[Scan]
initial_time=2016-01-27T21:46:31
final_time=2016-01-27T21:46:51
ip_count=19
run=1025
dataset=4
scan=270
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08766E-4
ql1_vset=
ql1_vmon=-8.16846E-1
ql1_imon=7.18796E-10
ql2_vset=
ql2_vmon=-7.98702E-1
ql2_imon=3.4169E-10
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=7.24995E-10
ql4_vset=
ql4_vmon=-9.14209E0
ql4_imon=5.59545E-10
mult1=-1.02461E-8
mult2=-2.83638E-9
rf_tmon=-5.06518E-3
rf_agc=3.25825E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=4.24302E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65953E0
bslens_imon=2.74323E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19695E1
lens5a_imon=1.9874E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05042E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=2.75277E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02016E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04844E1
cs_ea1_imon=2.56635E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37316E0
lens1_imon=2.55217E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64554E1
os_ef1alow_imon=2.99784E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03792E1
cs_ea2_imon=1.55372E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83902E1
cs_ef1a_imon=2.89981E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=4.0704E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11664E1
os_restr1_imon=2.87963E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15414E1
os_ea1_imon=1.89223E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63569E1
os_ef1bup_imon=3.10199E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2515E0
cs_ionrep_imon=1.19935E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93492E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=2.9236E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=6.8109E-10
tplens_vset=1.4E-1
tplens_vmon=1.66126E0
tplens_imon=-2.95741E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.265E1
iondef3_imon=1.4773E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26549E1
iondef2_imon=1.57175E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.98508E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.85094E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2509E0
ionrepsh_imon=1.7383E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33724E1
lens5b_imon=2.19252E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74784E1
cs_ef2b_imon=3.12001E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.55328E-1
os_ea2_imon=-7.28335E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00583E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71047E1
cs_ef2a_imon=3.18128E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61798E0
os_ef2alow_imon=-2.40327E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.50572E-1
os_ef2bup_imon=-5.19994E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=2.86593E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01773E1
cs_anode2_imon=2.25974E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73826E1
iondef1_imon=1.11896E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67885E1
iondef4_imon=1.09242E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.09275E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=3.34513E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08029E0
cs_ionaccel_imon=-1.64643E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02179E2
cs_ionfocb_imon=1.47352E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56633E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=2.65996E-1
window_imon=-8.24728E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86915E1
mask2_imon=-5.50827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92689E3
multa_neg_imon=7.02952E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.84928E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50105E3
multb_neg_imon=7.32513E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.50959E0
defgridb_imon=6.25085E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33898E1
os_fil1_imon=4.04942E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.299E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62477E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30641E1
cs_fil1_imon=9.96708E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63081E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62501E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.36346E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.07965E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.36349E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.35362E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37648E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21466E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=3.006E-1
chamber_ion_pmon=1.20192E-7
chamber_cvt_pmon=2.52025E-3
foreline_cvt_pmon=2.52025E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.10949E-1
res40_imon=-2.40327E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.16536E-1	-7.98798E-1	-9.13136E0	-9.14183E0	4.86374E-3	9.38177E-2	2.72396E1	-3.26669E1	-3.25936E1	2.68178E1	1.19965E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00041E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16369E-1	-7.99084E-1	-9.13155E0	-9.14199E0	5.22137E-3	9.3627E-2	2.73806E1	-3.26726E1	-3.26065E1	2.6783E1	1.20106E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.01223E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.16512E-1	-7.98917E-1	-9.13143E0	-9.14228E0	5.14984E-3	9.39131E-2	2.72396E1	-3.26655E1	-3.26337E1	2.6807E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.02396E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.16584E-1	-7.98893E-1	-9.13146E0	-9.14197E0	4.95911E-3	9.37939E-2	2.73132E1	-3.26782E1	-3.26121E1	2.68048E1	1.19953E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.16417E-1	-7.98893E-1	-9.1315E0	-9.14223E0	5.00679E-3	9.39369E-2	2.73026E1	-3.26833E1	-3.26266E1	2.679E1	1.20394E-7	2.51919E-3	2.51919E-3	6.32328E-3	2.99845E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.16393E-1	-7.98798E-1	-9.13119E0	-9.14199E0	4.95911E-3	9.37223E-2	2.73187E1	-3.26537E1	-3.26349E1	2.68094E1	1.20226E-7	2.52802E-3	2.52802E-3	6.31321E-3	2.97887E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.16274E-1	-7.98845E-1	-9.13124E0	-9.14214E0	4.86374E-3	9.38177E-2	2.73105E1	-3.26512E1	-3.26639E1	2.67824E1	1.20055E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.97901E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.1625E-1	-7.98845E-1	-9.1315E0	-9.14156E0	4.79221E-3	9.36508E-2	2.73435E1	-3.2629E1	-3.26374E1	2.6836E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.16321E-1	-7.98774E-1	-9.13103E0	-9.14166E0	4.88758E-3	9.377E-2	2.72871E1	-3.26771E1	-3.2611E1	2.6789E1	1.19913E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.16798E-1	-7.98583E-1	-9.13098E0	-9.14173E0	4.79221E-3	9.38654E-2	2.72889E1	-3.26434E1	-3.26645E1	2.6795E1	1.20209E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.99686E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16798E-1	-7.99155E-1	-9.13115E0	-9.14183E0	4.74453E-3	9.39369E-2	2.73163E1	-3.2662E1	-3.26649E1	2.67926E1	1.19978E-7	2.51693E-3	2.51693E-3	6.34661E-3	2.98819E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16607E-1	-7.98678E-1	-9.13107E0	-9.14183E0	4.98295E-3	9.34124E-2	2.73232E1	-3.26836E1	-3.26203E1	2.68047E1	1.20055E-7	2.52384E-3	2.52384E-3	6.32896E-3	2.99175E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.16727E-1	-7.98631E-1	-9.13126E0	-9.14204E0	4.8399E-3	9.36985E-2	2.72006E1	-3.26657E1	-3.26723E1	2.6804E1	1.20033E-7	2.51527E-3	2.51527E-3	6.32483E-3	3.00225E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16059E-1	-7.98702E-1	-9.13134E0	-9.14185E0	4.86374E-3	9.39131E-2	2.73499E1	-3.26531E1	-3.26449E1	2.68036E1	1.20122E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16035E-1	-7.98774E-1	-9.13122E0	-9.14207E0	4.81606E-3	9.38892E-2	2.72909E1	-3.26832E1	-3.26378E1	2.68142E1	1.20209E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.02769E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.1656E-1	-7.98488E-1	-9.13124E0	-9.14216E0	4.81606E-3	9.37223E-2	2.73269E1	-3.26596E1	-3.26325E1	2.68273E1	1.2026E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.01995E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.1656E-1	-7.98941E-1	-9.13129E0	-9.14214E0	4.74453E-3	9.38654E-2	2.72901E1	-3.26428E1	-3.2611E1	2.68028E1	1.20055E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.98665E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09356E0	-8.16441E-1	-7.98869E-1	-9.13115E0	-9.14192E0	4.3869E-3	9.37462E-2	2.72949E1	-3.26549E1	-3.25816E1	2.67962E1	1.20004E-7	2.51632E-3	2.51632E-3	6.35059E-3	2.9943E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16655E-1	-7.98512E-1	-9.13126E0	-9.14192E0	4.55379E-3	9.40323E-2	2.72263E1	-3.26295E1	-3.26167E1	2.67866E1	1.19978E-7	2.51581E-3	2.51581E-3	6.31299E-3	2.99879E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.16846E-1	-7.98702E-1	-9.13115E0	-9.14209E0	4.8399E-3	9.35793E-2	2.73826E1	-3.26549E1	-3.265E1	2.67885E1	1.20192E-7	2.52025E-3	2.52025E-3	6.31798E-3	3.006E-1