[Scan]
initial_time=2016-01-27T21:47:54
final_time=2016-01-27T21:48:14
ip_count=19
run=1025
dataset=4
scan=273
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-8.15988E-1
ql1_imon=6.76799E-10
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=3.0278E-10
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=6.73175E-10
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=5.53942E-10
mult1=-9.8433E-9
mult2=-2.65074E-9
rf_tmon=-5.14601E-3
rf_agc=3.33957E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=3.97158E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65893E0
bslens_imon=2.37913E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19935E1
lens5a_imon=1.97694E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.05021E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53496E1
cs_ef1b_imon=2.76935E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02164E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04784E1
cs_ea1_imon=2.56311E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39119E0
lens1_imon=2.61346E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64909E1
os_ef1alow_imon=2.98991E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03834E1
cs_ea2_imon=1.53209E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=2.91639E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=4.15158E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=2.86701E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15336E1
os_ea1_imon=1.90629E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63719E1
os_ef1bup_imon=3.1056E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24309E0
cs_ionrep_imon=1.1734E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93308E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01683E1
cs_anode1_imon=2.90954E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=7.05695E-10
tplens_vset=1.4E-1
tplens_vmon=1.62401E0
tplens_imon=-3.10161E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26205E1
iondef3_imon=1.50505E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26731E1
iondef2_imon=1.58581E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.9849E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=4.57239E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29956E0
ionrepsh_imon=1.7455E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3367E1
lens5b_imon=2.20297E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.14596E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.34299E-1
os_ea2_imon=-7.752E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.00457E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.18921E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61437E0
os_ef2alow_imon=-2.50418E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.50572E-1
os_ef2bup_imon=-5.28283E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10985E1
os_restr2_imon=2.87782E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.30036E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.24677E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74569E1
iondef1_imon=1.09157E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68026E1
iondef4_imon=1.0935E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.02088E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=2.87485E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-1.7113E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47269E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.0593E-1
window_imon=-9.54471E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86897E1
mask2_imon=-5.61639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=7.71447E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.55367E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=6.80241E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.33516E0
defgridb_imon=6.2833E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33882E1
os_fil1_imon=4.56599E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.44316E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62384E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30676E1
cs_fil1_imon=9.97579E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63903E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62729E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.26028E-2
os_fil2_imon=-2.27554E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.77932E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.19979E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30688E-1
cs_fil2_imon=-1.98722E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21553E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31858E-3
inlet_lpb_pmon=3.0041E-1
chamber_ion_pmon=1.20191E-7
chamber_cvt_pmon=2.52027E-3
foreline_cvt_pmon=2.52027E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.95332E-1
res40_imon=-2.3456E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.16703E-1	-7.98345E-1	-9.13103E0	-9.14202E0	4.98295E-3	9.37939E-2	2.71612E1	-3.26585E1	-3.26349E1	2.68148E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.02253E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.16607E-1	-7.98941E-1	-9.13103E0	-9.14221E0	4.95911E-3	9.35078E-2	2.72462E1	-3.26621E1	-3.26224E1	2.67998E1	1.20122E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01871E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.16488E-1	-7.98297E-1	-9.13103E0	-9.14195E0	4.93526E-3	9.36985E-2	2.71559E1	-3.26307E1	-3.26083E1	2.67816E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.16655E-1	-7.98273E-1	-9.13117E0	-9.14211E0	5.03063E-3	9.3627E-2	2.7439E1	-3.26354E1	-3.26301E1	2.68016E1	1.20414E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16512E-1	-7.98392E-1	-9.13134E0	-9.1419E0	5.126E-3	9.377E-2	2.72745E1	-3.26474E1	-3.26315E1	2.67956E1	1.19851E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16607E-1	-7.98535E-1	-9.13129E0	-9.14207E0	5.07832E-3	9.34601E-2	2.71765E1	-3.26452E1	-3.26218E1	2.67956E1	1.20031E-7	2.5225E-3	2.5225E-3	6.26844E-3	3.0041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.16178E-1	-7.98178E-1	-9.13126E0	-9.14204E0	5.19753E-3	9.3627E-2	2.73688E1	-3.26717E1	-3.26585E1	2.68178E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16584E-1	-7.98821E-1	-9.13119E0	-9.14209E0	4.72069E-3	9.37223E-2	2.72901E1	-3.26224E1	-3.26074E1	2.68004E1	1.19544E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.99941E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.1625E-1	-7.98416E-1	-9.13136E0	-9.14235E0	5.22137E-3	9.37462E-2	2.71848E1	-3.26667E1	-3.25959E1	2.67728E1	1.20122E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.16298E-1	-7.98178E-1	-9.13138E0	-9.14207E0	5.14984E-3	9.38654E-2	2.74114E1	-3.26597E1	-3.26224E1	2.67788E1	1.20017E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16703E-1	-7.98154E-1	-9.13131E0	-9.1419E0	4.60148E-3	9.33886E-2	2.72552E1	-3.26326E1	-3.26068E1	2.68082E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16393E-1	-7.98082E-1	-9.13138E0	-9.14173E0	4.93526E-3	9.377E-2	2.74083E1	-3.26897E1	-3.26024E1	2.67873E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.16488E-1	-7.98273E-1	-9.13138E0	-9.14211E0	4.72069E-3	9.38654E-2	2.72762E1	-3.26915E1	-3.27346E1	2.6816E1	1.20158E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.01995E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.1625E-1	-7.98225E-1	-9.13119E0	-9.14223E0	4.88758E-3	9.39608E-2	2.7309E1	-3.26903E1	-3.26042E1	2.67959E1	1.20209E-7	2.51641E-3	2.51641E-3	6.30478E-3	2.99799E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.16393E-1	-7.9844E-1	-9.13138E0	-9.14192E0	4.88758E-3	9.35555E-2	2.73181E1	-3.26889E1	-3.26195E1	2.68121E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16512E-1	-7.98154E-1	-9.13124E0	-9.14202E0	4.86374E-3	9.33886E-2	2.72361E1	-3.26921E1	-3.26042E1	2.6825E1	1.20132E-7	2.52384E-3	2.52384E-3	6.32518E-3	2.98792E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16536E-1	-7.98416E-1	-9.13136E0	-9.14192E0	4.91142E-3	9.33647E-2	2.73287E1	-3.2675E1	-3.2636E1	2.68196E1	1.20055E-7	2.51847E-3	2.51847E-3	6.34518E-3	2.97901E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16512E-1	-7.98559E-1	-9.13134E0	-9.14183E0	4.98295E-3	9.377E-2	2.73596E1	-3.26523E1	-3.26272E1	2.68082E1	1.20158E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.16107E-1	-7.98202E-1	-9.13126E0	-9.14197E0	4.93526E-3	9.38416E-2	2.72276E1	-3.27059E1	-3.2647E1	2.67722E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.15988E-1	-7.98035E-1	-9.13136E0	-9.14173E0	4.76837E-3	9.39131E-2	2.74569E1	-3.26731E1	-3.26205E1	2.68026E1	1.20191E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.0041E-1