[Scan]
initial_time=2016-01-27T21:49:17
final_time=2016-01-27T21:49:37
ip_count=19
run=1025
dataset=4
scan=276
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08791E-4
ql1_vset=
ql1_vmon=-8.16321E-1
ql1_imon=6.61707E-10
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=3.29494E-10
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=6.45018E-10
ql4_vset=
ql4_vmon=-9.14149E0
ql4_imon=5.5933E-10
mult1=-1.00221E-8
mult2=-2.91423E-9
rf_tmon=-4.39346E-3
rf_agc=3.36532E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=3.89075E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65445E0
bslens_imon=2.31219E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19906E1
lens5a_imon=1.9868E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.0512E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53641E1
cs_ef1b_imon=2.76155E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04588E2
lens23_imon=1.02133E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05273E1
cs_ea1_imon=2.57637E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37587E0
lens1_imon=2.90413E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64453E1
os_ef1alow_imon=2.98009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03823E1
cs_ea2_imon=1.54105E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.91035E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=4.0803E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11333E1
os_restr1_imon=2.87021E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15359E1
os_ea1_imon=1.89026E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6377E1
os_ef1bup_imon=3.09483E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25673E0
cs_ionrep_imon=1.20456E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01781E1
cs_anode1_imon=2.91724E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=7.61473E-10
tplens_vset=1.4E-1
tplens_vmon=1.62289E0
tplens_imon=-2.8603E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26145E1
iondef3_imon=1.50252E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26505E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.9837E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=3.73638E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22627E0
ionrepsh_imon=1.74049E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33685E1
lens5b_imon=2.18902E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74751E1
cs_ef2b_imon=3.137E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.37708E-1
os_ea2_imon=-4.96588E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00575E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71197E1
cs_ef2a_imon=3.19335E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61002E0
os_ef2alow_imon=-2.51724E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4404E-1
os_ef2bup_imon=-5.21751E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11002E1
os_restr2_imon=2.87102E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.31954E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01916E1
cs_anode2_imon=2.24177E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72085E1
iondef1_imon=1.10881E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68019E1
iondef4_imon=1.08706E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.00031E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=2.70212E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12811E0
cs_ionaccel_imon=-1.69013E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.47206E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56479E1
einzel_imon=7.76082E-6
window_vset=0.0E0
window_vmon=2.39117E-1
window_imon=-8.9951E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39283E-4
mask2_vset=0.0E0
mask2_vmon=-1.86722E1
mask2_imon=-7.29223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9268E3
multa_neg_imon=7.62383E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.51541E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.20271E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.54145E0
defgridb_imon=6.19759E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33896E1
os_fil1_imon=4.8055E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.48821E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62236E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30638E1
cs_fil1_imon=9.9723E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63946E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62461E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.19737E-2
os_fil2_imon=-2.37765E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.65919E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.35671E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30089E-1
cs_fil2_imon=-2.02626E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.21731E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21536E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.65684E-1
res40_imon=-2.3429E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.16703E-1	-7.98678E-1	-9.13172E0	-9.14187E0	4.50611E-3	9.37223E-2	2.72597E1	-3.26502E1	-3.26183E1	2.68099E1	1.20188E-7	2.51439E-3	2.51439E-3	6.33706E-3	3.00197E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09611E0	-8.16822E-1	-7.98631E-1	-9.13141E0	-9.14185E0	4.79221E-3	9.37939E-2	2.73135E1	-3.26615E1	-3.26543E1	2.68004E1	1.20055E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.1656E-1	-7.98988E-1	-9.13162E0	-9.14204E0	4.64916E-3	9.35078E-2	2.73588E1	-3.26685E1	-3.26408E1	2.6789E1	1.2033E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00824E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.16679E-1	-7.98416E-1	-9.13167E0	-9.14202E0	5.38826E-3	9.38654E-2	2.73328E1	-3.26384E1	-3.26266E1	2.6792E1	1.198E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-8.16894E-1	-7.98631E-1	-9.13129E0	-9.14183E0	5.00679E-3	9.377E-2	2.7301E1	-3.26773E1	-3.2649E1	2.6825E1	1.19902E-7	2.51096E-3	2.51096E-3	6.30202E-3	2.98156E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.16536E-1	-7.98607E-1	-9.13105E0	-9.14199E0	4.86374E-3	9.36747E-2	2.72763E1	-3.265E1	-3.25924E1	2.68178E1	1.20106E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.9841E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09657E0	-8.16798E-1	-7.98631E-1	-9.13143E0	-9.1419E0	4.95911E-3	9.37939E-2	2.73063E1	-3.26591E1	-3.26284E1	2.68058E1	1.20278E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.16727E-1	-7.9844E-1	-9.13131E0	-9.14204E0	4.76837E-3	9.408E-2	2.72757E1	-3.26579E1	-3.26404E1	2.6819E1	1.2033E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09688E0	-8.16321E-1	-7.98917E-1	-9.13153E0	-9.14168E0	4.81606E-3	9.36747E-2	2.73016E1	-3.26366E1	-3.26236E1	2.67937E1	1.20069E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.02659E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09657E0	-8.16393E-1	-7.98106E-1	-9.13141E0	-9.1418E0	4.79221E-3	9.35078E-2	2.72414E1	-3.26732E1	-3.26762E1	2.68004E1	1.20209E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.0148E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09634E0	-8.16178E-1	-7.98082E-1	-9.13107E0	-9.14202E0	4.69685E-3	9.36985E-2	2.73862E1	-3.26567E1	-3.26098E1	2.6807E1	1.19705E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.02396E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.15797E-1	-7.97939E-1	-9.13076E0	-9.14173E0	5.07832E-3	9.37462E-2	2.72805E1	-3.26807E1	-3.26543E1	2.6813E1	1.19757E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.02133E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.15916E-1	-7.98011E-1	-9.13115E0	-9.14192E0	4.98295E-3	9.36985E-2	2.73081E1	-3.27552E1	-3.26663E1	2.67956E1	1.2026E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.01995E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09688E0	-8.16154E-1	-7.98202E-1	-9.13107E0	-9.14192E0	4.64916E-3	9.37462E-2	2.73327E1	-3.26705E1	-3.262E1	2.67998E1	1.20122E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.9926E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.16464E-1	-7.97963E-1	-9.13098E0	-9.14202E0	4.76837E-3	9.39131E-2	2.72498E1	-3.26573E1	-3.26278E1	2.67908E1	1.19653E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.02922E-1
1.9E1	0.0E0	1.0E0	7.68E2	5.29E2	-2.0958E0	-8.16345E-1	-7.98535E-1	-9.13124E0	-9.1419E0	4.26769E-3	9.40084E-2	2.72962E1	-3.2682E1	-3.26449E1	2.67798E1	1.20069E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00563E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09657E0	-8.16321E-1	-7.98082E-1	-9.13093E0	-9.14199E0	4.72069E-3	9.36031E-2	2.73173E1	-3.26631E1	-3.26017E1	2.68088E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09727E0	-8.16464E-1	-7.98011E-1	-9.13129E0	-9.14173E0	4.60148E-3	9.38177E-2	2.73773E1	-3.26694E1	-3.26077E1	2.67917E1	1.20344E-7	2.51182E-3	2.51182E-3	6.32858E-3	3.006E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0968E0	-8.16059E-1	-7.98225E-1	-9.13126E0	-9.14168E0	5.03063E-3	9.37223E-2	2.73196E1	-3.26602E1	-3.2637E1	2.68035E1	1.20106E-7	2.51889E-3	2.51889E-3	6.33275E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.16321E-1	-7.98178E-1	-9.13153E0	-9.14149E0	4.62532E-3	9.38177E-2	2.72085E1	-3.26505E1	-3.26145E1	2.68019E1