13112E0	-9.14171E0	4.88758E-3	9.36031E-2	2.7262E1	-3.26862E1	-3.25953E1	2.6804E1	1.2033E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09387E0	-8.16321E-1	-7.98368E-1	-9.13122E0	-9.14178E0	4.86374E-3	9.34362E-2	2.72222E1	-3.26314E1	-3.2638E1	2.6783E1	1.20004E-7	2.52815E-3	2.52815E-3	6.31817E-3	2.9841E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.16345E-1	-7.98917E-1	-9.13172E0	-9.14187E0	4.8399E-3	9.34839E-2	2.73021E1	-3.26508E1	-3.2659E1	2.67686E1	1.20278E-7	2.52428E-3	2.52428E-3	6.34037E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09394E0	-8.16369E-1	-7.98559E-1	-9.13162E0	-9.14211E0	4.8399E-3	9.33409E-2	2.74502E1	-3.26785E1	-3.25959E1	2.6803E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.01738E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.16441E-1	-7.99108E-1	-9.13134E0	-9.14209E0	4.57764E-3	9.33886E-2	2.71675E1	-3.26434E1	-3.26266E1	2.68184E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00453E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.16894E-1	-7.98512E-1	-9.13112E0	-9.1424E0	4.673E-3	9.35078E-2	2.73346E1	-3.26815E1	-3.26248E1	2.67827E1	1.20174E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00041E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.16607E-1	-7.98535E-1	-9.13129E0	-9.14233E0	4.19617E-3	9.33886E-2	2.72552E1	-3.26374E1	-3.26134E1	2.681E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00453E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.16154E-1	-7.98607E-1	-9.13138E0	-9.14218E0	4.79221E-3	9.34839E-2	2.73098E1	-3.26301E1	-3.26496E1	2.67854E1	1.20069E-7	2.5199E-3	2.5199E-3	6.34588E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09364E0	-8.16011E-1	-7.98702E-1	-9.13134E0	-9.14204E0	4.43459E-3	9.32455E-2	2.71666E1	-3.26596E1	-3.2637E1	2.68337E1	1.20209E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.0071E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.16464E-1	-7.98416E-1	-9.1315E0	-9.14185E0	4.673E-3	9.40084E-2	2.73718E1	-3.26213E1	-3.26183E1	2.6792E1	1.20092E-7	2.51393E-3	2.51393E-3	6.32328E-3	3.006E-1