[Scan]
initial_time=2016-01-27T21:48:22
final_time=2016-01-27T21:48:42
ip_count=19
run=1025
dataset=4
scan=274
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08812E-4
ql1_vset=
ql1_vmon=-8.1687E-1
ql1_imon=6.7544E-10
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=2.89273E-10
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=7.02786E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=5.409E-10
mult1=-9.5357E-9
mult2=-2.80245E-9
rf_tmon=-5.33556E-3
rf_agc=3.28529E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=3.76976E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6421E0
bslens_imon=2.63869E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20247E1
lens5a_imon=2.00939E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.0497E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53232E1
cs_ef1b_imon=2.75889E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05174E1
cs_ea1_imon=2.57104E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38097E0
lens1_imon=2.69637E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64963E1
os_ef1alow_imon=3.00324E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03871E1
cs_ea2_imon=1.53353E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83751E1
cs_ef1a_imon=2.8944E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=3.92139E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11628E1
os_restr1_imon=2.88251E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15384E1
os_ea1_imon=1.87817E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63353E1
os_ef1bup_imon=3.09659E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21605E0
cs_ionrep_imon=1.19935E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.93449E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02001E1
cs_anode1_imon=2.91278E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=7.24542E-10
tplens_vset=1.4E-1
tplens_vmon=1.65165E0
tplens_imon=-1.04678E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26524E1
iondef3_imon=1.48775E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26579E1
iondef2_imon=1.58869E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02908E2
lens6_imon=2.98486E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.82209E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26892E0
ionrepsh_imon=1.74587E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33724E1
lens5b_imon=2.17702E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74555E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.35501E-1
os_ea2_imon=-4.54359E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00713E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.18452E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62278E0
os_ef2alow_imon=-2.44291E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.46968E-1
os_ef2bup_imon=-5.18553E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10595E1
os_restr2_imon=2.86665E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.29351E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02049E1
cs_anode2_imon=2.25542E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72997E1
iondef1_imon=1.09121E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.10503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.01856E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=2.8311E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.95637E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47587E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56345E1
einzel_imon=7.44637E-6
window_vset=0.0E0
window_vmon=2.2395E-1
window_imon=-1.00853E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82659E2
mask1_imon=2.39012E-4
mask2_vset=0.0E0
mask2_vmon=-1.8674E1
mask2_imon=-4.13876E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.55224E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.49599E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5016E3
multb_neg_imon=7.04755E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.62087E0
defgridb_imon=6.04537E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33904E1
os_fil1_imon=4.85431E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.55128E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62436E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30648E1
cs_fil1_imon=9.986E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62954E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62624E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1571E-2
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.23872E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.31194E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.54584E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.71595E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21528E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20517E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.86322E-1
res40_imon=-2.33839E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=239
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.16226E-1	-7.98297E-1	-9.13141E0	-9.14209E0	4.8399E-3	9.39846E-2	2.73645E1	-3.26651E1	-3.26552E1	2.68009E1	1.20278E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.16321E-1	-7.9782E-1	-9.13167E0	-9.14192E0	5.14984E-3	9.38892E-2	2.71989E1	-3.2647E1	-3.2612E1	2.68257E1	1.19967E-7	2.5216E-3	2.5216E-3	6.31251E-3	2.99906E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16131E-1	-7.98225E-1	-9.13126E0	-9.14209E0	5.126E-3	9.38416E-2	2.73263E1	-3.2652E1	-3.26001E1	2.68088E1	1.20045E-7	2.51952E-3	2.51952E-3	6.33021E-3	3.01065E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16035E-1	-7.98368E-1	-9.13138E0	-9.14237E0	4.91142E-3	9.408E-2	2.73333E1	-3.26891E1	-3.26134E1	2.681E1	1.20209E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.16345E-1	-7.98345E-1	-9.13143E0	-9.14209E0	4.57764E-3	9.38177E-2	2.73327E1	-3.26536E1	-3.26314E1	2.68052E1	1.2035E-7	2.51693E-3	2.51693E-3	6.32418E-3	2.99348E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.1594E-1	-7.98011E-1	-9.13117E0	-9.14226E0	4.62532E-3	9.35555E-2	2.73057E1	-3.26561E1	-3.26307E1	2.68256E1	1.20466E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.01995E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.16774E-1	-7.98392E-1	-9.13103E0	-9.14197E0	5.19753E-3	9.37462E-2	2.73257E1	-3.26284E1	-3.26938E1	2.68166E1	1.20017E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.16774E-1	-7.9844E-1	-9.13122E0	-9.1418E0	4.8399E-3	9.33886E-2	2.73177E1	-3.26585E1	-3.26014E1	2.68052E1	1.20158E-7	2.51847E-3	2.51847E-3	6.28056E-3	3.01738E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16345E-1	-7.98512E-1	-9.1311E0	-9.14199E0	5.05447E-3	9.38654E-2	2.72054E1	-3.26687E1	-3.26362E1	2.68136E1	1.19861E-7	2.52318E-3	2.52318E-3	6.29645E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-8.16631E-1	-7.98249E-1	-9.13134E0	-9.1419E0	4.79221E-3	9.36985E-2	2.72588E1	-3.26536E1	-3.2647E1	2.67878E1	1.20435E-7	2.51116E-3	2.51116E-3	6.32936E-3	2.98481E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.16774E-1	-7.98011E-1	-9.13155E0	-9.14192E0	5.22137E-3	9.3627E-2	2.74409E1	-3.26735E1	-3.26633E1	2.67998E1	1.20122E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.16798E-1	-7.98106E-1	-9.13143E0	-9.14176E0	5.00679E-3	9.38416E-2	2.71623E1	-3.26301E1	-3.26119E1	2.68146E1	1.20004E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.0071E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.1656E-1	-7.98035E-1	-9.13129E0	-9.14173E0	4.8399E-3	9.34601E-2	2.71741E1	-3.25682E1	-3.26502E1	2.68136E1	1.20466E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.16321E-1	-7.98416E-1	-9.13131E0	-9.14197E0	5.07832E-3	9.38654E-2	2.74868E1	-3.26897E1	-3.26402E1	2.68088E1	1.19851E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.00197E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16679E-1	-7.98416E-1	-9.13119E0	-9.14233E0	4.673E-3	9.39369E-2	2.74502E1	-3.26738E1	-3.26455E1	2.68166E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.16536E-1	-7.98798E-1	-9.13112E0	-9.14211E0	4.93526E-3	9.36747E-2	2.7168E1	-3.26591E1	-3.25991E1	2.67842E1	1.20174E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00302E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.16965E-1	-7.98273E-1	-9.13122E0	-9.14202E0	4.74453E-3	9.36031E-2	2.74714E1	-3.26585E1	-3.26283E1	2.68047E1	1.20383E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.16464E-1	-7.98774E-1	-9.13155E0	-9.14221E0	4.93526E-3	9.34839E-2	2.72102E1	-3.26771E1	-3.2653E1	2.68106E1	1.20293E-7	2.52025E-3	2.52025E-3	6.29684E-3	3.00348E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16226E-1	-7.98512E-1	-9.13117E0	-9.14211E0	4.95911E-3	9.36031E-2	2.73405E1	-3.26378E1	-3.26354E1	2.68028E1	1.19713E-7	2.51693E-3	2.51693E-3	6.29067E-3	3.02545E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.1687E-1	-7.98512E-1	-9.13124E0	-9.14216E0	5.03063E-3	9.35793E-2	2.72997E1	-3.26579E1	-3.26524E1	2.67926E1	1.20517E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01223E-1